公开(公告)号：US09470709B2

公开(公告)日：2016-10-18

申请号：US13751387

申请日：2013-01-28

Applicant: Analog Devices, Inc.

Inventor： Jianglong Zhang

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/0834

Abstract: A balanced teeter-totter accelerometer has a mass suspended above a substrate, the mass having an axis of rotation that is parallel to the substrate and substantially geometrically centered with respect to the shape of the mass. A physical acceleration in a direction perpendicular to the substrate causes the mass to rotate about the axis of rotation. The rotation is sensed by measuring a change in capacitance of electrodes on the substrate. The accelerometer may be calibrated using the same sensing electrodes.

Abstract translation: 平衡的跷跷板加速度计具有悬浮在基板上方的质量，该质量具有平行于基底的旋转轴线，并且相对于质量块的形状基本上几何地居中。 在垂直于衬底的方向上的物理加速使质量围绕旋转轴线旋转。 通过测量基板上的电极的电容变化来感测旋转。 可以使用相同的感测电极校准加速度计。

公开(公告)号：US20130263663A1

公开(公告)日：2013-10-10

申请号：US13856082

申请日：2013-04-03

Applicant: ANALOG DEVICES, INC.

Inventor： Jianglong Zhang

IPC: B81B7/02

CPC classification number: B81B7/02 ,  G01P15/00 ,  G01P15/125

Abstract: A MEMS device includes a substrate, a mass having a first and second set of elongated mass fingers extending from the mass, and a support structure supporting the mass on the substrate. The support structure may include at least one anchor and a plurality of springs that allow movement of the mass relative to the substrate. The MEMS device may also include a first set of sensing fingers for sensing movement of the first set of mass fingers relative to the first set of sensing fingers, and a second set of sensing figures for sensing movement of the second set of mass fingers relative to the second set of sensing fingers. The first and second sets of sensing fingers may have different size finger gaps between the sensing fingers and the respective mass fingers.

Abstract translation: MEMS器件包括衬底，具有从质量块延伸的第一和第二组细长质量指状物的质量块，以及支撑在衬底上的质量块的支撑结构。 支撑结构可以包括允许质量块相对于衬底移动的至少一个锚和多个弹簧。 MEMS装置还可以包括用于感测第一组质量指状物相对于第一组感测手指的运动的第一组感测手指，以及用于感测第二组质量指的运动相对于第一组感测手指的第二组感测图 第二组感测手指。 第一组和第二组感测指可以在感测指和相应的质量指之间具有不同大小的手指间隙。