公开(公告)号：US20210003776A1

公开(公告)日：2021-01-07

申请号：US16502667

申请日：2019-07-03

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/126

Abstract: One illustrative TE pass polarizer disclosed herein includes an input/output layer, a first buffer layer positioned above at least a portion of the input/output layer, a layer of epsilon-near-zero (ENZ) material positioned above at least a portion of the first buffer layer, and a metal-containing capping layer positioned above at least a portion of the layer of ENZ material.

公开(公告)号：US10816726B1

公开(公告)日：2020-10-27

申请号：US16549415

申请日：2019-08-23

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Bo Peng ,  Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Thomas Houghton ,  Asli Sahin

IPC: G02B6/34 ,  G02B6/122 ,  G02B6/38 ,  G02B6/36 ,  G02B6/30

Abstract: Structures for an edge coupler and methods of fabricating a structure for an edge coupler. A waveguide core and a coupler are formed over a layer stack that includes a first dielectric layer and a second dielectric layer over the first dielectric layer. The coupler includes a first plurality of grating structures and a transition structure including a second plurality of grating structures that are positioned between the first plurality of grating structures and the waveguide core. The first plurality of grating structures include respective widths that vary as a function of position relative to the transition structure.

公开(公告)号：US10747030B1

公开(公告)日：2020-08-18

申请号：US16597310

申请日：2019-10-09

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02F1/025 ,  G02F1/035

Abstract: Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. An electro-optic modulator is positioned proximate to a section of a waveguide core. The electro-optic modulator includes an active layer and a confinement layer. The active layer is composed of a first material, the confinement layer is composed of a second material with a different composition than the first material, the first material has a refractive index that is variable under an applied bias voltage, and the second material has a permittivity with an imaginary part that ranges from 0 to about 15.

公开(公告)号：US10746925B2

公开(公告)日：2020-08-18

申请号：US15878025

申请日：2018-01-23

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Ajey P. Jacob ,  Yusheng Bian

IPC: G02B5/18 ,  G02B6/124 ,  G02B6/136 ,  G02B6/132 ,  G02B6/30 ,  G02B6/12

Abstract: Grating couplers and methods of fabricating a grating coupler. The grating coupler may include a plurality of grating structures arranged on a substrate and a layer arranged over the grating structures. The grating structures are composed of a first material characterized by a first refractive index with a real part. The layer is composed of a second material characterized by a second refractive index with a real part. The real part of the second refractive index is greater than the real part of the first refractive index of the first material for electromagnetic radiation with a wavelength in a range of 1 micron to 9 microns.

公开(公告)号：US10649140B1

公开(公告)日：2020-05-12

申请号：US16291671

申请日：2019-03-04

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Abu Thomas

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13 ,  H01L23/528 ,  H01L23/532 ,  H01L23/522 ,  H01L21/768 ,  H01L21/311 ,  H01L21/3105 ,  H01L21/02

Abstract: Structures including a waveguide core and methods of fabricating a structure including a waveguide core. A back-end-of-line interconnect structure includes a cap layer, an interlayer dielectric layer, and one or more metal features embedded in the interlayer dielectric layer. The interlayer dielectric layer is stacked in a vertical direction with the cap layer. The one or more metal features have an overlapping arrangement in a lateral direction with the waveguide core, which is arranged under the back-end-of-line interconnect structure.

公开(公告)号：US20200124796A1

公开(公告)日：2020-04-23

申请号：US16165600

申请日：2018-10-19

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/136 ,  G02B6/122

Abstract: Structures that include a waveguide and methods of fabricating a structure that includes a waveguide. A first dielectric layer comprised of a first silicon nitride is formed. The waveguide is arranged over the first dielectric layer. A second dielectric layer is formed that is arranged over the waveguide. The second dielectric layer is composed of a second silicon nitride having a lower absorption of optical signals than the first silicon nitride.

公开(公告)号：US10436982B1

公开(公告)日：2019-10-08

申请号：US16038868

申请日：2018-07-18

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/12 ,  G02B6/125 ,  G02B6/13

Abstract: Structures including waveguide bends, methods of fabricating a structure that includes waveguide bends, and systems that integrate optical components containing different materials. A first waveguide bend is contiguous with a waveguide, and a second waveguide bend is spaced in a vertical direction from the first waveguide bend. The second waveguide bend has an overlapping arrangement with the first waveguide bend in a lateral direction.

公开(公告)号：US10429581B1

公开(公告)日：2019-10-01

申请号：US16189125

申请日：2018-11-13

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abu Thomas ,  Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/12 ,  G02B6/126 ,  G02B6/13 ,  G02B6/293

Abstract: Structures for a polarization splitter and methods of forming a polarization splitter. A multi-mode interference region includes a first waveguide and a second waveguide arranged in a stack over the first waveguide. First and second input ports are connected with the multi-mode interference region. First and second output ports are connected with the multi-mode interference region.

公开(公告)号：US10895689B2

公开(公告)日：2021-01-19

申请号：US16199811

申请日：2018-11-26

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B27/00 ,  G02B6/34 ,  G02B5/18

Abstract: Structures for a waveguide and methods of fabricating a structure for a waveguide. A grating coupler is formed that has an arrangement of grating structures. A conformal layer is arranged over the plurality of grating structures. The conformal layer is composed of a tunable material having a refractive index that changes with an applied voltage.

公开(公告)号：US10816872B1

公开(公告)日：2020-10-27

申请号：US16516658

申请日：2019-07-19

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02F1/313 ,  G02F1/295

Abstract: Structures for a grating coupler and methods of fabricating a structure for a grating coupler. The grating coupler includes a first plurality of grating structures and a second plurality of grating structures that alternate with the first plurality of grating structures in an interleaved arrangement. The first plurality of grating structures are composed of a dielectric material or a semiconductor material. The second plurality of grating structures are composed of a tunable material having a refractive index that changes with an applied voltage.