公开(公告)号：US20230230794A1

公开(公告)日：2023-07-20

申请号：US17996215

申请日：2021-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Daiki Sato

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/06333 ,  H01J2237/0653 ,  H01J2237/30472

Abstract: An object is to provide an electron gun that can extend the lifetime of a photocathode. The object can be achieved by an electron gun including: a substrate having a photocathode film formed on a first face; a light source for irradiating the photocathode film with excitation light; an anode; a heater device for heating the photocathode film and/or the substrate; and an output adjustment device that adjusts a heating temperature of the heater device.

公开(公告)号：US11417494B2

公开(公告)日：2022-08-16

申请号：US17055984

申请日：2019-05-14

Applicant: Photo electron Soul Inc.

Inventor： Reiki Watanabe ,  Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: H01J37/147 ,  H01J37/073 ,  H01J3/02 ,  H01J1/34

Abstract: The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.
[Solution] An incident axis alignment method for an electron gun equipped with a photocathode, the electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and the method including at least an excitation light radiation step, a first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and an electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system.

公开(公告)号：US20200080949A1

公开(公告)日：2020-03-12

申请号：US16609728

申请日：2018-12-20

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: G01N23/2251 ,  H01J37/073 ,  H01J37/244

Abstract: The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection. A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.

公开(公告)号：US11842879B2

公开(公告)日：2023-12-12

申请号：US17996213

申请日：2021-08-20

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/024 ,  H01J2237/06333 ,  H01J2237/06375

Abstract: Provided are an electron gun, an electron gun component, an electron beam applicator, and an alignment method that can align the emission axis of an electron beam with the optical axis of the electron optical system of the counterpart device even when misalignment of a mounted position of the electron gun being mounted to the counterpart device is larger. The electron gun includes: a light source; a vacuum chamber; a photocathode that emits an electron beam in response to receiving light from the light source; an electrode kit; and an electrode kit drive device, the electrode kit includes a photocathode supporting part, and an anode arranged spaced apart from the photocathode supporting part, the photocathode is placed on the photocathode supporting part, and the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.

公开(公告)号：US11150204B2

公开(公告)日：2021-10-19

申请号：US16609728

申请日：2018-12-20

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: G01N23/2251 ,  H01J37/073 ,  H01J37/244 ,  H01J37/22 ,  H01J37/252

Abstract: The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection. A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.

公开(公告)号：US20210035766A1

公开(公告)日：2021-02-04

申请号：US16500789

申请日：2018-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Tomoaki Kawamata ,  Haruka Shikano

IPC: H01J1/94 ,  H01J3/02

Abstract: The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated. The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.

公开(公告)号：US20230207249A1

公开(公告)日：2023-06-29

申请号：US17996213

申请日：2021-08-20

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/06333 ,  H01J2237/06375 ,  H01J2237/024

Abstract: Provided are an electron gun, an electron gun component, an electron beam applicator, and an alignment method that can align the emission axis of an electron beam with the optical axis of the electron optical system of the counterpart device even when misalignment of a mounted position of the electron gun being mounted to the counterpart device is larger. The electron gun includes: a light source; a vacuum chamber; a photocathode that emits an electron beam in response to receiving light from the light source; an electrode kit; and an electrode kit drive device, the electrode kit includes a photocathode supporting part, and an anode arranged spaced apart from the photocathode supporting part, the photocathode is placed on the photocathode supporting part, and the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.

公开(公告)号：US11302507B2

公开(公告)日：2022-04-12

申请号：US16500789

申请日：2018-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Tomoaki Kawamata ,  Haruka Shikano

IPC: H01J1/94 ,  H01J3/02

Abstract: The present invention addresses the problem of providing an electron beam generator and an electron beam applicator for which maintenance is facilitated. The electron beam generator comprises a vacuum chamber, a photocathode holder, an activation vessel, and an internal motive power transmission member. The photocathode holder is capable of moving relative to the activation vessel.

公开(公告)号：US20210375578A1

公开(公告)日：2021-12-02

申请号：US17055984

申请日：2019-05-14

Applicant: Photo electron Soul Inc.

Inventor： Reiki Watanabe ,  Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: H01J37/147 ,  H01J37/073 ,  H01J3/02 ,  H01J1/34

Abstract: The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.
[Solution] An incident axis alignment method for an electron gun equipped with a photocathode, the electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and the method including at least an excitation light radiation step, a first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and an electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system.