公开(公告)号：US20220266382A1

公开(公告)日：2022-08-25

申请号：US17185259

申请日：2021-02-25

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Joel Schrauben ,  Jan Kleinert

IPC: B23K26/0622 ,  B23K26/082

Abstract: A workpiece (100) having substrate, such as a glass substrate, can be etched by a laser or by other means to create recessed features (200, 202). A laser-induced forward transfer (LIFT) process or metal oxide printing process can be employed to impart a seed material (402), such as a metal, onto the glass substrate, especially into the recessed features (200, 202). The seeded recessed features can be plated, if desired, by conventional techniques, such as electroless plating, to provide conductive features (500) with predictable and better electrical properties. The workpieces (100) can be connected in a stacked such that subsequently stacked workpieces (100) can be modified in place.

公开(公告)号：US20210316400A1

公开(公告)日：2021-10-14

申请号：US17354680

申请日：2021-06-22

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Jan Kleinert ,  Zhibin Lin ,  Hisashi Matsumoto

IPC: B23K26/382 ,  B23K26/082 ,  B23K26/0622 ,  B23K26/70

Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to processing of workpieces in a manner resulting in enhanced accuracy, throughput, etc. Other embodiments relate to realtime Z-height measurement and, when suitable, compensation for certain Z-height deviations. Still other embodiments relate to modulation of scan patterns, beam characteristics, etc., to facilitate feature formation, avoid undesirable heat accumulation, or otherwise enhance processing throughput. A great number of other embodiments and arrangements are also detailed.

公开(公告)号：US20210291296A1

公开(公告)日：2021-09-23

申请号：US17326664

申请日：2021-05-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Jan Kleinert

IPC: B23K26/03 ,  B23K26/067 ,  B23K26/035 ,  H01S3/067 ,  H01S3/10

Abstract: A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.

公开(公告)号：US11045899B2

公开(公告)日：2021-06-29

申请号：US15691344

申请日：2017-08-30

Applicant: Electro Scientific Industries, Inc.

Inventor： Jan Kleinert

IPC: B23K26/03 ,  H01S3/067 ,  H01S3/10 ,  B23K26/035 ,  B23K26/067 ,  H01S3/00

Abstract: A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.

公开(公告)号：US10957615B2

公开(公告)日：2021-03-23

申请号：US16067693

申请日：2017-03-31

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Joel Schrauben ,  Jan Kleinert

IPC: H01L21/48 ,  H01L23/15 ,  H01L23/498

Abstract: A workpiece (100) having substrate, such as a glass substrate, can be etched by a laser or by other means to create recessed features (200, 202). A laser-induced forward transfer (LIFT) process or metal oxide printing process can be employed to impart a seed material (402), such as a metal, onto the glass substrate, especially into the recessed features (200, 202). The seeded recessed features can be plated, if desired, by conventional techniques, such as electroless plating, to provide conductive features (500) with predictable and better electrical properties. The workpieces (100) can be connected in a stacked such that subsequently stacked workpieces (100) can be modified in place.

公开(公告)号：US10654141B2

公开(公告)日：2020-05-19

申请号：US15966615

申请日：2018-04-30

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian Xu ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: B23Q1/34 ,  B23Q15/14 ,  G05B19/19 ,  G05B19/402

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US20190019736A1

公开(公告)日：2019-01-17

申请号：US16067693

申请日：2017-03-31

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Joel Schrauben ,  Jan Kleinert

IPC: H01L23/15 ,  H01L21/48 ,  H01L23/498

Abstract: A workpiece (100) having substrate, such as a glass substrate, can be etched by a laser or by other means to create recessed features (200, 202). A laser-induced forward transfer (LIFT) process or metal oxide printing process can be employed to impart a seed material (402), such as a metal, onto the glass substrate, especially into the recessed features (200, 202). The seeded recessed features can be plated, if desired, by conventional techniques, such as electroless plating, to provide conductive features (500) with predictable and better electrical properties. The workpieces (100) can be connected in a stacked such that subsequently stacked workpieces (100) can be modified in place.