公开(公告)号：US20210062324A1

公开(公告)日：2021-03-04

申请号：US16995662

申请日：2020-08-17

Applicant: Applied Materials, Inc.

Inventor： David Masayuki ISHIKAWA ,  Jonathan FRANKEL ,  Joseph YUDOVSKY ,  David Alexander BRITZ

IPC: C23C14/30 ,  C23C14/54 ,  C23C14/52 ,  H01J37/305

Abstract: Embodiments described herein provide apparatus, software applications, and methods of a coating process, such as an Electron Beam Physical Vapor Deposition (EBPVD) of thermal barrier coatings (TBCs) on objects. The objects may include aerospace components, e.g., turbine vanes and blades, fabricated from nickel and cobalt-based super alloys. The apparatus, software applications, and methods described herein provide at least one of the ability to detect an endpoint of the coating process, i.e., determine when a thickness of a coating satisfies a target value, and the ability for closed-loop control of process parameters.

公开(公告)号：US20200064121A1

公开(公告)日：2020-02-27

申请号：US16268446

申请日：2019-02-05

Applicant: Applied Materials, Inc.

Inventor： Kamala Chakravarthy RAGHAVAN ,  David Alexander BRITZ

IPC: G01B11/06 ,  G01B11/25 ,  G06K7/14

Abstract: Embodiments described herein relate to a non-destructive measurement device measurement device and a non-destructive measurement method for determining coating thickness of a three-dimensional (3D) object. In one embodiment, at least one first 3D image of an uncoated surface of the object and at least one second 3D image of a coated surface of the object are collected and analyzed to the determine the coating thickness of the object.

公开(公告)号：US20190284694A1

公开(公告)日：2019-09-19

申请号：US16356700

申请日：2019-03-18

Applicant: Applied Materials, Inc.

Inventor： Thomas KNISLEY ,  Mark SALY ,  David Alexander BRITZ ,  David THOMPSON

IPC: C23C16/455 ,  C23C16/34 ,  C23C16/40

Abstract: Embodiments of the present disclosure generally relate to protective coatings on an aerospace component and methods for depositing the protective coatings. In one or more embodiments, a method for depositing a protective coating on an aerospace component includes sequentially exposing the aerospace component to a chromium precursor and a reactant to form a chromium-containing layer on a surface the aerospace component by an atomic layer deposition process. The chromium-containing layer contains metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.