Check-valved silicon diaphragm pump and method of fabricating the same
    23.
    发明授权
    Check-valved silicon diaphragm pump and method of fabricating the same 有权
    检查阀硅隔膜泵及其制造方法

    公开(公告)号:US06334761B1

    公开(公告)日:2002-01-01

    申请号:US09517226

    申请日:2000-03-02

    IPC分类号: F04B1700

    摘要: A silicone rubber diaphragm pump utilizing a pair of MEMS Parylene check valves and a miniature solenoid plunger and actuator is comprised of a spacer sandwiched by a silicone rubber diaphragm on one side and a check valve support on the other. The check valves in the check valve support form the inlet and outlet to a pumping chamber defined between the check valve support and silicone rubber diaphragm. The pumping action has been demonstrated by driving the silicone diaphragm with the plunger using the solenoid type actuator to generate over and under pressures in the chamber. This forces the pumped medium into and out of the chamber, thus allowing the medium to be transported. Tubing or connectors affixed to the inlet and outlet ports of the check valve support structure allow for external fluidic access. The pump works with both gas and liquid.

    摘要翻译: 使用一对MEMS Parylene止回阀和微型电磁阀柱塞和致动器的硅橡胶隔膜泵由一侧上的硅橡胶隔膜和另一侧的止回阀支架夹持的间隔件组成。 止回阀支架中的止回阀形成在止回阀支撑件和硅橡胶隔膜之间限定的泵送室的入口和出口。 已经通过使用螺线管型致动器来驱动具有柱塞的硅树脂隔膜来产生泵送作用,以在腔室中产生过压和过压。 这迫使泵送的介质进出室,从而允许介质被输送。 固定在止回阀支撑结构的入口和出口上的管道或连接件允许进行外部流体通路。 泵与气体和液体一起使用。