公开(公告)号：US20090081385A1

公开(公告)日：2009-03-26

申请号：US12207968

申请日：2008-09-10

Applicant: Peter Nicholas Heys ,  Andrew Kingsley ,  Fuquan Song ,  Paul Williams ,  Thomas Leese ,  Hywel Owen Davies ,  Rajesh Odedra

Inventor： Peter Nicholas Heys ,  Andrew Kingsley ,  Fuquan Song ,  Paul Williams ,  Thomas Leese ,  Hywel Owen Davies ,  Rajesh Odedra

IPC: B05D5/12

CPC classification number: C23C16/45553

Abstract: Methods of forming a metal-containing film by atomic layer deposition is provided. The methods comprise delivering at least one precursor to a substrate, wherein the at least one precursor corresponds in structure to Formula II: wherein: M is Hf or Zr; R is C1-C6-alkyl; n is zero, 1, 2, 3, 4 or 5; L is C1-C6-alkoxy. Further methods are provided of forming a metal-containing film by liquid injection atomic layer deposition. The methods comprise delivering at least one precursor to a substrate, wherein the at least one precursor corresponds in structure to Formula III: wherein: M is Hf or Zr; R is C1-C6-alkyl; n is zero, 1, 2, 3, 4 or 5; L is amino, wherein the amino is optionally independently substituted 1 or 2 times with C1-C6-alkyl.

Abstract translation: 提供了通过原子层沉积法形成含金属膜的方法。 所述方法包括将至少一种前体递送至基底，其中所述至少一种前体在结构上相应于式II：其中：M是Hf或Zr; R是C 1 -C 6 - 烷基; n为零，1，2，3，4或5; L是C1-C6-烷氧基。 提供了通过液体注入原子层沉积形成含金属膜的其它方法。 所述方法包括将至少一种前体递送至基底，其中所述至少一种前体在结构上对应于式III：其中：M是Hf或Zr; R是C 1 -C 6 - 烷基; n为零，1，2，3，4或5; L是氨基，其中氨基任选独立地被C 1 -C 6烷基取代1或2次。

公开(公告)号：US20080251016A1

公开(公告)日：2008-10-16

申请号：US12093893

申请日：2006-10-12

Applicant: Hugh Cunning ,  Graham Williams ,  Rajesh Odedra ,  Ravi Kanjolia

Inventor： Hugh Cunning ,  Graham Williams ,  Rajesh Odedra ,  Ravi Kanjolia

IPC: C23C16/00

CPC classification number: C23C16/4481

Abstract: A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler.

Abstract translation: 用于将液体或固体金属有机化合物输送到反应器位置的起泡器（2）。 起泡器具有内室和外室，并且具有位于其入口（6）和出口（8）之间的构件（14），其中设有多个孔。 构件（14）优选为具有预定密度的孔的穿孔盘的形式，以提供载气通过起泡器的最佳拾取和流动。

公开(公告)号：US06698728B1

公开(公告)日：2004-03-02

申请号：US10149092

申请日：2002-06-06

Applicant: Megan Ravetz ,  Graham Williams ,  Andrew Nelson ,  Roy Trevor Blunt ,  Howard Williams ,  Rajesh Odedra

Inventor： Megan Ravetz ,  Graham Williams ,  Andrew Nelson ,  Roy Trevor Blunt ,  Howard Williams ,  Rajesh Odedra

IPC: B01D4702

CPC classification number: C23C16/45561 ,  C23C16/4482 ,  C30B25/14

Abstract: A method and apparatus for the bulk delivery of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler (1) to a plurality of reactor sites (12, 14, 16, 18, 20) wherein a carrier gas (2) is introduced into the container (1) of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively distributed to one or more of a plurality of reactor sites (12, 14, 16, 18, 20). The gaseous mixture may be stored in a reservoir (9) and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required.

Abstract translation: 一种用于将诸如有机金属化合物的前体从散装容器例如起泡器（1）批量输送到多个反应器位置（12,14,16,18,20）的方法和装置，其中载体 将气体（2）引入前体的容器（1）中以吸收前体以形成气体混合物。 然后将气体混合物选择性地分布到多个反应器位置（12,14,16,18,20）中的一个或多个。 气体混合物可以储存在储存器（9）中，并且当需要时可以通过压力差或在真空下抽吸到每个反应器位置。