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1.发明公开公开(公告)号：US20240296270A1
公开(公告)日：2024-09-05
申请号：US18574831
申请日：2022-06-24
Applicant: COMET AG
Inventor： Nikolai Schwerg , Roland Schlierf , André Grede , Daniel Gruner , Anton Labanc , Thomas Fink , Manuel vor dem Brocke
IPC: G06F30/34 , G06F30/27 , G06F30/373
CPC classification number: G06F30/34 , G06F30/27 , G06F30/373
Abstract: A method for improving digital signal processing in a radio-frequency system, in particular a radio-frequency power delivery system, including providing at least one input signal, preferably related to a radio-frequency signal of the radio-frequency system, performing a processing procedure wherein the at least one input signal is repeatedly processed by a programmable circuit using at least one configurable parameter of the processing, wherein a configuration of the at least one parameter is varied for each processing of the at least one input signal to obtain respective processing results, determining at least one parameter result for an optimization of the configuration based on the processing results, and providing the at least one determined parameter result for the improved digital signal processing.
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公开(公告)号：US20210259090A1
公开(公告)日：2021-08-19
申请号：US17176414
申请日：2021-02-16
Applicant: COMET AG
Inventor： Anton Labanc , Daniel Gruner
Abstract: The high-frequency amplifier assembly for a high-frequency generator, in particular for a high-frequency generator for operating a plasma generator, is provided with a signal generator for generating a high-frequency signal; a first amplifier transistor for amplifying the signal generated by the signal generator; an output terminal for outputting the amplified signal to an external load; an input network arranged between the signal generator and the first amplifier transistor for providing the high-frequency signal at the input of the amplifier transistor; an output network arranged between the amplifier transistor and the external load for providing a desired load impedance for the amplifier transistor; and an electronic voltage-limiting assembly arranged at the output terminal for limiting the output voltage at the output terminal.
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公开(公告)号：US11038479B2
公开(公告)日：2021-06-15
申请号：US16486544
申请日：2018-02-19
Applicant: Comet AG
Inventor： Anton Labanc , Daniel Gruner
Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.
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公开(公告)号：US20210259092A1
公开(公告)日：2021-08-19
申请号：US17269461
申请日：2018-08-20
Applicant: Comet AG
Inventor： André Grede , Daniel Gruner , Anton Labanc
IPC: H05K1/02
Abstract: An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.
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公开(公告)号：US20220060160A1
公开(公告)日：2022-02-24
申请号：US17415546
申请日：2019-12-12
Applicant: COMET AG
Inventor： Daniel Gruner , Andreas Hartmann , Philippe Dennler , Markus Reiff , André Grede , Anton Labanc
Abstract: A radiofrequency, RF, power amplifier, including at least one field-effect transistor, FET, wherein a source terminal of the at least one FET is connected to ground. At least one diode is included, wherein a cathode of the at least one diode is connected to a drain terminal of the at least one FET and an anode of the at least one diode is connected to ground. An output network is connected to the drain terminal of the at least one FET. An input network is connected to a gate terminal of the at least one FET.
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Patent Agency Ranking
公开(公告)号：US20210075380A1
公开(公告)日：2021-03-11
申请号：US16486544
申请日：2018-02-19
Applicant: Comet AG
Inventor： Anton Labanc , Daniel Gruner
Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.
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公开(公告)号：US20210074529A1
公开(公告)日：2021-03-11
申请号：US17015139
申请日：2020-09-09
Applicant: COMET AG
Inventor： Anton Labanc , Daniel Gruner , André Grede
Abstract: In the field of RF generator design, some output power faults may occur so quickly that a digital control system is unable to effectively address them. Accordingly, there is provided a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
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公开(公告)号：US12206372B2
公开(公告)日：2025-01-21
申请号：US17611224
申请日：2020-05-22
Applicant: COMET AG
Inventor： Daniel Gruner , André Grede , Nikolai Schwerg , Anton Labanc , Manuel vor dem Brocke , Roland Schlierf
Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.
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公开(公告)号：US12132454B2
公开(公告)日：2024-10-29
申请号：US17415546
申请日：2019-12-12
Applicant: COMET AG
Inventor： Daniel Gruner , Andreas Hartmann , Philippe Dennler , Markus Reiff , André Grede , Anton Labanc
CPC classification number: H03F3/245 , H01J37/32183 , H03F3/195 , H03F1/523 , H03F2200/444 , H03F2200/451 , H03F2200/541
Abstract: A radiofrequency, RF, power amplifier, including at least one field-effect transistor, FET, wherein a source terminal of the at least one FET is connected to ground. At least one diode is included, wherein a cathode of the at least one diode is connected to a drain terminal of the at least one FET and an anode of the at least one diode is connected to ground. An output network is connected to the drain terminal of the at least one FET. An input network is connected to a gate terminal of the at least one FET.
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10.发明公开公开(公告)号：US20240355598A1
公开(公告)日：2024-10-24
申请号：US18574792
申请日：2022-07-04
Applicant: COMET AG
Inventor： Thomas Fink , André Grede , Daniel Gruner , Anton Labanc , Roland Schlierf , Nikolai Schwerg , Manuel vor dem Brocke
IPC: H01J37/32
CPC classification number: H01J37/32926 , H01J37/32944
Abstract: A method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, including providing at least one input signal each related to an analog signal of a power delivery system for the plasma system and/or to another characteristic of the power delivery system and/or of the plasma system. The at least one input signal having at least one irregularity feature indicative of the irregularity in the plasma system, performing a machine learning procedure wherein the at least one input signal having the at least one irregularity feature is processed by a programmable circuit to train the detection of the irregularity in the plasma system.
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