CONFOCAL SURFACE TOPOGRAPHY MEASUREMENT WITH FIXED FOCAL POSITIONS
    25.
    发明申请
    CONFOCAL SURFACE TOPOGRAPHY MEASUREMENT WITH FIXED FOCAL POSITIONS 审中-公开
    具有固定焦点位置的共焦表面测量

    公开(公告)号:US20160113742A1

    公开(公告)日:2016-04-28

    申请号:US14980580

    申请日:2015-12-28

    Abstract: An apparatus is described for measuring surface topography of a three-dimensional structure. In many embodiments, the apparatus is configured to focus each of a plurality of light beams to a respective fixed focal position relative to the apparatus. The apparatus measures a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the light beams. The characteristic is measured for a plurality of different positions and/or orientations between the apparatus and the three-dimensional structure. Surface topography of the three-dimensional structure is determined based at least in part on the measured characteristic of the returned light beams for the plurality of different positions and/or orientations between the apparatus and the three-dimensional structure.

    Abstract translation: 描述了一种用于测量三维结构的表面形貌的装置。 在许多实施例中,该装置被配置成将多个光束中的每一个聚焦到相对于该装置的相应的固定焦点位置。 该装置测量通过用光束照射三维结构而产生的多个返回光束中的每一个的特性。 测量该装置和三维结构之间的多个不同位置和/或取向的特性。 至少部分地基于对于设备和三维结构之间的多个不同位置和/或取向的返回光束的测量特性来确定三维结构的表面形貌。

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