公开(公告)号：US20210375578A1

公开(公告)日：2021-12-02

申请号：US17055984

申请日：2019-05-14

Applicant: Photo electron Soul Inc.

Inventor： Reiki Watanabe ,  Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: H01J37/147 ,  H01J37/073 ,  H01J3/02 ,  H01J1/34

Abstract: The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.
[Solution] An incident axis alignment method for an electron gun equipped with a photocathode, the electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and the method including at least an excitation light radiation step, a first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and an electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system.

公开(公告)号：US20210134551A1

公开(公告)日：2021-05-06

申请号：US17044856

申请日：2019-08-07

Applicant: Photo electron Soul Inc.

Inventor： Hokuto Iijima

IPC: H01J3/14 ,  H01J31/04 ,  H01J1/34 ,  H01J1/46 ,  H01J3/02

Abstract: The present invention addresses the problem of providing a device with which it is possible to adjust the focal point of an electron beam both toward a shorter focal point and toward a longer focal point after an electronic gun was fitted on a counterpart device.
The aforementioned problem can be solved by an electron gun including a photocathode, and an anode, the electron gun furthermore comprising an intermediate electrode disposed between the photocathode and the anode, the intermediate electrode comprising an electron-beam passage hole through which an electron beam released from the photocathode passes, and the electron-beam passage hole having formed therein a drift space in which, when an electrical field is formed between the photocathode and the anode due to application of a voltage, the effect of the electrical field can be disregarded.