公开(公告)号：US11185957B2

公开(公告)日：2021-11-30

申请号：US16854207

申请日：2020-04-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian Xu ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: G05B19/23 ,  B23Q15/14 ,  G05B19/19 ,  G05B19/402

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US09828277B2

公开(公告)日：2017-11-28

申请号：US13778950

申请日：2013-02-27

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin Zhang ,  Qian Xu

IPC: B23K26/00 ,  B23K26/02 ,  B23K26/08 ,  B60L1/02 ,  C03B33/02 ,  B23K26/40 ,  B23K103/00

CPC classification number: C03B33/0222 ,  B23K26/40 ,  B23K2103/50 ,  Y10T428/24479 ,  Y10T428/24488

Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.

公开(公告)号：US09610653B2

公开(公告)日：2017-04-04

申请号：US14032829

申请日：2013-09-20

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin Zhang ,  Fang Shan ,  Mathew Rekow ,  Min Zhang ,  Glenn Simenson ,  Qian Xu ,  James Brookhyser ,  Joe Frankel ,  Michael Darwin ,  Jack Rundel ,  Matthew Pysher

IPC: B23K26/00 ,  B23K26/16 ,  B23K26/36 ,  B23K26/364 ,  B23K103/00

CPC classification number: B23K26/364 ,  B23K26/0006 ,  B23K26/57 ,  B23K2103/50

Abstract: The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.

公开(公告)号：US10654141B2

公开(公告)日：2020-05-19

申请号：US15966615

申请日：2018-04-30

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian Xu ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: B23Q1/34 ,  B23Q15/14 ,  G05B19/19 ,  G05B19/402

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

公开(公告)号：US09828278B2

公开(公告)日：2017-11-28

申请号：US14094656

申请日：2013-12-02

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Haibin Zhang ,  Qian Xu

IPC: C03B33/02 ,  B23K26/38 ,  B23K26/40 ,  B23K26/00 ,  C03C23/00 ,  B23K26/06 ,  B23K26/364 ,  B23K26/082 ,  B23K26/0622 ,  B23K103/00

CPC classification number: C03B33/0222 ,  B23K26/0006 ,  B23K26/0604 ,  B23K26/0624 ,  B23K26/082 ,  B23K26/359 ,  B23K26/364 ,  B23K26/40 ,  B23K2103/50 ,  C03C23/0025 ,  Y10T428/24488

Abstract: Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.

公开(公告)号：US09981357B2

公开(公告)日：2018-05-29

申请号：US15188496

申请日：2016-06-21

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang Lu ,  Mehmet E. Alpay ,  Mike Tyler ,  Qian Xu ,  Jan Kleinert ,  Zhibin Lin ,  James D. Brookhyser ,  Ho Wai Lo ,  Kurt M. Eaton

IPC: G06F19/00 ,  G05B19/18 ,  B23Q15/14 ,  G05B19/402

CPC classification number: B23Q15/14 ,  G05B19/402 ,  G05B2219/34015 ,  G05B2219/50218

Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.