Photoelectron emission microscope for wafer and reticle inspection
    23.
    发明授权
    Photoelectron emission microscope for wafer and reticle inspection 有权
    光电子发射显微镜用于晶圆和掩模版检查

    公开(公告)号:US06979819B2

    公开(公告)日:2005-12-27

    申请号:US10017262

    申请日:2001-12-14

    IPC分类号: G01N23/227 H01J37/285

    摘要: A method of inspecting and imaging substrates with an electron beam. The method can include a illuminating the substrate with a photon beam to cause photoemission of electrons. A low energy electron beam can be used to prevent or reduce positive charging of the substrate. Reflected electrons and/or emitted photoelectrons can be imaged to review or inspect the substrate.

    摘要翻译: 用电子束检查和成像基板的方法。 该方法可以包括用光子束照射衬底以引起电子的光电子发射。 可以使用低能电子束来防止或减少衬底的正电荷。 可以对反射的电子和/或发射的光电子进行成像以检查或检查衬底。

    Engulfment rescue device and method
    24.
    发明申请
    Engulfment rescue device and method 失效
    并发救援装置及方法

    公开(公告)号:US20050144813A1

    公开(公告)日:2005-07-07

    申请号:US11062643

    申请日:2005-02-22

    申请人: David Adler

    发明人: David Adler

    摘要: A device and method is provided for rescuing a person trapped in engulfing material at an engulfment site. A reduction tool is used to loosen the engulfing material in order to free or facilitate freeing a buried or partially buried victim. The loosened engulfing material is subsequently removed from the engulfment site by vacuum excavation. Shoring equipment may be used to stabilize the excavation site prior to commencement of soil reduction and soil removal procedures. The excavation site may include a sump area to receive loosened engulfing material discharged by the reduction tool from the excavation site. The loosened engulfing material in the sump area may also be removed with vacuum excavation techniques.

    摘要翻译: 提供了一种装置和方法,用于拯救被吞没在吞没物质处的物质的人。 使用减少工具来松开吞没物质,以便释放或便于释放埋藏或部分埋藏的受害者。 随后通过真空开挖将松散的吞噬材料从吞没部位取出。 在开始减少土壤和除污程序之前,可以使用支护设备来稳定挖掘点。 挖掘场地可以包括一个集水区,用于接收由减量工具从挖掘位置排出的松散的吞没材料。 贮槽区域中松动的吞噬材料也可以用真空挖掘技术去除。