公开(公告)号：US20120002189A1

公开(公告)日：2012-01-05

申请号：US13256837

申请日：2010-03-15

申请人： Jaione Bengoechea Apezteguia ,  Mark Carpaij ,  Alexander Marc Van Der Lee ,  Ulrich Weichmann

发明人： Jaione Bengoechea Apezteguia ,  Mark Carpaij ,  Alexander Marc Van Der Lee ,  Ulrich Weichmann

IPC分类号： G01P3/36

CPC分类号： G01F1/661 ,  G01F1/663 ,  G01P5/26 ,  G01S7/4916 ,  G01S17/58

摘要： The invention relates to an apparatus (1) for determining a flow property of a fluid (2). The apparatus comprises a distance and velocity determination unit (3) for determining distances of elements of the fluid to the distance and velocity determination unit (3) and for determining velocities of the elements at the same time based on a self-mixing interference signal. The apparatus (1) comprises further a flow determination unit (4) for determining the flow property of the fluid (2) based on at least one of the determined distances and velocities. This allows determining the flow property, even if the fluid (2) is optically thick.

摘要翻译： 本发明涉及一种用于确定流体（2）的流动特性的装置（1）。 该装置包括距离和速度确定单元（3），用于根据距离和速度确定单元（3）确定流体元件的距离，并且用于基于自混合干扰信号同时确定元件的速度。 装置（1）还包括流动确定单元（4），用于基于确定的距离和速度中的至少一个来确定流体（2）的流动性质。 即使流体（2）光学厚，也可以确定流动性。

公开(公告)号：US20100328680A1

公开(公告)日：2010-12-30

申请号：US12918829

申请日：2009-02-03

申请人： Holger Moench ,  Johannes Baier ,  Mark Carpaij ,  Rainer Hilbig ,  Johanna Sophie Kolb ,  Stefan Schwan ,  Alexander Marc Van Der Lee ,  Ulrich Weichmann ,  Daiyu Hayashi

发明人： Holger Moench ,  Johannes Baier ,  Mark Carpaij ,  Rainer Hilbig ,  Johanna Sophie Kolb ,  Stefan Schwan ,  Alexander Marc Van Der Lee ,  Ulrich Weichmann ,  Daiyu Hayashi

IPC分类号： G01B11/14

CPC分类号： G01S17/50 ,  G01S7/4811 ,  G01S7/4916 ,  G01S7/493

摘要： An optical sensor (600) for detecting the movement of an object relative to the position of the optical sensor (600), using self-mixing interference, is described. The optical sensor (600) comprises a laser (100), a detector (200) and a filter device (500). The filter device (500) suppresses measurement signals generated by means of the detector (200) when movements of the object at a velocity below a defined threshold value cause the measurement signals. The optical sensor (600) may be used in a switch in order to enable selective switching depending on the velocity of the movement of the object.

摘要翻译： 描述了一种用于使用自混合干涉来检测物体相对于光学传感器（600）的位置的移动的光学传感器（600）。 光学传感器（600）包括激光器（100），检测器（200）和过滤器装置（500）。 当物体以低于定义的阈值的速度移动时，过滤装置（500）抑制由检测器（200）产生的测量信号，导致测量信号。 可以将光学传感器（600）用于开关中，以便能够根据物体的运动速度进行选择性切换。

公开(公告)号：US20090279409A1

公开(公告)日：2009-11-12

申请号：US11720624

申请日：2005-11-25

申请人： Alexander Marc Van Der Lee ,  Coen Theodorus Hubertus Fran Liedenbaum ,  Teunis Willem Tukker

发明人： Alexander Marc Van Der Lee ,  Coen Theodorus Hubertus Fran Liedenbaum ,  Teunis Willem Tukker

IPC分类号： G11B7/135

CPC分类号： G11B7/133 ,  G11B7/0909 ,  G11B7/0916 ,  G11B7/131 ,  G11B7/14

摘要： A method and a device for simultaneously reading information from a plurality of data tracks (14) of an optical disc (22) by means of a detector illuminating said plurality of data tracks with laser spots (25), wherein light reflected from the laser spots is collected by means of a servo lens (29), further providing the detector with a plurality of detector elements (28a, 28b, 28c, 31a, 42a, 28bc, 28cc, 32a, 32b, 42ac, 51a, 52a, 52b) spaced apart from each other, arranging each detector element to detect (read) light reflected from a data track allotted to each element, arranging at most two detector elements (28bc, 28cc, 32a, 32b, 42ac, 52a, 52b) to be segmented detectors for providing both a power signal for the allotted track and an output signal for focus error control in a servo system guiding said detector along said tracks, reading only the power signal for each track by means of second detector elements (28a, 28b, 28c, 31a, 42a, 51a) and arranging each one of said second detector elements to be of substantially smaller area than the area of one of said first detector elements.

摘要翻译： 一种用于通过利用激光点（25）照射所述多个数据轨道的检测器从光盘（22）的多个数据轨道（14）同时读取信息的方法和装置，其中从激光点反射的光 通过伺服透镜（29）收集，进一步向检测器提供间隔开的多个检测器元件（28a，28b，28c，31a，42a，28bc，28cc，32a，32b，42ac，51a，52a，52b） 将每个检测器元件布置成检测（读取）从分配给每个元件的数据轨道反射的光，将至少两个检测器元件（28bc，28cc，32a，32b，42ac，52a，52b）布置成分段检测器 用于在所述轨道上引导所述检测器的伺服系统中提供用于分配轨道的功率信号和用于聚焦误差控制的输出信号，仅通过第二检测器元件（28a，28b，28c， 31a，42a，51a）并且布置所述第二检测中的每一个 或元件具有比所述第一检测器元件之一的面积更小的面积。

公开(公告)号：US20090002692A1

公开(公告)日：2009-01-01

申请号：US12097977

申请日：2006-12-12

申请人： Floris Maria Hermansz Crompvoets ,  Alexander Marc Van Der Lee

发明人： Floris Maria Hermansz Crompvoets ,  Alexander Marc Van Der Lee

IPC分类号： G01J1/42

CPC分类号： G01J1/4257 ,  G01J1/4228 ,  G11B7/1263 ,  G11B7/127 ,  G11B7/1376 ,  G11B7/1395

摘要： A method for measuring the laser power of a forward multiple beam generated by a laser diode array comprising at least two laser diodes, the method comprising a generation step, comprising generating the forward multiple beam; a separation step, comprising separating at least part of the forward multiple beam into individual beams (31, 32, 300, 301, 302, 303), the number of individual beams being equal to the number of laser diodes in the laser diode array, the arrangement being such that each individual beam comprises light originating from a single laser diode and a measurement step, comprising measuring the laser power of each individual beam by means of photo detectors (121, 122, 125, 126, 127, 128). The separation may be performed in space, by means of an imaging lens or making use of vignetting of the collimator lens, or in time.

摘要翻译： 一种用于测量由包括至少两个激光二极管的激光二极管阵列产生的正向多光束的激光功率的方法，所述方法包括生成步骤，包括产生所述正向多光束; 分离步骤，包括将所述前向多束光束的至少一部分分离为单独的光束（31,32,3300,301,302,303），所述单个光束的数量等于所述激光二极管阵列中激光二极管的数量， 该布置使得每个单独的光束包括源自单个激光二极管的光和测量步骤，包括通过光电检测器（121,122,125,126,127,128）测量每个单独的光束的激光功率。 分离可以在空间中，借助于成像透镜或者使用准直透镜的渐晕或者在时间上进行。

公开(公告)号：US20080239897A1

公开(公告)日：2008-10-02

申请号：US11568479

申请日：2005-04-27

申请人： Christopher Busch ,  Alexander Marc Van Der Lee

发明人： Christopher Busch ,  Alexander Marc Van Der Lee

IPC分类号： G11B7/12

CPC分类号： G11B7/1275 ,  G11B7/0903 ,  G11B7/1353 ,  G11B2007/0013

摘要： The present invention relates to an optical reader/writer for a two dimensional storage disc, comprising means (21, 22, 23, 14, 16, 15) for generating a plurality of laser beams and projecting said beams onto a rotating disc, means (24, 25, 26) for detecting the beams after being diffracted by the disc, and means (24, 27, 28) for determining a focus error signal (29) based on one of said plurality of beams. The plurality of beams comprises an array of beams having a first wavelength, and a dedicated focus tracking beam having a second wavelength, and the focus error signal (29) is based on said focus tracking beam. According to the invention, beams having one wavelength is used for the actual accessing of the data on the disc, while a beam having a second wavelength is used for focus tracking. The focus tracking can then be based on one single beam without interference from adjacent beams.

摘要翻译： 本发明涉及一种用于二维存储盘的光学读取器/写入器，包括用于产生多个激光束并将所述光束投影到旋转盘上的装置（21,22,23,14,16,15），装置 24,25,26），用于在由盘衍射之后检测光束;以及用于基于所述多个光束之一确定聚焦误差信号（29）的装置（24,27,28）。 多个光束包括具有第一波长的光束阵列和具有第二波长的专用聚焦跟踪光束，并且聚焦误差信号（29）基于所述聚焦跟踪光束。 根据本发明，具有一个波长的波束用于实际访问盘上的数据，而具有第二波长的波束用于聚焦跟踪。 焦点跟踪可以基于一个单个波束而不受相邻波束的干扰。

公开(公告)号：US20080159112A1

公开(公告)日：2008-07-03

申请号：US11815107

申请日：2006-01-26

申请人： Alexander Marc Van Der Lee ,  Coen Theodorus Hubertus Fransiscus Liedenbaum ,  Teunis Willem Tukker

发明人： Alexander Marc Van Der Lee ,  Coen Theodorus Hubertus Fransiscus Liedenbaum ,  Teunis Willem Tukker

IPC分类号： G11B7/00

CPC分类号： G11B7/0912 ,  G11B7/131 ,  G11B7/14

摘要： A device (1) for scanning an optical disc (6), the disc (6) comprising substantially parallel data tracks (10). The device (1) comprises an optical unit for creating track light spots (12) on the data tracks (10) and a plurality of detector light spots on a plurality of signal detectors. The device further comprises a focus error unit for with a beam manipulating element (21, 22, 22a, 92) for providing for at least one of the reflected beams a first optical path (24) to a first segmented detector (8a) and a second optical path (25) to a second segmented detector (8b). The lengths of the first optical path (24) and the second optical path (25) exhibit a difference (Dd), such that an intensity distribution of a first detector light spot on the first segmented detector (8a) is equal to an intensity distribution of a second detector light spot on the second segmented detector (8b) when the at least one track light spot is correctly focussed and that the intensity distribution on the first segmented detector (8a) differs from the intensity distribution on the second segmented detector (8b) when the at least one track light spot is not correctly focussed. The difference (Dd) is substantially less than a quotient of a distance between two adjacent detector light spots (Ds) and a numerical aperture (NA) of the lens (7). A dimension (D1) of a light detecting area of the segmented detectors in a direction of adjacent detector light spots is less than the distance (Ds) between two adjacent detector light spots.

摘要翻译： 一种用于扫描光盘（6）的设备（1），所述盘（6）包括基本上平行的数据轨道（10）。 设备（1）包括用于在数据轨道（10）上创建轨道光点（12）的光学单元和多个信号检测器上的多个检测器光点。 该装置还包括一个聚焦误差单元，用于与光束操纵元件（21,22,22a，92）一起提供至少一个反射光束到第一分段检测器（8a）的第一光路（24） 以及到第二分段检测器（8b）的第二光路（25）。 第一光路（24）和第二光路（25）的长度呈现差（Dd），使得第一分段检测器（8a）上的第一检测器光点的强度分布等于强度 当所述至少一个轨道光点被正确聚焦并且所述第一分段检测器（8a）上的强度分布与所述第二分段检测器（8a）上的强度分布不同时，所述第二分段检测器（8b）上的第二检测器光点的分布 当至少一个轨道光点未被正确聚焦时，检测器（8b）。 差值（Dd）基本上小于两个相邻检测器光点（Ds）和透镜（7）的数值孔径（NA）之间的距离的商。 分段检测器的光检测区域在相邻检测器光点的方向上的尺寸（D 1）小于两个相邻检测器光点之间的距离（Ds）。

公开(公告)号：US07345739B2

公开(公告)日：2008-03-18

申请号：US10792909

申请日：2004-03-05

申请人： Robert Frans Maria Hendriks ,  Egbert Lenderink ,  Rene Monshouwer ,  Alexander Marc Van Der Lee ,  Gert Wim 'T Hooft

发明人： Robert Frans Maria Hendriks ,  Egbert Lenderink ,  Rene Monshouwer ,  Alexander Marc Van Der Lee ,  Gert Wim 'T Hooft

IPC分类号： G03B27/52 ,  G03B27/54

CPC分类号： G03F7/70483 ,  G03F7/70216 ,  G03F9/7065

摘要： A lithographic apparatus equipped with an improved alignment system, is presented herein. In one embodiment, the apparatus includes a radiation system for providing a projection beam of radiation, a support structure for supporting a patterning device that configures the projection beam according to a desired pattern, a substrate holder for holding a substrate, projection system for projecting the patterned beam onto a target portion of the substrate, and an alignment system. The alignment system includes a radiation source for illuminating at least one mark which is usable for alignment on a substrate and an imaging system for imaging light which has interacted with the at least one mark to generate alignment information.

摘要翻译： 本文介绍了一种配有改进对准系统的光刻设备。 在一个实施例中，该装置包括用于提供投影辐射束的辐射系统，用于支撑根据期望图案配置投影光束的图案形成装置的支撑结构，用于保持基板的基板保持器， 图案化的光束到基板的目标部分上，以及对准系统。 对准系统包括用于照亮可用于在基板上对准的至少一个标记的辐射源和用于对与至少一个标记相互作用的光进行成像的成像系统以产生对准信息。