公开(公告)号：US20140346497A1

公开(公告)日：2014-11-27

申请号：US14256267

申请日：2014-04-18

Applicant: Japan Display Inc.

Inventor： Masato HIRAMATSU ,  Masayoshi Fuchi ,  Arichika Ishida

IPC: H01L29/786 ,  H01L29/66

CPC classification number: H01L29/7869 ,  H01L21/02164 ,  H01L21/02211 ,  H01L21/02214 ,  H01L21/02271 ,  H01L21/02565 ,  H01L21/0262 ,  H01L21/443 ,  H01L21/465 ,  H01L29/24 ,  H01L29/4908 ,  H01L29/66969 ,  H01L29/78696

Abstract: According to one embodiment, a thin-film transistor comprises an oxide semiconductor layer formed on a part of a substrate, a first gate insulator film of a silicon dioxide film formed on the oxide semiconductor layer and by the CVD method with a silane-based source gas, a second gate insulator film of a silicon dioxide film formed on the first gate insulator film by the CVD method with a TEOS source gas, and a gate electrode formed on the second gate insulator film.

Abstract translation: 根据一个实施例，薄膜晶体管包括形成在衬底的一部分上的氧化物半导体层，形成在氧化物半导体层上的二氧化硅膜的第一栅极绝缘膜和通过CVD法的硅烷基源 气体，通过CVD法用TEOS源气体形成在第一栅极绝缘膜上的二氧化硅膜的第二栅极绝缘膜，以及形成在第二栅极绝缘膜上的栅电极。