公开(公告)号：US20120080772A1

公开(公告)日：2012-04-05

申请号：US13246065

申请日：2011-09-27

申请人： Kazushi Asami ,  Yasuhiro Kitamura

发明人： Kazushi Asami ,  Yasuhiro Kitamura

IPC分类号： H01L29/92 ,  H01L21/02

CPC分类号： H01L28/91 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/642 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a substrate, a first single conductor, a single insulator, and a second single conductor. The substrate includes first and second regions located adjacent to each other. The first region has blind holes, each of which has an opening on a front surface of the substrate. The second region has a through hole penetrating the substrate. A width of each blind hole is less than a width of the through hole. The first single conductor is formed on the front surface of the substrate in such a manner that an inner surface of each blind hole and an inner surface of the through hole are covered with the first single conductor. The single insulator is formed on the first single conductor. The second single conductor is formed on the single insulator and electrically insulated form the first single conductor.

摘要翻译： 半导体器件包括衬底，第一单导体，单绝缘体和第二单导体。 衬底包括彼此相邻定位的第一和第二区域。 第一区域具有盲孔，每个盲孔在基板的前表面上具有开口。 第二区域具有穿透基板的通孔。 每个盲孔的宽度小于通孔的宽度。 第一单导体形成在基板的前表面上，使得每个盲孔的内表面和通孔的内表面被第一单导体覆盖。 单个绝缘体形成在第一单个导体上。 第二单导体形成在单个绝缘体上并且电绝缘形成第一单导体。

公开(公告)号：US07900512B2

公开(公告)日：2011-03-08

申请号：US11878441

申请日：2007-07-24

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01P9/04

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

摘要翻译： 角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。 第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。 角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

公开(公告)号：US20110041605A1

公开(公告)日：2011-02-24

申请号：US12923971

申请日：2010-10-19

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01C19/56

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

公开(公告)号：US20110041604A1

公开(公告)日：2011-02-24

申请号：US12923970

申请日：2010-10-19

申请人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

发明人： Kazuhiko Kano ,  Akihiko Teshigahara ,  Kazuki Arakawa ,  Kazushi Asami

IPC分类号： G01C19/56

CPC分类号： G01C19/5698

摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

公开(公告)号：US6119518A

公开(公告)日：2000-09-19

申请号：US906044

申请日：1997-08-05

申请人： Takeshi Itou ,  Yasushi Matsuhiro ,  Muneo Yorinaga ,  Kazushi Asami ,  Yoshimi Yoshino ,  Kazuhiko Miura

发明人： Takeshi Itou ,  Yasushi Matsuhiro ,  Muneo Yorinaga ,  Kazushi Asami ,  Yoshimi Yoshino ,  Kazuhiko Miura

IPC分类号： G01C19/56 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/00

CPC分类号： G01C19/5607

摘要： An angular velocity sensor includes a tuning-fork oscillator having a pair of arms jointed by a trunk, the pair of arms extending in parallel to each other, first and second driving piezoelectric elements arranged only on one surface of the trunk with a gap therebetween in an extending direction of the arms, and angular velocity detecting piezoelectric elements arranged on surfaces of the arms in parallel with the one surface of the trunk on which the first and second piezoelectric elements are arranged.

摘要翻译： 角速度传感器包括音叉振荡器，该音叉具有一对臂，所述一对臂由主体连接，所述一对臂彼此平行地延伸，第一和第二驱动压电元件仅布置在躯干的一个表面上，其间具有间隙 臂的延伸方向以及布置在臂的表面上并与第一和第二压电元件布置在其上的主体的一个表面平行的角速度检测压电元件。