公开(公告)号：US10134621B2

公开(公告)日：2018-11-20

申请号：US14568742

申请日：2014-12-12

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J11/00 ,  H01L21/67

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

公开(公告)号：US20150206782A1

公开(公告)日：2015-07-23

申请号：US14568742

申请日：2014-12-12

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J11/00

CPC classification number: H01L21/67742 ,  B25J11/0095 ,  H01L21/67196 ,  H01L21/67745

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

Abstract translation: 一种传送装置，包括框架，连接到框架的多个臂，每个臂具有端部执行器和独立的驱动轴线，用于相对于多个臂中的其它臂伸出和缩回各自的臂;线性轨道，其限定一定程度的 用于独立驱动轴的自由度用于至少一个臂的延伸和缩回，以及由每个臂共享的并且被配置为围绕公共枢转轴线枢转所述多个臂的公共驱动轴，其中所述多个臂中的至少一个具有另一个驱动轴 为多臂中的其他武器界定独立的自由度。