摘要:
In an embodiment, an aging analysis tool may be configured to identify transistors that are expected to experience aging effects according to worst case stress vectors and/or designer identified worst case conditions. The aging analysis tool may modify a representation of the circuit (e.g. a netlist), replacing the identified transistors with aged transistors (e.g. by modifying parameters of the transistors in the netlist). The aging analysis tool may process the modified netlist over a range of conditions at which the circuit is expected to operate, to ensure that the design meets specifications after aging. The process may be repeated until the aged design meets specifications (with circuit modifications made by the designer to improve the design).
摘要:
A software tool and method for analyzing the reliability or failure rate of an integrated circuit (IC) are disclosed. The IC may include a plurality of circuit designs, and the software tool and method may aid a designer of the IC in determining a reliability rating of the IC based on reliability ratings of transistors or other circuit devices used in the circuit designs. In particular, the IC may include one or more circuit designs that have multiple instances within the IC (i.e., the same circuit design is instantiated multiple times), and the software tool and method may take into account the multiple instances when determining the reliability rating of the IC.
摘要:
A process whereby elimination of metal extrusion through the via-barrier layer into the base of etched via holes is accomplished by controlling the process temperature of the via-barrier deposition to less than 400° C., and preferably to about 380° C. By eliminating the cause of metal extrusions, i.e., excessive thermally induced stresses on the metal confined biaxially by the dielectric via walls, the resulting defect-free vias are independent of the barrier thickness. The method is applicable to different metal stacks, and in turn, yield and reliability of the device is significantly enhanced.