公开(公告)号：US07687297B2

公开(公告)日：2010-03-30

申请号：US11824465

申请日：2007-06-29

Applicant: John Heck ,  Tsung-Kuan Allen Chou

Inventor： John Heck ,  Tsung-Kuan Allen Chou

IPC: H01L21/00

CPC classification number: B81C1/00246 ,  B81B2201/07 ,  B81B2201/11 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C2203/0735 ,  B82Y10/00 ,  G11B9/1436

Abstract: In one embodiment, the present invention includes a method for forming a sacrificial oxide layer on a base layer of a microelectromechanical systems (MEMS) probe, patterning the sacrificial oxide layer to provide a first trench pattern having a substantially rectangular form and a second trench pattern having a substantially rectangular portion and a lateral portion extending from the substantially rectangular portion, and depositing a conductive layer on the patterned sacrificial oxide layer to fill the first and second trench patterns to form a support structure for the MEMS probe and a cantilever portion of the MEMS probe. Other embodiments are described and claimed.

Abstract translation: 在一个实施例中，本发明包括在微机电系统（MEMS）探针的基底层上形成牺牲氧化物层的方法，图案化牺牲氧化物层以提供具有基本矩形形状的第一沟槽图案和第二沟槽图案 具有基本上矩形的部分和从所述大致矩形部分延伸的横向部分，以及在所述图案化的牺牲氧化物层上沉积导电层以填充所述第一和第二沟槽图案以形成用于所述MEMS探针的支撑结构， MEMS探针。 描述和要求保护其他实施例。

公开(公告)号：US07982361B2

公开(公告)日：2011-07-19

申请号：US12295027

申请日：2007-03-30

Applicant: Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

Inventor： Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

IPC: H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.

Abstract translation: 致动器包括连接部分，其一端可旋转地连接到固定部分的连接点（C1），另一端可旋转地连接到移动部分的连接点（C2），连接部分的一端可旋转地连接到 所述固定部分的连接点（C3）和另一端可旋转地连接到所述移动部分的连接点（C4），所述梳齿电极具有连接到梳齿基点（B1）的根部部分， 所述梳齿电极具有连接到所述固定部分的所述根部部分，而所述另一部分沿着所述梳齿电极的曲线延伸并且与所述梳齿电极以预定间隙相对。

公开(公告)号：US07440155B1

公开(公告)日：2008-10-21

申请号：US11955542

申请日：2007-12-13

Applicant: Mark A. Lantz ,  Hugo E. Rothuizen

Inventor： Mark A. Lantz ,  Hugo E. Rothuizen

IPC: G02B26/08 ,  H02K5/00

CPC classification number: G02B26/101 ,  B81B3/0078 ,  B81B2201/11 ,  B81B2203/055 ,  B82Y10/00 ,  G11B9/1409 ,  H02K33/18 ,  H02K2201/18 ,  Y10S359/90

Abstract: An actuating mechanism includes a scanner chip having a scan table mounting cavity, and a bracket moveably positioned in the scan table mounting cavity. A scan table is moveably positioned in the bracket. The bracket has a first mass and the scan table has a second mass. A first coil and frame collectively define a third mass and a second coil and frame collectively define a fourth mass. A first pivoting element is connected to the first coil and the scan table. The first pivoting element is pivotally supported about a first pivot point and connected though an asymmetrical leverage connection to the first coil and the scan table. A second pivoting element is connected to the second coil and the scan table. The second pivoting element is pivotally supported about a second pivot point and connected through a symmetric leverage connection to the second coil and the scan table.

Abstract translation: 致动机构包括具有扫描台安装腔的扫描器芯片和可移动地定位在扫描台安装腔中的托架。 扫描台可移动地定位在支架中。 支架具有第一质量，扫描台具有第二质量。 第一线圈和框架共同限定第三质量，第二线圈和框架共同限定第四质量。 第一枢转元件连接到第一线圈和扫描台。 第一枢转元件围绕第一枢转点枢转地支撑并且通过不对称杠杆连接连接到第一线圈和扫描台。 第二枢转元件连接到第二线圈和扫描台。 第二枢转元件围绕第二枢转点枢转地支撑并且通过对称的杠杆连接连接到第二线圈和扫描台。

公开(公告)号：US20070137780A1

公开(公告)日：2007-06-21

申请号：US11595876

申请日：2006-11-13

Applicant: Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

Inventor： Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

IPC: B32B37/00

CPC classification number: H02K41/0354 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1436 ,  H02K2201/18

Abstract: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

Abstract translation: 提供了一种制造微型致动器的方法，包括：介质台，其具有介质装载表面和用于驱动介质载物台的线圈，其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽，在第二基板的第一表面上形成线圈，将第一基板的第一表面接合到第二基板的第一表面，并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

公开(公告)号：US07532376B1

公开(公告)日：2009-05-12

申请号：US12194259

申请日：2008-08-19

Applicant: Mark A. Lantz ,  Hugo E. Rothuizen

Inventor： Mark A. Lantz ,  Hugo E. Rothuizen

IPC: G02B26/08 ,  H02K5/00

CPC classification number: G02B26/101 ,  B81B3/0078 ,  B81B2201/11 ,  B81B2203/055 ,  B82Y10/00 ,  G11B9/1409 ,  H02K33/18 ,  H02K2201/18 ,  Y10S359/90

Abstract: Forming an actuating mechanism for a micro-scanning device includes forming a scanner chip having a scan table mounting cavity, first and second coil mounting cavities and first and second pivoting element mounting cavities, positioning a bracket in the scan table mounting cavity, and positioning a scan table in the bracket. A first frame is mounted in the first coil mounting cavity, and a second frame is mounted in the second coil mounting cavity. A first pivoting element is positioned in the first pivoting element mounting cavity. The first pivoting element includes an asymmetrical leverage connection to the first coil and the scan table. In addition, a second pivoting element is connected to the second coil and the scan table, and positioned in the second pivoting element mounting cavity. The second pivoting element includes a symmetric leverage connection or an asymmetric leverage connection to the second coil and the scan table.

Abstract translation: 形成用于微扫描装置的致动机构包括形成具有扫描台安装腔的扫描器芯片，第一和第二线圈安装腔以及第一和第二枢转元件安装空腔，将支架定位在扫描台安装腔中，并将 扫描表中的括号。 第一框架安装在第一线圈安装腔中，第二框架安装在第二线圈安装腔中。 第一枢转元件定位在第一枢转元件安装腔中。 第一枢转元件包括与第一线圈和扫描台不对称的杠杆连接。 此外，第二枢转元件连接到第二线圈和扫描台，并且定位在第二枢转元件安装腔中。 第二枢转元件包括对称杠杆连接或者与第二线圈和扫描台的不对称杠杆连接。

公开(公告)号：US20080309191A1

公开(公告)日：2008-12-18

申请号：US11818315

申请日：2007-06-14

Applicant: Tsung-Kuan Allen Chou ,  Oing Ma

Inventor： Tsung-Kuan Allen Chou ,  Oing Ma

IPC: H02N1/00 ,  B81B7/02

CPC classification number: B81B3/0051 ,  B81B2201/11 ,  B81B2203/056 ,  H02N1/008

Abstract: A MEMS platform with four actuators and four corresponding actuation electrodes. Movement of the platform in the x-y lateral plane is controlled by voltages applied to the four actuation electrodes. Other embodiments are described and claimed.

Abstract translation: 具有四个致动器和四个相应的致动电极的MEMS平台。 平台在x-y横向平面中的运动由施加到四个致动电极的电压控制。 描述和要求保护其他实施例。

公开(公告)号：US07215630B2

公开(公告)日：2007-05-08

申请号：US11114868

申请日：2005-04-26

Applicant: Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

Inventor： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

IPC: G11B7/135 ,  G02B7/182

CPC classification number: G11B7/08564 ,  B81B2201/042 ,  B81B2201/11 ,  B81B2203/0109 ,  B81C1/00595 ,  G02B7/1821 ,  G02B26/0841 ,  G11B7/08576 ,  Y10T428/24942

Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

Abstract translation: 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和反射镜主体（12）的反射镜基板材料由不同的材料（例如SiN x x）形成。

公开(公告)号：US5536988A

公开(公告)日：1996-07-16

申请号：US69725

申请日：1993-06-01

Applicant: Z. Lisa Zhang ,  Noel C. MacDonald

Inventor： Z. Lisa Zhang ,  Noel C. MacDonald

IPC: B81B1/00 ,  B81B3/00 ,  H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0062 ,  B81C1/0019 ,  B82Y15/00 ,  B81B2201/11 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2207/07

Abstract: A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.

Abstract translation: 由亚微米悬浮单晶硅光束制造能够沿x，y和z轴运动的微机电复合级微致动器组件，用于定位和扫描集成的机电传感器和致动器。 该微型致动器包括用于机械地支撑中央级并用于提供与微型致动器的部件的电连接以及由此承载的装置的互连系统。 使用改进的单晶反应蚀刻和金属化工艺制造微致动器，其包括利用设备的选定区域的热氧化的隔离工艺，以提供绝缘段，其限定从外部电路到致动器部件的导电路径以及限定门控的微电子器件 由致动器承载的场致发射体。

公开(公告)号：US20140049933A1

公开(公告)日：2014-02-20

申请号：US14000674

申请日：2012-02-24

Applicant: Hans-Heinrich Gatzen ,  Tim Griesbach

Inventor： Hans-Heinrich Gatzen ,  Tim Griesbach

IPC: H05K1/02 ,  H05K3/30

CPC classification number: H05K1/0271 ,  B81B3/0072 ,  B81B2201/11 ,  B81C2201/0167 ,  H05K3/303 ,  Y10T29/49133

Abstract: The invention relates to space-saving micro- and nano-components and to methods for producing same. The components are characterized in that they do not comprise a rigid substrate having a considerable thickness. The mechanical stresses, which result in deformations and/or warpage within a component, are compensated by means of a mechanically stress-compensated design and/or by means of active mechanical stress compensation by depositing suitable stress compensation layers such that there is no need for relatively thick substrates. Thus, the overall thickness of the components is decreased and the integration options thereof in technical systems are improved. In addition, the field of application of such components is expanded.

Abstract translation: 本发明涉及节省空间的微米和纳米组分及其制备方法。 这些部件的特征在于它们不包括具有相当厚度的刚性基板。 导致部件内的变形和/或翘曲的机械应力通过机械应力补偿设计和/或借助于通过沉积合适的应力补偿层的有源机械应力补偿来补偿，使得不需要 相对厚的基材。 因此，组件的总体厚度减小，并且其技术系统中的集成选项得到改善。 此外，这些组件的应用领域也得到了扩展。

公开(公告)号：US20100315938A1

公开(公告)日：2010-12-16

申请号：US12192006

申请日：2008-08-14

Applicant: Peter David Ascanio ,  Tom P. Frangesh

Inventor： Peter David Ascanio ,  Tom P. Frangesh

IPC: G11B9/00 ,  H01L23/48 ,  B23P17/04

CPC classification number: G11B9/1436 ,  B81B7/0051 ,  B81B2201/038 ,  B81B2201/07 ,  B81B2201/11 ,  H01L2924/0002 ,  H02K5/04 ,  H02K99/20 ,  Y10T29/49 ,  H01L2924/00

Abstract: A package to receive a memory device including an electromagnetic motor comprises a body having a top surface and a bottom surface. Conductive leads extend through the body so that the conductive leads are at least partially exposed within the package. A base is connectable with the bottom surface of the body, and a lid is connectable with the top surface of the body. The base and the lid have substantially matched thermal expansion characteristics and provide magnetic flux return paths for the electromagnetic motor.

Abstract translation: 用于接收包括电磁电动机的存储装置的包装件包括具有顶表面和底表面的主体。 导电引线延伸穿过主体，使得导电引线至少部分地暴露在封装内。 基座可与主体的底面连接，盖可与主体的上表面连接。 基座和盖具有基本上匹配的热膨胀特性，并为电磁马达提供磁通返回路径。