公开(公告)号：US08644125B2

公开(公告)日：2014-02-04

申请号：US12242843

申请日：2008-09-30

申请人： Tsung-Kuan Allen Chou ,  Nickolai Belov ,  John Heck

发明人： Tsung-Kuan Allen Chou ,  Nickolai Belov ,  John Heck

IPC分类号： H01L23/02 ,  H01L23/31 ,  H01L21/98

CPC分类号： G11B9/1454 ,  C25D5/022 ,  C25D5/505 ,  C25D17/001 ,  H01L2224/16145 ,  H01L2924/16235

摘要： A seek-scan probe (SSP) memory involves multiple-wafer bonding needing precision small gaps in between. Solder reflow bonding is typically used to join the wafers due to its reliability and ability to hermetically seal. However, solder reflow bonding may not provide a consistently controllable gap due to flowing solder during the bonding process. Thus, a bond stop technique and process is used to provide accurate cantilever to media gap control.

摘要翻译： 寻找扫描探针（SSP）存储器涉及多晶片接合，需要精密的小间隙。 由于其可靠性和气密密封能力，通常使用焊接回流焊接来连接晶片。 然而，焊料回流焊接可能不会由于在焊接过程中流动的焊料而提供始终如一的可控的间隙。 因此，使用粘结停止技术和工艺来为介质间隙控制提供准确的悬臂。

公开(公告)号：US08624616B2

公开(公告)日：2014-01-07

申请号：US12165656

申请日：2008-07-01

申请人： Tsung-Kuan Allen Chou ,  David Harrar, II

发明人： Tsung-Kuan Allen Chou ,  David Harrar, II

IPC分类号： G01R1/067 ,  G01R3/00

CPC分类号： G01R1/06738 ,  G01R3/00 ,  G11B9/1436

摘要： A suspended IO trace design for SSP cantilever Read/Write is described. Instead of having the whole I/O trace attached to surface of the cantilever, the cantilever is designed with fish-bone-like support and the I/O traces are anchored to cantilever structures 110 at some specific attachment locations with dielectric insulation in between. This design provides very compliant trace compared to cantilever's see-saw actuation around the torsional beam pivot and is also insensitive to residual stress variations from I/O trace in fabrication.

摘要翻译： 描述了一种用于SSP悬臂读/写的挂起IO跟踪设计。 代替将整个I / O迹线附着在悬臂的表面上，悬臂被设计成具有鱼骨状支撑件，并且I / O迹线在某些具体的附接位置锚定到悬臂结构110，其间具有介电绝缘。 与垂直于扭转梁枢轴的悬臂跷跷板驱动相比，该设计提供了非常符合标准的轨迹，并且对制造中I / O迹线的残余应力变化也不敏感。

公开(公告)号：US07750333B2

公开(公告)日：2010-07-06

申请号：US11477276

申请日：2006-06-28

申请人： Qing Ma ,  Valluri R. Rao ,  Tsung-Kuan Allen Chou

发明人： Qing Ma ,  Valluri R. Rao ,  Tsung-Kuan Allen Chou

IPC分类号： H01L21/00

CPC分类号： B82Y10/00 ,  G11B9/04 ,  G11B9/1436 ,  G11B9/1472

摘要： An apparatus comprising a substrate, a heater formed on the substrate, and a phase-change layer formed on the heater. The heater comprises a heater layer and first and second electrodes electrically coupled to the heater layer. A process comprising forming a heater on a substrate and forming a phase-change layer on the heater. The heater comprises a heater layer and first and second electrodes electrically coupled to the heater layer.

摘要翻译： 一种包括基板，形成在基板上的加热器和形成在加热器上的相变层的装置。 加热器包括加热器层和电耦合到加热器层的第一和第二电极。 一种方法，包括在基底上形成加热器并在加热器上形成相变层。 加热器包括加热器层和电耦合到加热器层的第一和第二电极。

公开(公告)号：US07705699B2

公开(公告)日：2010-04-27

申请号：US11819373

申请日：2007-06-27

申请人： Tsung-Kuan Allen Chou ,  Hanan Bar

发明人： Tsung-Kuan Allen Chou ,  Hanan Bar

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H1/18 ,  H01H2059/0018 ,  H01H2059/0072

摘要： Embodiments of the invention describe a contact switch, which may include a bottom electrode structure including a bottom actuation electrode and a top electrode structure including a top actuation electrode and one or more stoppers able to maintain a predetermined gap between the top electrode and the bottom electrode when the switch is in a collapsed state.

摘要翻译： 本发明的实施例描述了接触开关，其可以包括底部电极结构，其包括底部致动电极和顶部电极结构，顶部电极结构包括顶部致动电极和能够在顶部电极和底部电极之间保持预定间隙的一个或多个塞子 当开关处于折叠状态时。

公开(公告)号：US20090266688A1

公开(公告)日：2009-10-29

申请号：US12497889

申请日：2009-07-06

申请人： Tsung-Kuan Allen Chou ,  Hanan Bar

发明人： Tsung-Kuan Allen Chou ,  Hanan Bar

IPC分类号： H01H57/00

CPC分类号： H01H59/0009 ,  H01H1/18 ,  H01H2059/0018 ,  H01H2059/0072

摘要： Embodiments of the invention describe a contact switch, which may include a bottom electrode structure including a bottom actuation electrode and a top electrode structure including a top actuation electrode and one or more stoppers able to maintain a predetermined gap between the top electrode and the bottom electrode when the switch is in a collapsed state.

摘要翻译： 本发明的实施例描述了接触开关，其可以包括底部电极结构，其包括底部致动电极和顶部电极结构，顶部电极结构包括顶部致动电极和能够在顶部电极和底部电极之间保持预定间隙的一个或多个塞子 当开关处于折叠状态时。

公开(公告)号：US07602261B2

公开(公告)日：2009-10-13

申请号：US11317960

申请日：2005-12-22

申请人： Tsung-Kuan Allen Chou ,  Quan Tran

发明人： Tsung-Kuan Allen Chou ,  Quan Tran

IPC分类号： H01P1/10

CPC分类号： H01H59/0009 ,  B81B3/0013 ,  B81B2201/014 ,  H01H1/5822 ,  H01H2059/0063 ,  H01H2059/0072

摘要： An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the cantilever electrode is suspended proximate to the actuation electrode, and the contact is mounted to the cantilever electrode. The suspended conductor is coupled to the contact and straddles a portion of the cantilever electrode. The signal line is positioned to form a closed circuit with the contact and the suspended conductor when an actuation voltage is applied between the actuation electrode and the cantilever electrode.

摘要翻译： 机电开关包括致动电极，悬臂电极，触点，悬挂导体和信号线。 致动电极安装在基板上，悬臂电极悬挂在致动电极附近，接触件安装在悬臂电极上。 悬挂的导体耦合到接触件并跨越悬臂电极的一部分。 当在致动电极和悬臂电极之间施加致动电压时，信号线被定位成与触点和悬挂导体形成闭合电路。

公开(公告)号：US20090168636A1

公开(公告)日：2009-07-02

申请号：US11967721

申请日：2007-12-31

申请人： TSUNG-KUAN ALLEN CHOU

发明人： TSUNG-KUAN ALLEN CHOU

IPC分类号： G11B9/00

CPC分类号： G11B9/02

摘要： In one embodiment, the present invention includes an apparatus having a cantilever structure to move in a vertical direction, including a grounded cantilever body and a conductive tip, a vertical actuation electrode to actuate the cantilever to cause the conductive tip to contact a ferroelectric media surface, an AC electrostatic drive electrode to produce electrostatic forces to cause the cantilever structure to vibrate, and a sensing trace coupled with the conductive tip to sense charge generated by the ferroelectric media surface in response to a force applied by the conductive tip. Other embodiments are described and claimed.

摘要翻译： 在一个实施例中，本发明包括具有垂直方向移动的悬臂结构的装置，包括接地悬臂体和导电尖端;垂直致动电极，用于致动悬臂以使导电尖端接触铁电介质表面 ，AC静电驱动电极，用于产生静电力以引起悬臂结构振动;以及感测迹线，与传导尖端耦合以响应于由导电尖端施加的力而感测由铁电介质表面产生的电荷。 描述和要求保护其他实施例。

公开(公告)号：US20090001486A1

公开(公告)日：2009-01-01

申请号：US11824465

申请日：2007-06-29

申请人： John Heck ,  Tsung-Kuan Allen Chou

发明人： John Heck ,  Tsung-Kuan Allen Chou

IPC分类号： H01L29/84 ,  H01L21/00

CPC分类号： B81C1/00246 ,  B81B2201/07 ,  B81B2201/11 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C2203/0735 ,  B82Y10/00 ,  G11B9/1436

摘要： In one embodiment, the present invention includes a method for forming a sacrificial oxide layer on a base layer of a microelectromechanical systems (MEMS) probe, patterning the sacrificial oxide layer to provide a first trench pattern having a substantially rectangular form and a second trench pattern having a substantially rectangular portion and a lateral portion extending from the substantially rectangular portion, and depositing a conductive layer on the patterned sacrificial oxide layer to fill the first and second trench patterns to form a support structure for the MEMS probe and a cantilever portion of the MEMS probe. Other embodiments are described and claimed.

摘要翻译： 在一个实施例中，本发明包括在微机电系统（MEMS）探针的基底层上形成牺牲氧化物层的方法，图案化牺牲氧化物层以提供具有基本矩形形状的第一沟槽图案和第二沟槽图案 具有基本上矩形的部分和从所述大致矩形部分延伸的横向部分，以及在所述图案化的牺牲氧化物层上沉积导电层以填充所述第一和第二沟槽图案以形成用于所述MEMS探针的支撑结构， MEMS探针。 描述和要求保护其他实施例。

公开(公告)号：US07321275B2

公开(公告)日：2008-01-22

申请号：US11165795

申请日：2005-06-23

申请人： Tsung-Kuan Allen Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

发明人： Tsung-Kuan Allen Chou ,  Hanan Bar ,  Quan Tran ,  Joseph Melki ,  John Heck ,  Qing Ma

IPC分类号： H01P1/10

CPC分类号： H01H59/0009 ,  B81B3/0013 ,  B81B2201/014 ,  H01H2059/0063 ,  H01H2059/0072

摘要： An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode.

摘要翻译： 机电开关包括致动电极，锚，悬臂电极，触点和信号线。 致动电极和锚固件安装到基板上。 悬臂电极由致动电极上方的锚固件支撑。 触点安装到悬臂电极。 当在致动电极和悬臂电极之间施加致动电压时，信号线被定位成与触点形成闭合电路，导致悬臂电极以拉链的方式朝着致动电极弯曲，从悬臂的远端开始 电极。

公开(公告)号：US07319580B2

公开(公告)日：2008-01-15

申请号：US11092022

申请日：2005-03-29

申请人： Tsung-Kuan Allen Chou

发明人： Tsung-Kuan Allen Chou

IPC分类号： H01G7/00

CPC分类号： H01H59/0009 ,  H01G5/16 ,  H01G5/18 ,  H01H2059/0063

摘要： According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomponents mounted on the two or more bottom electrodes and a top bendable electrode mounted on the substrate. The top electrode collapses a first magnitude towards the actuation electrodes whenever a first voltage is applied to one or more of the actuation electrodes and collapses a second magnitude towards the actuation electrodes whenever a second voltage is applied to the actuation electrodes.

摘要翻译： 根据一个实施例，公开了一种微机电（MEMS）开关。 MEMS开关包括基板，安装在基板上的多个致动电极，安装在基板上的多个底部电极，具有安装在两个或多个底部电极上的子部件的电容器和安装在基板上的顶部可弯曲电极。 每当施加第一电压施加到一个或多个致动电极时，顶电极朝向致动电极塌缩第一大小，并且每当向致动电极施加第二电压时，向起动电极塌缩第二大小。