公开(公告)号：US20240296270A1

公开(公告)日：2024-09-05

申请号：US18574831

申请日：2022-06-24

Applicant: COMET AG

Inventor： Nikolai Schwerg ,  Roland Schlierf ,  André Grede ,  Daniel Gruner ,  Anton Labanc ,  Thomas Fink ,  Manuel vor dem Brocke

IPC: G06F30/34 ,  G06F30/27 ,  G06F30/373

CPC classification number: G06F30/34 ,  G06F30/27 ,  G06F30/373

Abstract: A method for improving digital signal processing in a radio-frequency system, in particular a radio-frequency power delivery system, including providing at least one input signal, preferably related to a radio-frequency signal of the radio-frequency system, performing a processing procedure wherein the at least one input signal is repeatedly processed by a programmable circuit using at least one configurable parameter of the processing, wherein a configuration of the at least one parameter is varied for each processing of the at least one input signal to obtain respective processing results, determining at least one parameter result for an optimization of the configuration based on the processing results, and providing the at least one determined parameter result for the improved digital signal processing.

公开(公告)号：US20210259090A1

公开(公告)日：2021-08-19

申请号：US17176414

申请日：2021-02-16

Applicant: COMET AG

Inventor： Anton Labanc ,  Daniel Gruner

IPC: H05H1/46 ,  H03F3/19

Abstract: The high-frequency amplifier assembly for a high-frequency generator, in particular for a high-frequency generator for operating a plasma generator, is provided with a signal generator for generating a high-frequency signal; a first amplifier transistor for amplifying the signal generated by the signal generator; an output terminal for outputting the amplified signal to an external load; an input network arranged between the signal generator and the first amplifier transistor for providing the high-frequency signal at the input of the amplifier transistor; an output network arranged between the amplifier transistor and the external load for providing a desired load impedance for the amplifier transistor; and an electronic voltage-limiting assembly arranged at the output terminal for limiting the output voltage at the output terminal.

公开(公告)号：US11038479B2

公开(公告)日：2021-06-15

申请号：US16486544

申请日：2018-02-19

Applicant: Comet AG

Inventor： Anton Labanc ,  Daniel Gruner

IPC: H03F1/34 ,  H03F3/195 ,  H03F1/52 ,  H03F3/24

Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.

公开(公告)号：US20220190835A1

公开(公告)日：2022-06-16

申请号：US17686665

申请日：2022-03-04

Applicant: Comet AG

Inventor： Manuel vor dem Brocke ,  Roland Schlierf ,  André Grede ,  Daniel Gruner

IPC: H03L7/099 ,  H03L7/093 ,  H03L7/189

Abstract: A device for synchronizing a periodic high frequency power signal (18) and an external reference signal (10). The device comprises a phase control circuit (100) and a digital oscillator circuit (130). The digital oscillator circuit (130) is connected to the phase control circuit (100). The digital oscillator circuit (130) comprises means for generating the periodic high frequency power signal (18) dependent on the control signal from the phase control circuit. The phase control circuit (100) is configured to determine a phase difference of the periodic high frequency power signal (18) and the external reference signal (10).

公开(公告)号：US20210259092A1

公开(公告)日：2021-08-19

申请号：US17269461

申请日：2018-08-20

Applicant: Comet AG

Inventor： André Grede ,  Daniel Gruner ,  Anton Labanc

IPC: H05K1/02

Abstract: An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.

公开(公告)号：US12206372B2

公开(公告)日：2025-01-21

申请号：US17611224

申请日：2020-05-22

Applicant: COMET AG

Inventor： Daniel Gruner ,  André Grede ,  Nikolai Schwerg ,  Anton Labanc ,  Manuel vor dem Brocke ,  Roland Schlierf

IPC: H03F3/24 ,  H01J37/32 ,  H03F1/02 ,  H03F3/195

Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.

公开(公告)号：US12132454B2

公开(公告)日：2024-10-29

申请号：US17415546

申请日：2019-12-12

Applicant: COMET AG

Inventor： Daniel Gruner ,  Andreas Hartmann ,  Philippe Dennler ,  Markus Reiff ,  André Grede ,  Anton Labanc

IPC: H03F1/52 ,  H01J37/32 ,  H03F3/195 ,  H03F3/24

CPC classification number: H03F3/245 ,  H01J37/32183 ,  H03F3/195 ,  H03F1/523 ,  H03F2200/444 ,  H03F2200/451 ,  H03F2200/541

Abstract: A radiofrequency, RF, power amplifier, including at least one field-effect transistor, FET, wherein a source terminal of the at least one FET is connected to ground. At least one diode is included, wherein a cathode of the at least one diode is connected to a drain terminal of the at least one FET and an anode of the at least one diode is connected to ground. An output network is connected to the drain terminal of the at least one FET. An input network is connected to a gate terminal of the at least one FET.

公开(公告)号：US20240355598A1

公开(公告)日：2024-10-24

申请号：US18574792

申请日：2022-07-04

Applicant: COMET AG

Inventor： Thomas Fink ,  André Grede ,  Daniel Gruner ,  Anton Labanc ,  Roland Schlierf ,  Nikolai Schwerg ,  Manuel vor dem Brocke

IPC: H01J37/32

CPC classification number: H01J37/32926 ,  H01J37/32944

Abstract: A method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, including providing at least one input signal each related to an analog signal of a power delivery system for the plasma system and/or to another characteristic of the power delivery system and/or of the plasma system. The at least one input signal having at least one irregularity feature indicative of the irregularity in the plasma system, performing a machine learning procedure wherein the at least one input signal having the at least one irregularity feature is processed by a programmable circuit to train the detection of the irregularity in the plasma system.

公开(公告)号：US12126347B2

公开(公告)日：2024-10-22

申请号：US18018952

申请日：2021-08-03

Applicant: COMET AG

Inventor： Manuel vor dem Brocke ,  Roland Schlierf ,  André Grede ,  Daniel Gruner ,  Anton Labanc

IPC: H03L7/08 ,  H03K5/24

CPC classification number: H03L7/08 ,  H03K5/24

Abstract: A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i) each having a respective output frequency (fi), phase (Φi), and amplitude (Ai), including



a signal comparator configured to compare a reference signal having a reference frequency (fref) and a reference phase (Φref) with a feedback signal having a feedback frequency (fPLL) and a feedback phase (ΦPLL), and configured to generate an error signal representative of a difference between the reference signal and the feedback signal; and
a data processing unit receiving as an input signal the error signal generated by the signal comparator, and outputting a plurality of waveform tuning signals (FTWPLL, FTWi) as a function of the error signal;
wherein a plurality of waveform generators (DDSPLL, DDSi) each receiving at least one of the plurality of waveform tuning signals (FTWPLL, FTWi) output by the data processing unit, wherein each waveform generator (DDSPLL, DDSi) generates a time-dependent amplitude signal (APLL(t), Ai(t)) as a function of the received respective waveform tuning signal (FTWPLL, FTWi),
wherein one predetermined amplitude signal (APLL(t)) of the generated plurality of amplitude signals (APLL(t), Ai(t)) represents the feedback signal input to the signal comparator, and the other amplitude signals (Ai(t)) represent the respective radio frequency (RF) output signals (RFout,i) to be generated, and
wherein the data processing unit is configured to adjust both the waveform tuning signal (FTWPLL) corresponding to the one predetermined amplitude signal (APLL(t)) representing the feedback signal such as to minimize the error signal, and the other waveform tuning signals (FTWi) corresponding to the other amplitude signals (Ai(t)) representing the radio frequency (RF) output signals (RFout,i) based on the adjusted waveform tuning signal (FTWPLL) of the predetermined amplitude signal (APLL(t)) representing the feedback signal.




The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i).

公开(公告)号：US20240321553A1

公开(公告)日：2024-09-26

申请号：US18269697

申请日：2020-12-30

Applicant: COMET AG

Inventor： André Grede ,  Daniel Gruner ,  Anton Labanc ,  Roland Schlierf ,  Nikolai Schwerg ,  Manuel vor dem Brocke

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32926

Abstract: A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF signal; synchronizing the at least one distorted RF signal with the input RF signal; determining a difference between a target RF signal and the at least one distorted RF signal being synchronized; if the difference is larger than a predetermined threshold, determining a second set of control parameters based on the comparison of the target RF signal and the at least one distorted RF signal being synchronized; and generating an adapted input RF signal on the basis of the second set of control parameters such that the difference between the target RF signal and the distorted RF signal is reduced.