公开(公告)号：US20110215680A1

公开(公告)日：2011-09-08

申请号：US13037412

申请日：2011-03-01

申请人： Akinori YAMADA ,  Makoto FURUHATA

发明人： Akinori YAMADA ,  Makoto FURUHATA

IPC分类号： H01L41/04

CPC分类号： H01L41/04

摘要： A resonator element includes: a base section; and at least one resonating arm formed so as to extend from the base section, and having a flexural vibrating section, wherein the flexural vibrating section includes a pair of principal surfaces formed along a direction in which the resonating arm performs a flexural vibration, and outer side surfaces intersecting with the principal surfaces of the resonating arm, the flexural vibrating section is provided with at least three groove sections, the groove sections are formed on both or either one of the principal surfaces in a direction intersecting with the principal surfaces, and at least a part or the whole of an outer wall formed of the outer side surface and the groove section and at least a part or the whole of an inner wall formed of the groove sections adjacent to each other are electrically vibrated in a flexural manner.

摘要翻译： 谐振器元件包括：基部; 以及形成为从所述基部延伸的至少一个谐振臂，并具有弯曲振动部，所述弯曲振动部包括沿着所述共鸣臂进行弯曲振动的方向形成的一对主面，以及外部 与谐振臂的主表面相交的侧面，弯曲振动部设置有至少三个槽部，槽部形成在与主面交叉的方向的两个或两个主面上，并且在 由外侧表面和槽部形成的外壁的至少一部分或全部以及彼此相邻的槽部形成的内壁的至少一部分或全部以弯曲的方式电动振动。

公开(公告)号：US20110109205A1

公开(公告)日：2011-05-12

申请号：US12917855

申请日：2010-11-02

申请人： Akinori YAMADA

发明人： Akinori YAMADA

IPC分类号： H01L41/04

CPC分类号： H03H9/21 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H03B5/32 ,  H03H9/02 ,  H03H9/19 ,  H03H9/215

摘要： A vibration device includes: a vibrating reed including a base having a notch, a plurality of vibrating arms extending from the base, and each including an arm section, a weight section, and a groove section, and a support section, wherein a mechanical resonant frequency f of the vibrating reed is higher than a thermal relaxation frequency f0 of the vibrating reed, and assuming that a closest approach distance between the notch and a crotch section formed between the vibrating arms is a base flexion width Wb, and an arm width of the vibrating arm in a case of replacing a cross-sectional shape of the vibrating arm having a thermoelastic loss equivalent to a thermoelastic loss of the cross-sectional shape and a thickness equal to a thickness of the cross-sectional shape is an effective arm width We, a relationship of Wb>We is satisfied.

摘要翻译： 振动装置包括：振动片，其包括具有凹口的基部，从所述基部延伸的多个振动臂，并且每个振动臂包括臂部，配重部和槽部，以及支撑部，其中，机械共振 振动片的频率f高于振动片的热弛豫频率f0，并且假设凹口与形成在振动臂之间的裆部之间的最接近的距离是基部屈曲宽度Wb，并且臂宽度 在更换具有相当于横截面形状的热弹性损失的热弹性损耗和等于截面形状的厚度的厚度的振动臂的横截面形状的情况下的振动臂是有效的臂宽度 我们，Wb的关系>我们很满意。

公开(公告)号：US20110084776A1

公开(公告)日：2011-04-14

申请号：US12896482

申请日：2010-10-01

申请人： Akinori YAMADA

发明人： Akinori YAMADA

IPC分类号： H03B5/32 ,  H01L41/04

CPC分类号： H03H9/0547 ,  H03H9/1021 ,  H03H9/21

摘要： A vibrating reed includes: a base; and a vibrating arm which is extended from one end portion of the base, the vibrating arm having an arm portion which is disposed on the base side, a weight portion which is disposed on a tip side of the arm portion and has a larger width than the arm portion, main surfaces which are respectively disposed on front and back sides of the vibrating arm, side surfaces each of which extends in a longitudinal direction of the vibrating arm to connect the main surfaces on the front and back sides and which are formed so as to face each other, a first groove portion which is a bottomed groove formed at least one of the main surfaces along the longitudinal direction of the vibrating arm, a first excitation electrode which is formed on groove side surfaces each connecting a bottom of the first groove portion with the one main surface, a second excitation electrode which is formed on the both side surfaces, and a projection-in-groove which is disposed on the tip side of a bisector bisecting the vibrating arm in the longitudinal direction and is formed so as to be along the groove side surface with a part of the first groove portion interposed between the projection-in-groove and the groove side surface.

摘要翻译： 振动片包括：基座; 以及振动臂，其从所述基座的一个端部延伸，所述振动臂具有设置在所述基部侧的臂部，配重部，其配置在所述臂部的前端侧，并且具有比 所述臂部分分别设置在所述振动臂的前后侧的主表面，所述主表面在所述振动臂的纵向方向上延伸，以连接所述正面和背面上的主表面，并且形成为 为了面对彼此，形成有沿着振动臂的长度方向形成有至少一个主面的有底槽的第一槽部，形成在槽侧表面上的第一激励电极，每个连接第一 具有一个主表面的凹槽部分，形成在两个侧表面上的第二激励电极和设置在二等分线的平分线v的顶侧上的突起槽 并且沿纵向方向形成为沿着槽侧表面，并且第一槽部分的一部分介于凹槽和槽侧表面之间。

公开(公告)号：US20110063041A1

公开(公告)日：2011-03-17

申请号：US12878629

申请日：2010-09-09

申请人： Akinori YAMADA ,  Makoto FURUHATA

发明人： Akinori YAMADA ,  Makoto FURUHATA

IPC分类号： H03B5/32 ,  H01L41/04

CPC分类号： H03H9/21 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator element includes: a base portion; and a resonating arm extending in a first direction from the base portion, wherein the resonating arm includes a first surface, a second surface facing the first surface, a first side surface extending in the first direction so as to connect the first and second surfaces, and a second side surface facing the first side surface, wherein the resonating arm includes a first width portion having a first width and a second width portion provided at a root of the resonating arm so as to have a second width larger than the first width, wherein the resonating arm includes a groove portion provided on at least one of the first and second surfaces so as to extend in the first direction, the groove portion in the second width portion having a width larger than a width of the groove portion in the first width portion, and wherein a sum of the width between the groove portion in the second width portion and the first side surface and the width between the groove portion in the second width portion and the second side surface is smaller than a sum of the width between the groove portion in the first width portion and the first side surface and the width between the groove portion in the first width portion and the second side surface.

摘要翻译： 谐振器元件包括：基部; 以及从所述基部沿第一方向延伸的谐振臂，其中所述谐振臂包括第一表面，面向所述第一表面的第二表面，沿所述第一方向延伸以便连接所述第一表面和所述第二表面的第一侧表面， 以及面对所述第一侧面的第二侧面，其中所述谐振臂包括具有第一宽度的第一宽度部分和设置在所述谐振臂的根部处的第二宽度部分，以具有大于所述第一宽度的第二宽度， 其中所述谐振臂包括设置在所述第一和第二表面中的至少一个上以沿所述第一方向延伸的凹槽部分，所述第二宽度部分中的所述凹槽部分的宽度大于所述第一和第二表面中的所述凹槽部分的宽度 宽度部分，并且其中第二宽度部分中的槽部分和第一侧表面之间的宽度与第二宽度部分中的槽部分之间的宽度之和 所述第二侧面小于所述第一宽度部的槽部与所述第一侧面之间的宽度与所述第一宽度部的槽部与所述第二侧面的宽度的和。

公开(公告)号：US20110057549A1

公开(公告)日：2011-03-10

申请号：US12748714

申请日：2010-03-29

申请人： Hiroki KAWAI ,  Makoto FURUHATA ,  Akinori YAMADA ,  Yuji HAMAYAMA

发明人： Hiroki KAWAI ,  Makoto FURUHATA ,  Akinori YAMADA ,  Yuji HAMAYAMA

IPC分类号： H01L41/053 ,  H01L41/04

CPC分类号： H01L41/1132 ,  G01C19/5607 ,  H03H9/0547 ,  H03H9/1021 ,  H03H9/21

摘要： A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.

摘要翻译： 弯曲振动片包括基座和从其延伸的振动臂，每对振动臂具有沿着所述一对振动臂对准的方向的一个主表面沿所述振动臂的延伸方向形成的第一凹槽， 和在另一个主表面上与第一槽并排形成的第二槽，第一和第二槽部的深度之和大于一个主表面与另一个主表面之间的间隔，质量部分为 设置在所述一对振动臂中的每一个上，在作为所述第一凹槽的开口侧的一个主表面上，所述第一凹槽朝向与所述振动臂彼此面对的内侧相反的外侧形成。

公开(公告)号：US20100219898A1

公开(公告)日：2010-09-02

申请号：US12713922

申请日：2010-02-26

申请人： Akinori YAMADA

发明人： Akinori YAMADA

IPC分类号： H03B5/30

CPC分类号： H03H9/215 ,  H03H9/0547 ,  H03H9/1021

摘要： A resonator element includes: a resonating body having a first region and a second region, the first region receiving a compression stress or an extension stress by a vibration, the second region receiving an extension stress responding to the compression stress in the first region, or a compression stress responding to the extension stress of the first region; and at least one film layer, on a surface of the resonating body between the first and the second regions, having thermal conductivity higher than thermal conductivity of the resonating body. In the element, the film layer includes a recessed section in which at least one film layer is removed between the first and the second regions.

摘要翻译： 谐振元件包括：具有第一区域和第二区域的谐振体，所述第一区域通过振动接收压缩应力或延伸应力，所述第二区域接收响应于所述第一区域中的压缩应力的延伸应力，或 响应于第一区域的延伸应力的压缩应力; 以及在第一和第二区域之间的谐振体的表面上的导热率高于共振体的导热率的至少一个膜层。 在元件中，膜层包括其中在第一和第二区域之间去除至少一个膜层的凹陷部分。