Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatus
    21.
    发明授权
    Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatus 有权
    暗场缺陷检查方法,暗场缺陷检查装置,像差分析方法和像差分析装置

    公开(公告)号:US08681328B2

    公开(公告)日:2014-03-25

    申请号:US13142328

    申请日:2010-01-20

    IPC分类号: G01N21/00

    摘要: By including an illumination system and a detection system, an information collecting function of monitoring an environment, such as temperature and atmospheric pressure, and an apparatus state managing function having a feedback function of comparing the monitoring result and a design value, a theoretical calculation value or an ideal value derived from simulation results and calibrating an apparatus so that the monitoring result is brought close to the ideal value, a unit for keeping the apparatus state and apparatus sensitivity constant is provided. A control unit 800 is configured to include a recording unit 801, a comparing unit 802, a sensitivity predicting unit 803, and a feedback control unit 804. In the comparing unit 802, the monitoring result transmitted from the recording unit 801 and an ideal value stored in a database 805 are compared with each other. When a difference between the ideal value and the monitoring result exceeds a predetermined threshold, the feedback control unit 804 corrects the illumination system and the detection system.

    摘要翻译: 通过包括照明系统和检测系统,监视诸如温度和大气压力之类的环境的信息收集功能,以及具有比较监视结果和设计值的反馈功能的设备状态管理功能,理论计算值 或者从模拟结果导出的理想值,并且对设备进行校准,使得监视结果接近理想值,提供用于保持设备状态和设备灵敏度恒定的单元。 控制单元800被配置为包括记录单元801,比较单元802,灵敏度预测单元803和反馈控制单元804.在比较单元802中,从记录单元801发送的监视结果和理想值 存储在数据库805中进行比较。 当理想值与监视结果之间的差异超过预定阈值时,反馈控制单元804校正照明系统和检测系统。

    Method and system for comprehensive management of chemical materials
    27.
    发明申请
    Method and system for comprehensive management of chemical materials 审中-公开
    化学材料综合管理方法与系统

    公开(公告)号:US20070061044A1

    公开(公告)日:2007-03-15

    申请号:US11599463

    申请日:2006-11-15

    IPC分类号: G05B21/00

    摘要: The present invention provides a method and system for management of chemical materials comprising providing a first data set containing which substances comprise the materials, providing a second data set containing which of the substances are to be controlled, the substances being categorized by a group control number, and providing a third data set containing a ratio of discharge of the controlled substances in a process and analyzing a preset amount of the materials in the process and determining a quantity of the controlled substances utilizing the first and second data sets, and determining an emissions quantity of the controlled substances utilizing the ratio and the quantity of the controlled substances and wherein the group control number is the same for the substances in the same group.

    摘要翻译: 本发明提供了一种用于管理化学材料的方法和系统,包括提供包含物质包括材料的第一数据集,提供包含要控制哪些物质的第二数据集,按组控制号分类的物质 并且提供包含处理中受控物质的排放比例的第三数据集,并且在该过程中分析预设量的材料并使用第一和第二数据集确定受控物质的量,并且确定排放 使用受控物质的比例和数量的受控物质的数量,其中组控制数对于同一组中的物质相同。

    Ultrasonic array sensor, ultrasonic inspection instrument and ultrasonic inspection method
    29.
    发明授权
    Ultrasonic array sensor, ultrasonic inspection instrument and ultrasonic inspection method 失效
    超声波阵列传感器,超声波检测仪器和超声波检测方法

    公开(公告)号:US06957583B2

    公开(公告)日:2005-10-25

    申请号:US10696564

    申请日:2003-10-30

    摘要: An ultrasonic inspection instrument for detecting a crack and performing sizing in the depth direction of the crack. By a transmitter element array and a receiver element array included in a common sensor, focus points between focused acoustic fields are electronically scanned in a range including a location where half the sum of the transmitting angle of ultrasonic waves to an inspection-target material and the receiving angle of diffraction echoes from the inspection-target material is 30 degrees, so that a tip portion of the crack is detected from the received diffraction echoes. Thus, the detectability of the ultrasonic inspection instrument for detecting diffraction waves in a subject to be inspected and performing crack inspection is stabilized and kept high.

    摘要翻译: 一种超声波检测仪,用于检测裂纹深度方向上的尺寸。 通过包含在公共传感器中的发射器元件阵列和接收器元件阵列,在聚焦声场之间的聚焦点在包括超声波的发射角的一半与检查对象材料的位置和 来自检查对象材料的衍射回波的接收角为30度,从而从接收的衍射回波检测裂纹的尖端部分。 因此,用于检测被检查物体和进行裂纹检查的被检体中的衍射波的超声波检查装置的检测稳定化,保持高。