公开(公告)号：US20220060160A1

公开(公告)日：2022-02-24

申请号：US17415546

申请日：2019-12-12

Applicant: COMET AG

Inventor： Daniel Gruner ,  Andreas Hartmann ,  Philippe Dennler ,  Markus Reiff ,  André Grede ,  Anton Labanc

IPC: H03F3/24 ,  H03F3/195 ,  H01J37/32

Abstract: A radiofrequency, RF, power amplifier, including at least one field-effect transistor, FET, wherein a source terminal of the at least one FET is connected to ground. At least one diode is included, wherein a cathode of the at least one diode is connected to a drain terminal of the at least one FET and an anode of the at least one diode is connected to ground. An output network is connected to the drain terminal of the at least one FET. An input network is connected to a gate terminal of the at least one FET.

公开(公告)号：US20210075380A1

公开(公告)日：2021-03-11

申请号：US16486544

申请日：2018-02-19

Applicant: Comet AG

Inventor： Anton Labanc ,  Daniel Gruner

IPC: H03F3/195 ,  H03F1/52 ,  H03F3/24

Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.

公开(公告)号：US20210074529A1

公开(公告)日：2021-03-11

申请号：US17015139

申请日：2020-09-09

Applicant: COMET AG

Inventor： Anton Labanc ,  Daniel Gruner ,  André Grede

IPC: H01J37/32 ,  H01L21/67

Abstract: In the field of RF generator design, some output power faults may occur so quickly that a digital control system is unable to effectively address them. Accordingly, there is provided a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.