Abstract:
In an external force detection apparatus, a crystal plate is cantilevered within a container. Excitation electrodes are formed on the top surface and the bottom surface of the crystal plate. A movable electrode is formed on a distal end on the bottom surface of the crystal plate and is connected to the excitation electrode on the bottom surface via an extraction electrode. A fixed electrode is provided on the bottom of the container to oppose the movable electrode. The excitation electrode on the top surface and the fixed electrode are connected to an oscillating circuit. When an external force acts on the crystal plate to bend it, the capacitance between the movable electrode and the fixed electrode changes, and this capacitance change is captured as a change in the oscillating frequency of the crystal plate.
Abstract:
Objects of the present invention is to provide a piezoelectric resonator having high frequency stability and a sensing sensor using the piezoelectric resonator.In the present invention, a piezoelectric resonator 1 has: a first oscillation area 105 which is provided in a piezoelectric piece 100 and from which a first oscillation frequency is taken out; a second oscillation area which is provided in an area 105 different from the first oscillation area 106 via an elastic boundary area 107 and from which a second oscillation frequency is taken out; and excitation electrodes 101 to 103 provided on one surface side and another surface side of the oscillation areas 105, 106 across the piezoelectric piece 100, and a frequency difference between the first oscillation frequency and the second oscillation frequency is not less than 0.2% nor greater than 2.2% of these oscillation frequencies.
Abstract:
To provide a piezoelectric sensor in which a first electrode for measurement and a second electrode for reference are provided apart from each other on one surface side of a piezoelectric piece and a common electrode is provided on an opposite surface side so as to face the first and second electrodes. A piezoelectric sensor includes: a first electrode for measurement and a second electrode for reference provided apart from each other on one surface side of a piezoelectric piece; a common electrode provided on an opposite surface side of the piezoelectric piece commonly for the first electrode and the second electrode to face the first electrode and the second electrode; and an adsorption layer formed on an area, of the common electrode, to which the first electrode is faced across the piezoelectric piece, to adsorb a substance to be sensed.