Contact lithography apparatus and method
    21.
    发明申请
    Contact lithography apparatus and method 失效
    接触光刻设备和方法

    公开(公告)号:US20080087636A1

    公开(公告)日:2008-04-17

    申请号:US11548823

    申请日:2006-10-12

    IPC分类号: B44C1/22 B29D11/00

    CPC分类号: G03F7/7035

    摘要: A contact lithography apparatus and a method use one or both of spacers and a mesa to facilitate pattern transfer. The apparatus and the method include one or both of a spacer that provides a spaced apart orientation of lithographic elements, such as a patterning tool and a substrate, when in mutual contact with the spacer and a mesa between the patterning tool and the substrate. The mesa supports a contact surface of one or both of the mold and the substrate. One or both of the spacers and the mesa may be non-uniform. One or more of the patterning tool, the substrate and the spacer is deformable, such that deformation thereof facilitates the pattern transfer.

    摘要翻译: 接触式光刻设备和方法使用间隔物和台面中的一个或两个以便于图案转印。 该装置和方法包括当与间隔物相互接触并且在图案形成工具和衬底之间的台面时提供间隔开的光刻元件取向的间隔物中的一个或两个,诸如图案形成工具和衬底。 台面支撑模具和基板之一或两者的接触表面。 间隔物和台面中的一个或两个可能是不均匀的。 图案形成工具,衬底和间隔件中的一个或多个可变形,使得其变形有利于图案转印。

    Pressure vessels having end closures and retainers
    23.
    发明授权
    Pressure vessels having end closures and retainers 失效
    具有端盖和保持器的压力容器

    公开(公告)号:US5357847A

    公开(公告)日:1994-10-25

    申请号:US686438

    申请日:1991-04-17

    申请人: Duncan R. Stewart

    发明人: Duncan R. Stewart

    IPC分类号: F15B15/14 F16B3/04 F01B29/00

    摘要: A fluid-pressure operated actuator has a body and an end cap which when telescoped in the body provides confronting grooves which receive a circlip in the form of a flexible length of wire spring. The end cap carries an O-ring seal axially only outwards of the circlip. Relative rotation between the body and end cap draws the circlip into position. A threaded plug, which may be secured to the outer end of the circlip, sealingly connects the body and end cap and may permit relative axial and angular movement.

    摘要翻译: 流体压力操作的致动器具有主体和端盖,当主体和端盖伸缩时,端盖提供面对的凹槽,其接收柔性长度的线弹簧形式的簧环。 端盖在轴向上仅承载弹簧圈的外侧。 主体和端盖之间的相对旋转将簧环拉到位置。 可以固定到簧环的外端的螺纹塞密封地连接主体和端盖,并且可以允许相对的轴向和角度运动。

    Fluid-pressure-operated actuators
    24.
    发明授权
    Fluid-pressure-operated actuators 失效
    流体压力执行器

    公开(公告)号:US4716815A

    公开(公告)日:1988-01-05

    申请号:US601447

    申请日:1984-04-18

    申请人: Duncan R. Stewart

    发明人: Duncan R. Stewart

    IPC分类号: F15B11/12 F15B11/08

    CPC分类号: F15B11/123

    摘要: A fluid-pressure-operated actuator is arranged to have three set positions and preferably a fail-safe characteristic in one of the three positions. In one embodiment an H-section piston moves in an actuator body and is set in its two extreme positions by fluid pressure introduced behind the web of the piston through one or other of spindles having heads and bores. To set the intermediate position, annular pistons can be moved along the spindles by pressure introduced at inlet pipes in the body until those pistons contact the heads of the spindles. The spindles are adjustable in the body to set the intermediate position of the piston and adjusting bolts set the extreme positions of the piston. For a fail-safe situation, a reservoir and control valve are introduced. As an alternative to annular pistons springs acting through top-hat shaped buffers can be used giving a fail-safe situation in the intermediate position of the piston.

    摘要翻译: 流体压力操作的致动器被布置成具有三个设定位置,并且优选地在三个位置之一中的故障安全特性。 在一个实施例中,H型活塞在致动器主体中移动,并且通过经由具有头部和孔的一个或另一个心轴引入到活塞腹板后面的流体压力而被设定在其两个极限位置。 为了设置中间位置,环形活塞可以通过在体内的入口管处引入的压力沿主轴移动,直到那些活塞接触心轴的头部。 主轴可在主体中调节以设定活塞的中间位置,调节螺栓设置活塞的极限位置。 对于故障安全的情况,引入了一个储存器和控制阀。 作为环形活塞的替代方案,可以使用通过顶帽形缓冲器作用的弹簧,从而在活塞的中间位置提供故障安全的情况。

    Fluid-pressure operated actuators
    25.
    发明授权
    Fluid-pressure operated actuators 失效
    流体压力执行器

    公开(公告)号:US4651627A

    公开(公告)日:1987-03-24

    申请号:US828565

    申请日:1986-02-10

    申请人: Duncan R. Stewart

    发明人: Duncan R. Stewart

    IPC分类号: F15B15/08 F15B15/24

    CPC分类号: F15B15/065

    摘要: A fluid-pressure operated actuator comprises a housing, at least one piston reciprocable in the housing, a rotatable output shaft having a portion thereof within the housing, means operatively connecting the piston and the output shaft, and stop means mounted on the housing and engageable with the shaft portion for limiting rotary movement of the shaft.

    摘要翻译: 流体压力操作的致动器包括壳体,至少一个可在壳体中往复运动的活塞,具有在壳体内的一部分的可旋转输出轴,可操作地连接活塞和输出轴的装置,以及安装在壳体上并可接合的止动装置 轴部分用于限制轴的旋转运动。