Abstract:
An LED lamp structure includes a heat sink and a base. The heat sink includes a first receiving cavity, a second receiving cavity opposite to the first receiving cavity and a partition. A light board having LED modules is mounted on the partition. The partition defines two first threaded through holes therein. The base has two positioning protrusions engaging in two positioning grooves of the heat sink. Thus, second screw holes of two screw pillars of the base are aligned at the first screw holes of the partition of the heat sink. Screws are used to threadedly engage in the first screw holes, the second screw holes and third screw holes in the light board to thereby assemble the heat sink, the base and the light board together.
Abstract:
A photolithographic process for patterning a photoresist layer over a substrate. A positive photoresist layer is formed over the substrate. The positive photoresist layer contains a photoacid generator and a photobase generator. The positive photoresist layer is exposed to light through a photomask so that the photoacid generator in the photoresist layer is changed into photoacid and the photobase generator is changed to photobase. The photomask has a first pattern region and a second pattern region that correspond with a first region and a second region of the photoresist layer. The first pattern region has a duty ratio greater than the second pattern region so that the first region is exposed to a higher light intensity than the second region. Finally, the positive photoresist layer is developed. The reaction threshold for turning the photobase generator into photobase is adjusted according to the exposure strength between the first region and the second region. Therefore, the quantity of photobase generated in the first region is much greater than in the second region. Ultimately, the diffusion of photoacid within the first region is blocked without affecting the development of the positive photoresist layer in the second region.
Abstract:
A method for forming doped p-type gate is disclosed as the following description. The method includes that, firstly, a semiconductor substrate is provided. The semiconductor substrate is etched to form a concave portion as a shallow trench isolation. A first silicon dioxide is filled into the shallow trench isolation. A n-type well is formed into the semiconductor substrate. A silicon germanium layer, named as the doped p-type layer is formed on the surface of semiconductor substrate and the surface of shallow trench isolation. A silicon nitride layer, named as the anti-reflection layer is formed on the surface of silicon germanium layer. The portions of silicon nitride layer and the portions of silicon germanium layer are etched as a gate region. The source/drain extension is formed. A second silicon dioxide layer is deposited over the surface of semiconductor substrate and the surface of nitride layer. The second silicon dioxide layer is etched as a spacer beside the sidewall of gate region. A source/drain region is formed into the semiconductor substrate. The silicon nitride layer is removed. Finally, salicide region is formed into the source/drain region and upon the surface of silcion layer to complete the silicon gate structure.
Abstract:
A method of lowering critical dimensions. A film layer and a photoresist layer are sequentially formed over a substrate. The photoresist layer is exposed and developed to form a plurality of first openings. A first baking of the photoresist layer is carried out, permitting the photoresist layer to flow. A second baking is next carried out so that the width of the first openings is reduced linearly with time until a desired dimension is reached. Using the photoresist layer as a mask, the film layer is etched to form a plurality of second openings.
Abstract:
A structure of combined passive elements and logic circuits on a SOI (Silicon On Insulator) wafer. By combining passive elements (including a resistor, an inductor and a capacitor) with a logic device on a SOI wafer with dual damascene technology, an extremely thick inductor that effectively reduces the resistance of the inductor can be formed while also reducing the layout area. The invention is compatible with conventional VLSI technology without increasing number of masks or process steps. Furthermore, because the resistor of the invention is composed of single crystal Si, the resistor has high stability and low noise. Therefore, the structure according to the invention is suitable for RF device design and is also suitable for a System On Chip design.