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公开(公告)号：US5579792A
公开(公告)日：1996-12-03
申请号：US599007
申请日：1996-02-09
CPC分类号： H01L21/67057 , E04B2001/8419 , Y10S134/902
摘要： Apparatus and method for cleaning/etching the surface of an article with sonic energy in the megahertz range which employ an anti-reflection mechanism within a recirculation tank. A tank having at least one side wall and a bottom structure holds a cleaning/etching liquid and a megasonic transducer is associated with the tank for projecting megasonic energy into the liquid. The anti-reflection mechanism is disposed within the tank in close association with the at least one sidewall or bottom structure of the tank to thereby minimize reflection of megasonic energy from the associated surface. Preferably, the megasonic transducer is associated with a first tank sidewall which opposes a second tank sidewall, and the anti-reflection mechanism is disposed adjacent the second tank sidewall. By way of example, the anti-reflection mechanism can comprise a stream of gas bubbles, a plurality of anechoic structures, or a combination of both gas bubbles and anechoic structures.
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公开(公告)号：US5533540A
公开(公告)日：1996-07-09
申请号：US370714
申请日：1995-01-10
CPC分类号： H01L21/67057 , E04B2001/8419 , Y10S134/902
摘要： Apparatus and method for cleaning/etching the surface of an article with sonic energy in the megahertz range which employ an anti-reflection mechanism within a recirculation tank. A tank having at least one side wall and a bottom structure holds a cleaning/etching liquid and a megasonic transducer is associated with the tank for projecting megasonic energy into the liquid. The anti-reflection mechanism is disposed within the tank in close association with the at least one sidewall or bottom structure of the tank to thereby minimize reflection of megasonic energy from the associated surface. Preferably, the megasonic transducer is associated with a first tank sidewall which opposes a second tank sidewall, and the anti-reflection mechanism is disposed adjacent the second tank sidewall. By way of example, the anti-reflection mechanism can comprise a stream of gas bubbles, a plurality of anechoic structures, or a combination of both gas bubbles and anechoic structures.
摘要翻译： 用于在兆赫兹范围内用声能量清洁/蚀刻物品的表面的装置和方法，其在循环罐内采用防反射机构。 具有至少一个侧壁和底部结构的罐保持清洁/蚀刻液体，并且兆声波换能器与用于将兆声波能量投射到液体中的罐相关联。 防反射机构设置在罐内与罐的至少一个侧壁或底部结构紧密相关联，从而最小化来自相关联表面的兆声波能量的反射。 优选地，兆声波换能器与第二坦克侧壁相对，第一坦克侧壁与第二坦克侧壁相对，并且防反射机构邻近第二坦克侧壁设置。 作为示例，防反射机构可以包括气泡流，多个消声结构或两个气泡和消声结构的组合。
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公开(公告)号：US5441797A
公开(公告)日：1995-08-15
申请号：US315801
申请日：1994-09-30
IPC分类号： C08G73/10 , C08K5/3437 , C08L77/00 , C08L79/08 , G03F7/09 , G03F7/11 , H01L21/027 , B32B9/00
CPC分类号： G03F7/091 , Y10S428/901 , Y10S430/11 , Y10T428/24917 , Y10T428/31692 , Y10T428/31721
摘要： A process is disclosed for making circuit elements by photolithography comprising depositing an antireflective polyimide or polyimide precursor layer on a substrate and heating the substrate at 200.degree. C. to 500.degree. C. to provide a functional integrated circuit element that includes an antireflective polyimide layer. The antireflective polyimide layer contains a sufficient concentration of at least one chromophore to give rise to an absorbance sufficient to attenuate actinic radiation at 405 or 436 nm. Preferred chromophores include those arising from perylenes, naphthalenes and anthraquinones. The chromophore may reside in a dye which is a component of the polyimide coating mixture or it may reside in a residue which is incorporated into the polyimide itself.
摘要翻译： 公开了一种用于通过光刻制造电路元件的方法，包括在衬底上沉积抗反射聚酰亚胺或聚酰亚胺前体层并在200℃至500℃下加热衬底以提供包括抗反射聚酰亚胺层的功能集成电路元件。 抗反射聚酰亚胺层含有足够浓度的至少一种发色团，以产生足够的吸光度，以减弱405或436nm处的光化辐射。 优选的发色团包括由苝，萘和蒽醌衍生的那些。 发色团可以存在于作为聚酰亚胺涂料混合物的组分的染料中，或者可以存在于聚酰亚胺本身中的残余物中。
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公开(公告)号：US5263824A
公开(公告)日：1993-11-23
申请号：US973173
申请日：1992-11-09
摘要： A safety shutdown system for a vehicle containing a hazardous fluid material such as gasoline, liquid propane gas (LPG) or anhydrous ammonia (NH.sub.3) permits turn-off of the vehicle's engine and closure of the vehicle's storage tank valves by the vehicle's operator remotely located from the vehicle. The system includes a hand-held controller including a receiver and transmitter as well as a receiver/transmitter combination located in the vehicle's cab. The transmitter in the cab is coupled to a vehicle-mounted flow meter for providing an RF signal to the remote receiver for display on the hand-held controller of the amount of material discharged from the vehicle's tank. The cab-mounted receiver is responsive to an operator-initiated shutdown signal emitted by the remote controller and is coupled to a pulling solenoid which is, in turn, coupled to the storage tank valves via a cable for closing the valves and stopping the flow of hazardous material when the controller is actuated. Receipt of a shutdown signal by the vehicle-mounted receiver also results in immediate turn-off of the vehicle's engine to prevent a spark-initiated explosion and turn-off of an engine powered discharge pump attached to the vehicle' s storage tank. The remotely controlled shutdown system provides safe and reliable control of hazardous material handling, particularly in an emergency situation such as in-volving a fire or accidental spill of the material.
摘要翻译： 用于含有汽油，液态丙烷气（LPG）或无水氨（NH 3）等有害流体物质的车辆的安全关闭系统允许车辆发动机关闭，并由车辆操作员远程关闭车辆储罐阀门 从车上。 该系统包括一个手持式控制器，包括一个接收器和发射器，以及一个位于车辆驾驶室内的接收器/发射机组合。 驾驶室中的变送器与车载流量计耦合，用于向遥控接收器提供RF信号，以在手持式控制器上显示从车辆储罐排出的物料的量。 驾驶室安装的接收器响应于由遥控器发射的操作员启动的关闭信号，并且耦合到牵引螺线管，该拉动螺线管又通过用于闭合阀的电缆和停止流动的电缆耦合到储罐阀 控制器启动时有害物质。 由车载接收器接收关机信号也导致车辆发动机的立即关闭，以防止附着在车辆储罐上的发动机动力排放泵发生火花爆发和关闭。 遥控关机系统可以安全可靠地控制危险物质的处理，特别是在紧急情况下，例如火灾或意外泄漏物料。
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