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公开(公告)号：US20120164564A1
公开(公告)日：2012-06-28
申请号：US13381590
申请日：2010-06-29
CPC分类号： G03F1/72 , B82Y10/00 , B82Y40/00 , C23C18/06 , C23C18/1204 , C23C18/1254 , C23C18/14 , G03F7/0002
摘要： Additive repair of advanced photomasks with low temperature or optical curing via direct write lithographic printing with sharp tips and cantilevers. The optical properties of the materials formed from the ink can be tuned (e.g., n and k values). Sol gel inks, including silsesquioxane inks, can be used to form MoSi compositions. The repaired photomasks are resistant to washing under normal photomask washing conditions. AFM instrumentation can be used to perform the additive repair to provide the high resolution and registration.
摘要翻译： 通过直接写入平版印刷与尖锐的尖端和悬臂，对低温或光学固化的先进光掩模进行添加修复。 可以调整由墨形成的材料的光学性质（例如n和k值）。 溶胶凝胶油墨，包括倍半硅氧烷油墨，可用于形成MoSi组合物。 修复的光掩模在正常的光掩模洗涤条件下耐洗涤。 AFM仪器可用于执行添加剂修复以提供高分辨率和注册。
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22.发明授权公开(公告)号：US07034854B2
公开(公告)日：2006-04-25
申请号：US10705776
申请日：2003-11-12
申请人： Sylvain Cruchon-Dupeyrat , Michael Nelson , Robert Elghanian , Joseph S. Fragala , Igor Touzov , Debjyoti Banerjee
发明人： Sylvain Cruchon-Dupeyrat , Michael Nelson , Robert Elghanian , Joseph S. Fragala , Igor Touzov , Debjyoti Banerjee
IPC分类号： B41J2/005
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y30/00 , B82Y40/00
摘要： Inkwells adapted for use in direct-write nanolithography and other applications including use of wells, channels, and posts. The wells can possess a geometry which matches the geometry of tips which are dipped into the inkwells. The channels can be open or closed. Hydrophilicity and hydrophobicity can be used to control ink flow. SEM can be used to characterize the inkwells. Ink flow can be monitored with video. Hydrophobic material layers can be used to prevent cross contamination. Microsyringes can be used to fill reservoirs. Satellite reservoirs can be used to prevent bubble formation.
摘要翻译： Inkwells适用于直写纳米光刻技术和其他应用，包括使用井，通道和柱。 孔可以具有与浸入墨水孔中的尖端的几何形状相匹配的几何形状。 通道可以打开或关闭。 亲水性和疏水性可用于控制油墨流动。 SEM可用于表征墨水。 墨水流量可以用视频监控。 疏水材料层可用于防止交叉污染。 微量注射器可用于填充储存器。 可以使用卫星储层来防止气泡形成。
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公开(公告)号：US20120297509A1
公开(公告)日：2012-11-22
申请号：US13530006
申请日：2012-06-21
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译： 以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。 该阵列设计为只有尖端触摸表面。 这可以通过长尖端和弯曲的悬臂和对准来实现。 一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端， 其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。 可以制备组合阵列和生物阵列。 阵列可以通过微加工方法制造。
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公开(公告)号：US08220317B2
公开(公告)日：2012-07-17
申请号：US11690738
申请日：2007-03-23
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译： 以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。 该阵列设计为只有尖端触摸表面。 这可以通过长尖端和弯曲的悬臂和对准来实现。 一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端， 其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。 可以制备组合阵列和生物阵列。 阵列可以通过微加工方法制造。
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公开(公告)号：US20110274839A1
公开(公告)日：2011-11-10
申请号：US13064766
申请日：2011-04-13
CPC分类号： G03F7/0002 , B81B2203/0118 , B81C1/00031 , B81C99/0025 , B82B3/00 , B82Y10/00 , B82Y40/00 , G03F7/2049
摘要： Cantilever design for patterning from a cantilever tip can be improved with, for example, a recessed area surrounding the cantilever tip. A device for printing nanoscopic and microscopic patterns includes at least one cantilever having a front surface, a first side edge, a second side edge, and a first end which is a free end and a second end which is a non-free end. The front surface includes at least one first sidewall disposed at the first cantilever side edge and at least one second sidewall disposed at the second cantilever side edge opposing the first cantilever side edge, at least one channel, adapted to hold a fluid, disposed between the first and second sidewalls, wherein the channel, the first sidewall, and the second sidewall extend toward the cantilever free end but do not reach the free end, and a base region having a boundary defined by the first edge, the second edge, and the cantilever free end and also the first sidewall, second sidewall, and the channel, wherein the base region comprises a tip extending away from the cantilever front surface. Improved deposition can result. Fluidic inks comprising biomolecules can be patterned successfully.
摘要翻译： 例如可以通过围绕悬臂尖端的凹陷区域来改善从悬臂尖端进行图案化的悬臂设计。 用于印刷纳米尺度和微观图案的装置包括至少一个具有前表面，第一侧边缘，第二侧边缘以及作为自由端的第一端和作为非自由端的第二端的悬臂。 前表面包括设置在第一悬臂侧边缘处的至少一个第一侧壁和设置在与第一悬臂侧边缘相对的第二悬臂侧边缘处的至少一个第二侧壁，至少一个适于保持流体的通道， 第一和第二侧壁，其中，所述通道，所述第一侧壁和所述第二侧壁朝向所述悬臂自由端延伸，但是不到达所述自由端，并且具有由所述第一边缘，所述第二边缘和所述第二边缘限定的边界的基底区域 悬臂自由端以及第一侧壁，第二侧壁和通道，其中基部区域包括远离悬臂前表面延伸的尖端。 可以改善沉积。 可以成功地构图包含生物分子的流体油墨。
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26.发明申请METHODS AND APPARATUS FOR INK DELIVERY TO NANOLITHOGRAPHIC PROBE SYSTEMS 审中-公开用于墨水输送到纳米扫描探针系统的方法和装置公开(公告)号：US20100242765A1
公开(公告)日：2010-09-30
申请号：US12732570
申请日：2010-03-26
申请人： Sylvain Cruchon-Dupeyrat , Michael Nelson , Robert Elghanian , Joseph S. Fragala , Igor Touzov , Debjyoti Banerjee
发明人： Sylvain Cruchon-Dupeyrat , Michael Nelson , Robert Elghanian , Joseph S. Fragala , Igor Touzov , Debjyoti Banerjee
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y30/00 , B82Y40/00
摘要： Inkwells adapted for use in direct-write nanolithography and other applications including use of wells, channels, and posts. The wells can possess a geometry which matches the geometry of tips which are dipped into the inkwells. The channels can be open or closed. Hydrophilicity and hydrophobicity can be used to control ink flow. SEM can be used to characterize the inkwells. Ink flow can be monitored with video. Hydrophobic material layers can be used to prevent cross contamination. Microsyringes can be used to fill reservoirs. Satellite reservoirs can be used to prevent bubble formation.
摘要翻译： Inkwells适用于直写纳米光刻技术和其他应用，包括使用井，通道和柱。 孔可以具有与浸入墨水孔中的尖端的几何形状相匹配的几何形状。 通道可以打开或关闭。 亲水性和疏水性可用于控制油墨流动。 SEM可用于表征墨水。 墨水流量可以用视频监控。 疏水材料层可用于防止交叉污染。 微量注射器可用于填充储存器。 可以使用卫星储层来防止气泡形成。
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公开(公告)号：US20080105042A1
公开(公告)日：2008-05-08
申请号：US11690738
申请日：2007-03-23
IPC分类号： G01B5/28
CPC分类号： G03F7/0002
摘要： Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
摘要翻译： 以高分辨率和高质量高结构和纳米结构的大规模平行印刷，使用二维阵列，其包括悬臂和基于尖端的材料转移到表面。 该阵列设计为只有尖端触摸表面。 这可以通过长尖端和弯曲的悬臂和对准来实现。 一种制品，包括：多个悬臂的二维阵列，其中所述阵列包括多个基列，每个基列包括多个悬臂，其中每个所述悬臂包括远离所述基座的所述悬臂端处的尖端， 其中所述悬臂的数量大于250，并且其中所述尖端具有相对于至少四微米的所述悬臂的顶点高度，以及所述阵列的支撑。 可以制备组合阵列和生物阵列。 阵列可以通过微加工方法制造。
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