公开(公告)号：US20090071953A1

公开(公告)日：2009-03-19

申请号：US11911126

申请日：2006-03-31

申请人： Maki Hamaguchi

发明人： Maki Hamaguchi

IPC分类号： H05B6/02

CPC分类号： H05B6/105 ,  H01L21/67109 ,  H01L21/67115

摘要： A glass-like carbon induction heating element having high heating efficiency and a heating apparatus are provided. A glass-like carbon induction heating element, which inductively generates heat by electromagnetic induction, has an infrared radiation characteristic that a ratio (E1/E2) of infrared radiation intensity (E1) of an opposed face to an object-to-be-heated to infrared radiation intensity (E2) of a non-opposed face to the object-to-be-heated exceeds 1.2. A heating apparatus has the glass-like carbon induction heating element, and a high frequency induction coil that is disposed outside the glass-like carbon induction heating element for allowing the glass-like carbon induction heating element to inductively generate heat, wherein the high frequency induction coil is applied with a current so that the object-to-be-heated is heated by infrared rays radiated from the glass-like carbon induction heating element.

摘要翻译： 提供了具有高加热效率的玻璃状碳感应加热元件和加热装置。 通过电磁感应感应发热的玻璃状碳感应加热元件具有红外线辐射特性，即相对面的红外线辐射强度（E1）与被加热物体（E1）的比（E1 / E2） 对于被加热物体的非对置面的红外线辐射强度（E2）超过1.2。 加热装置具有玻璃状碳感应加热元件和设置在玻璃状碳感应加热元件外侧的高频感应线圈，用于使玻璃状碳感应加热元件感应发热，其中高频 感应线圈被施加电流，使得被加热物体被从玻璃状碳感应加热元件辐射的红外线加热。

公开(公告)号：US06932872B2

公开(公告)日：2005-08-23

申请号：US10270522

申请日：2002-10-16

申请人： Maki Hamaguchi

发明人： Maki Hamaguchi

IPC分类号： H05B6/10 ,  C23C16/46 ,  H01L21/205 ,  H01L21/324 ,  H05B6/02 ,  C23C16/00

CPC分类号： H05B6/108

摘要： A heating apparatus which is installed in a low pressure CVD system or annealing equipment for use in semiconductor integrated circuit manufacturing processes for heat-treating wafers on which IC's are to be formed, wherein wafers are uniformly heated, the temperature of wafers is rapidly raised and lowered, and wafers are processed in high volume, wherein the apparatus comprises a cylindrical body made of glass-like carbon placed inside a reactor, and a high-frequency induction coil which is placed outside the reactor and is for causing the cylindrical body made of glass-like carbon to produce heat and thereby heating wafers in the reactor.

摘要翻译： 一种安装在低压CVD系统中的加热装置或用于半导体集成电路制造工艺的退火设备，用于对要在其上形成IC的晶片进行热处理，其中晶片被均匀加热，晶片的温度迅速升高， 降低晶片，并且大量地处理晶片，其中该装置包括放置在反应器内部的由玻璃状碳制成的圆柱体，以及设置在反应器外部并用于使由反应器制成的圆柱体的高频感应线圈 玻璃状碳以产生热量，从而加热反应器中的晶片。

公开(公告)号：US09315751B2

公开(公告)日：2016-04-19

申请号：US14123887

申请日：2012-06-22

申请人： Koji Sakai ,  Takahiro Shishido ,  Noriyuki Okuyama ,  Maki Hamaguchi

发明人： Koji Sakai ,  Takahiro Shishido ,  Noriyuki Okuyama ,  Maki Hamaguchi

IPC分类号： B01D21/02 ,  C10L9/10 ,  C10L9/02 ,  B01D21/24

CPC分类号： C10L9/10 ,  B01D21/2405 ,  B01D21/2416 ,  B01D21/2427 ,  C10L9/02

摘要： A gravitational settling tank including a pressure vessel which precipitates solid content contained in slurry in which coal and solvent are blended, and separates the solid-content concentrated liquid from the supernatant liquid, and a supply pipe which supplies the pressure vessel with the slurry. A main body part and a nozzle part which is connected on the downstream side of the main body part and extends horizontally are provided in the supply pipe. A plurality of holes are provided in the nozzle part. By virtue of this, agitation of the solid-content concentrated liquid which has settled in the bottom is inhibited.

摘要翻译： 一种重力沉降槽，包括沉淀出浆料中含有的固体成分的压力容器，其中混合有煤和溶剂，并将固体含量浓缩液体与上清液分离，以及向压力容器供给浆料的供给管。 连接在主体部分的下游侧并水平延伸的主体部分和喷嘴部分设置在供给管中。 在喷嘴部中设置有多个孔。 由此，抑制了沉降在底部的固体成分浓缩液体的搅动。

公开(公告)号：US07485239B2

公开(公告)日：2009-02-03

申请号：US11493518

申请日：2006-07-27

申请人： Maki Hamaguchi

发明人： Maki Hamaguchi

IPC分类号： B44C1/22 ,  B31D3/00 ,  C01B31/00

CPC分类号： C23C16/45591 ,  C04B35/524 ,  C04B2235/48 ,  C04B2235/65 ,  C04B2235/725 ,  C04B2235/94 ,  C04B2235/963 ,  C04B2235/9638 ,  C23C16/4404 ,  C23C16/4581 ,  Y10T428/30

摘要： Disclosed herein is an inner tube of glass-like carbon for CVD apparatus and a process for production thereof. The inner tube has its surface roughened without increase in metal impurities which cause particles. It has improved adhesion to CVD deposit film and also has a high degree of roundness. The surface roughness (on both the inner and outer surfaces) is 0.1-10 μm measured according to JIS B0601. The concentration of metal impurities (iron, copper, chromium, sodium, potassium, calcium, magnesium, and aluminum) in the surface is less than 50×1010 atoms/cm2.

摘要翻译： 本发明公开了一种用于CVD设备的玻璃状碳的内管及其制造方法。 内管的表面粗糙而不增加引起颗粒的金属杂质。 它具有改善对CVD沉积膜的粘附性，并且还具有高度的圆度。 根据JIS B0601测量表面粗糙度（内表面和外表面）为0.1-10μm。 表面金属杂质（铁，铜，铬，钠，钾，钙，镁和铝）的浓度小于50×10 10原子/ cm 2。

公开(公告)号：US20080011741A1

公开(公告)日：2008-01-17

申请号：US11773075

申请日：2007-07-03

申请人： Maki HAMAGUCHI ,  Takayasu Fujiura

发明人： Maki HAMAGUCHI ,  Takayasu Fujiura

IPC分类号： H05B6/00 ,  H05B6/02 ,  H05B6/10

CPC分类号： H05B6/36

摘要： An inductive heating element includes a substrate and an insulating layer covering the substrate. The substrate contains a carbonaceous material such as glassy carbon. The inductive heating element effectively exchanges heat with a flowing gas to be heated and thereby efficiently heat the gas.

摘要翻译： 感应加热元件包括衬底和覆盖衬底的绝缘层。 底物含有碳质材料如玻璃碳。 感应加热元件与待加热的流动气体有效地交换热量，从而有效地加热气体。

公开(公告)号：US07311863B2

公开(公告)日：2007-12-25

申请号：US10831151

申请日：2004-04-26

申请人： Maki Hamaguchi ,  Keiji Kishimoto

发明人： Maki Hamaguchi ,  Keiji Kishimoto

IPC分类号： B28B1/20 ,  C03B31/00

CPC分类号： C04B35/524 ,  B32B18/00 ,  C04B35/6269 ,  C04B35/63476 ,  C04B2235/602 ,  C04B2235/6567 ,  C04B2235/658 ,  C04B2235/94 ,  C04B2237/363 ,  C04B2237/704 ,  C04B2237/765 ,  C04B2237/80 ,  C04B2237/84 ,  F16L9/10

摘要： A method for producing a glass-like carbon pipe is provided. The method comprises the steps of producing a plurality of thermosetting resin molded articles by centrifugal molding, said molded articles each having the shape of the sections of a pipe divided in the longitudinal direction and each provided with threaded or fitting portions; integrating these molded articles by joining at the threaded or fitting portions; and carbonizing the joined pipe to thereby produce a glass-like carbon pipe. This method is capable of producing a straight or bent pipe with excellent mechanical strength and gas sealability at the joint, and this method enables production of a pipe at a low cost since no machining is required for providing the threaded or fitting portions.

摘要翻译： 提供一种玻璃状碳管的制造方法。 该方法包括以下步骤：通过离心成型制造多个热固性树脂模塑制品，所述模塑制品各自具有沿纵向方向分割的管道的形状，并且每个具有螺纹或装配部分; 通过在螺纹或嵌合部分接合来集成这些模制品; 并对连接的管进行碳化，从而制造玻璃状碳管。 该方法能够制造在接头处具有优异的机械强度和气体密封性的直管或弯管，并且该方法能够以低成本生产管，因为不需要加工螺纹或嵌合部分。

公开(公告)号：US20070018347A1

公开(公告)日：2007-01-25

申请号：US11421209

申请日：2006-05-31

申请人： Maki HAMAGUCHI

发明人： Maki HAMAGUCHI

IPC分类号： B32B9/00

CPC分类号： C04B35/524 ,  C04B38/0003 ,  C04B2111/00431 ,  C04B2111/00844 ,  C04B2235/48 ,  Y10T428/30 ,  C04B38/0032 ,  C04B2103/0056

摘要： A method for manufacturing a glass-like carbon molded body is provided which can obtain an excellent glass-like carbon molded body without cracks from a thermosetting resin molded body having a large thickness exceeding, for example, 10 mm, unlike in the conventional method in which an upper limit of the resin molded body has been, for example, 7 mm, even at the rate of temperature increase that is industrially practical considering the productivity at a carbonization step of heating the thermosetting resin molded body when manufacturing the glass-like carbon molded body. The method for manufacturing a glass-like carbon molded body comprises a step of carbonizing a thermosetting resin molded body by heating the molded body in inert atmosphere. The thermosetting resin molded body has one or more opened vent holes on a surface thereof, and satisfies the following formula, in which r (mm) is either a distance from an arbitrary point inside the thermosetting resin molded body to an outer surface thereof, or a distance from the arbitrary point to a surface of the vent hole, whichever is shorter, and x (° C./h) is an average rate of temperature increase in a range of 400 to 600° C. at the carbonization step: r

摘要翻译： 提供了一种制造玻璃状碳成型体的方法，其可以从厚度超过例如10mm的热固性树脂成型体获得优异的玻璃状碳成型体而不发生裂纹，与常规方法不同 考虑到在制造玻璃状碳时加热热固性树脂成型体的碳化步骤的生产率，即使在温度上升的情况下，树脂成型体的上限例如为7mm 成型体。 玻璃状碳成型体的制造方法包括通过在惰性气氛下加热成型体来使热固性树脂成型体碳化的工序。 热固性树脂成型体的表面具有一个以上的开放通气孔，满足下列公式，其中r（mm）是从热固性树脂成型体内的任意点到其外表面的距离，或 从通气孔的任意点到表面的距离（以较短者为准），x（℃/ h）是在碳化步骤中在400〜600℃范围内的平均升温速度：r <（8.0-xa）/ 2，其中a = 1（mm.h /℃）。

公开(公告)号：US20060261039A1

公开(公告)日：2006-11-23

申请号：US11493518

申请日：2006-07-27

申请人： Maki Hamaguchi

发明人： Maki Hamaguchi

IPC分类号： C03C15/00

CPC分类号： C23C16/45591 ,  C04B35/524 ,  C04B2235/48 ,  C04B2235/65 ,  C04B2235/725 ,  C04B2235/94 ,  C04B2235/963 ,  C04B2235/9638 ,  C23C16/4404 ,  C23C16/4581 ,  Y10T428/30

摘要： Disclosed herein is an inner tube of glass-like carbon for CVD apparatus and a process for production thereof. The inner tube has its surface roughened without increase in metal impurities which cause particles. It has improved adhesion to CVD deposit film and also has a high degree of roundness. The surface roughness (on both the inner and outer surfaces) is 0.1-10 μm measured according to JIS B0601. The concentration of metal impurities (iron, copper, chromium, sodium, potassium, calcium, magnesium, and aluminum) in the surface is less than 50×1010 atoms/cm2.

摘要翻译： 本发明公开了一种用于CVD设备的玻璃状碳的内管及其制造方法。 内管的表面粗糙而不增加引起颗粒的金属杂质。 它具有改善对CVD沉积膜的粘附性，并且还具有高度的圆度。 根据JIS B0601测量表面粗糙度（内表面和外表面）为0.1-10μm。 金属杂质（铁，铜，铬，钠，钾，钙，镁和铝）在表面的浓度小于50×10 10原子/ cm 2。

公开(公告)号：US06756509B2

公开(公告)日：2004-06-29

申请号：US10193231

申请日：2002-07-12

申请人： Yoshiyuki Nagase ,  Koji Yamamoto ,  Takeharu Tanaka ,  Maki Hamaguchi

发明人： Yoshiyuki Nagase ,  Koji Yamamoto ,  Takeharu Tanaka ,  Maki Hamaguchi

IPC分类号： C07C5142

CPC分类号： C07C51/487 ,  C07C63/38

摘要： A method for purifying crude 2,6-naphthalenedicarboxylic acid includes a reduction step of reducing crude 2,6-naphthalenedicarboxylic acid containing 6-formyl-2-naphthoic acid with hydrogen and a cleaning step of cleaning the reduction product with alcohol. Preferably, in the reduction step, the crude 2,6-naphthalenedicarboxylic acid and the hydrogen is brought into contact with a hydrogenation catalyst in a liquid phase, and particularly in water. The method makes the purification process less complex and makes it possible to produce high-purity 2,6-naphthalenedicarboxylic acid without damaging equipment or increasing cost.

摘要翻译： 纯化2,6-萘二羧酸粗品的方法包括用氢气还原含有6-甲酰基-2-萘甲酸的2,6-二萘酸二甲酸粗制品的还原步骤和用醇清洗还原产物的清洗步骤。 优选地，在还原步骤中，将粗2,6-萘二甲酸和氢气与液相中的氢化催化剂接触，特别是在水中。 该方法使得纯化过程不那么复杂，并且可以生产高纯度2,6-萘二甲酸而不损坏设备或增加成本。

公开(公告)号：US06660093B2

公开(公告)日：2003-12-09

申请号：US09863383

申请日：2001-05-24

申请人： Maki Hamaguchi ,  Takahiro Kobayashi

发明人： Maki Hamaguchi ,  Takahiro Kobayashi

IPC分类号： C23C16000

CPC分类号： C23C16/4401 ,  C23C16/44 ,  C23C16/4404

摘要： Disclosed herein is an inner tube for CVD apparatus which is made of glass-like carbon. This inner tube has good heat resistance and good corrosion resistance. It also has an inside surface for good adhesion with CVD film constituents. Therefore, it hardly contaminates silicon wafers during the production of semiconductors. The inner tube is characterized by a specific coefficient of thermal expansion, a specific surface roughness of its inside surface, a specific oxygen/carbon atomic ratio (O/C) of its inside surface, and a specific I(D)/I(G) ratio of its inside surface, where I(D) is a peak intensity representing the C—C bond of diamond-like structure and I(G) is a peak intensity representing the C—C bond of graphite-like structure.