Electromechanical switch with partially rigidified electrode
    21.
    发明授权
    Electromechanical switch with partially rigidified electrode 有权
    具有部分硬化电极的机电开关

    公开(公告)号:US07898371B2

    公开(公告)日:2011-03-01

    申请号:US12554679

    申请日:2009-09-04

    IPC分类号: H01P1/10 H01H57/00

    CPC分类号: H01H59/0009

    摘要: An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode.

    摘要翻译: 具有刚性电极的机电开关包括致动电极,悬挂电极,触点和信号线。 致动电极设置在基板上。 悬挂的电极悬挂在致动电极附近并且包括刚性结构。 接触件安装到悬挂电极。 当在致动电极和悬挂电极之间施加致动电压时,信号线定位成接近悬挂电极以与触点形成闭合电路。

    ELECTROMECHANICAL SWITCH WITH PARTIALLY RIGIDIFIED ELECTRODE
    22.
    发明申请
    ELECTROMECHANICAL SWITCH WITH PARTIALLY RIGIDIFIED ELECTRODE 有权
    具有部分刚性电极的电气开关

    公开(公告)号:US20100072043A1

    公开(公告)日:2010-03-25

    申请号:US12554679

    申请日:2009-09-04

    IPC分类号: H01H57/00

    CPC分类号: H01H59/0009

    摘要: An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode.

    摘要翻译: 具有刚性电极的机电开关包括致动电极,悬挂电极,触点和信号线。 致动电极设置在基板上。 悬挂的电极悬挂在致动电极附近并且包括刚性结构。 接触件安装到悬挂电极。 当在致动电极和悬挂电极之间施加致动电压时,信号线定位成接近悬挂电极以与触点形成闭合电路。

    Seek-scan probe (SSP) including see-saw scan probe with redundant tip
    23.
    发明授权
    Seek-scan probe (SSP) including see-saw scan probe with redundant tip 有权
    包括扫描探头(SSP),包括具有冗余尖端的锯齿扫描探针

    公开(公告)号:US07622780B2

    公开(公告)日:2009-11-24

    申请号:US11644650

    申请日:2006-12-21

    IPC分类号: H01L27/14

    摘要: An apparatus comprising a substrate having a probe suspension formed thereon, a see-saw probe coupled to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end, and an actuation electrode formed on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe. A process comprising forming a probe suspension on a substrate, coupling a see-saw probe to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end, and forming an actuation electrode on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe.

    摘要翻译: 一种装置,包括其上形成有探针悬架的基板,耦合到探针悬架的跷跷板探头,跷跷板探头包括第一端和第二端,其顶端从第一端的一侧突出,以及致动电极 形成在基板上,致动电极定位成在锯齿探头的第二端上施加力。 一种方法,包括在基底上形成探针悬架,将锯齿探头连接到探针悬架,锯齿探头包括第一端和第二端,顶端从第一端的一侧突出,并形成致动电极 在基板上,致动电极定位成在锯齿探头的第二端上施加力。

    Electromechanical switch with partially rigidified electrode
    24.
    发明授权
    Electromechanical switch with partially rigidified electrode 有权
    具有部分硬化电极的机电开关

    公开(公告)号:US07605675B2

    公开(公告)日:2009-10-20

    申请号:US11472018

    申请日:2006-06-20

    IPC分类号: H01P1/15

    CPC分类号: H01H59/0009

    摘要: An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode.

    摘要翻译: 具有刚性电极的机电开关包括致动电极,悬挂电极,触点和信号线。 致动电极设置在基板上。 悬挂的电极悬挂在致动电极附近并且包括刚性结构。 接触件安装到悬挂电极。 当在致动电极和悬挂电极之间施加致动电压时,信号线定位成接近悬挂电极以与触点形成闭合电路。

    Cantilever on cantilever structure
    25.
    发明申请
    Cantilever on cantilever structure 有权
    悬臂悬臂结构

    公开(公告)号:US20090040911A1

    公开(公告)日:2009-02-12

    申请号:US11891459

    申请日:2007-08-10

    IPC分类号: G11B9/00

    CPC分类号: G11B9/02 B82Y10/00 G11B9/1436

    摘要: In one embodiment, the present invention includes an apparatus having a first cantilever structure to move in a vertical direction, including a first plate formed of a conductive material, an insulation beam adapted on a portion of the first plate, and a second cantilever structure adapted on the insulation beam and including a second plate formed of a conductive material, where an air gap is present between the first and second plates. Other embodiments are described and claimed.

    摘要翻译: 在一个实施例中,本发明包括具有第一悬臂结构以在垂直方向上移动的装置,包括由导电材料形成的第一板,适于在第一板的一部分上的绝缘梁,以及适于 在绝缘梁上并且包括由导电材料形成的第二板,其中在第一和第二板之间存在气隙。 描述和要求保护其他实施例。

    Double electrode cantilever actuation for seek-scan-probe data access
    26.
    发明申请
    Double electrode cantilever actuation for seek-scan-probe data access 有权
    用于寻道扫描探头数据访问的双电极悬臂驱动

    公开(公告)号:US20090002887A1

    公开(公告)日:2009-01-01

    申请号:US11823214

    申请日:2007-06-27

    IPC分类号: G11B15/10

    摘要: A seek-scan-probe memory device, utilizing a media electrode to allow active cantilevers to contact the storage media, and a pull electrode to pull up cantilevers away from the storage media when in an inactive mode. Other embodiments are described and claimed.

    摘要翻译: 寻找扫描探针存储装置,利用介质电极来允许主动悬臂与存储介质接触;以及拉电极,当处于非活动模式时,将悬臂从存储介质上拉出。 描述和要求保护其他实施例。

    Electromechanical switch with partially rigidified electrode
    28.
    发明申请
    Electromechanical switch with partially rigidified electrode 有权
    具有部分硬化电极的机电开关

    公开(公告)号:US20070290773A1

    公开(公告)日:2007-12-20

    申请号:US11472018

    申请日:2006-06-20

    IPC分类号: H01P1/10

    CPC分类号: H01H59/0009

    摘要: An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode.

    摘要翻译: 具有刚性电极的机电开关包括致动电极,悬挂电极,触点和信号线。 致动电极设置在基板上。 悬挂的电极悬挂在致动电极附近并且包括刚性结构。 接触件安装到悬挂电极。 当在致动电极和悬挂电极之间施加致动电压时,信号线定位成接近悬挂电极以与触点形成闭合电路。

    Micro-electromechanical system (MEMS) trampoline switch/varactor
    29.
    发明申请
    Micro-electromechanical system (MEMS) trampoline switch/varactor 有权
    微机电系统(MEMS)蹦床开关/变容二极管

    公开(公告)号:US20070268095A1

    公开(公告)日:2007-11-22

    申请号:US11435259

    申请日:2006-05-16

    IPC分类号: H01P1/10

    CPC分类号: H01P1/127 B81B3/007

    摘要: A micro-electromechanical device includes an actuation electrode and a suspended electrode. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode. The suspended electrode includes support members and a plate member. Each of the support members is clamped at either end to the substrate via anchors and the plate member is supported by the support members. The support members are flexible in response to an actuation voltage that is applied between the actuation electrode and the suspended electrode to allow the suspended electrode to electrostatically pull towards the actuation electrode. A signal line is coupled to the suspended electrode.

    摘要翻译: 微机电装置包括致动电极和悬置电极。 致动电极设置在基板上。 悬挂电极悬挂在致动电极附近。 悬挂电极包括支撑构件和板构件。 每个支撑构件通过锚固件在任一端夹持到基板,并且板构件由支撑构件支撑。 支撑构件响应于施加在致动电极和悬挂电极之间的致动电压而是柔性的,以允许悬挂的电极静电地拉向致动电极。 信号线耦合到悬挂电极。

    Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters
    30.
    发明申请
    Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters 有权
    折叠拉链变容二极管与可调谐滤波器的数字间驱动电极

    公开(公告)号:US20060226501A1

    公开(公告)日:2006-10-12

    申请号:US11092022

    申请日:2005-03-29

    IPC分类号: H01L29/84 H01L21/00

    摘要: According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomponents mounted on the two or more bottom electrodes and a top bendable electrode mounted on the substrate. The top electrode collapses a first magnitude towards the actuation electrodes whenever a first voltage is applied to one or more of the actuation electrodes and collapses a second magnitude towards the actuation electrodes whenever a second voltage is applied to the actuation electrodes.

    摘要翻译: 根据一个实施例,公开了一种微机电(MEMS)开关。 MEMS开关包括基板,安装在基板上的多个致动电极,安装在基板上的多个底部电极,具有安装在两个或多个底部电极上的子部件的电容器和安装在基板上的顶部可弯曲电极。 每当施加第一电压施加到一个或多个致动电极时,顶电极朝向致动电极塌缩第一大小,并且每当向致动电极施加第二电压时,向起动电极塌缩第二大小。