摘要:
A fluorine-containing polyether compound having the following general formula: (where R1 is a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or a phenyl group; X is a bromine atom or an iodine atom; l and m each are independently an integer of 10 or more; and l+m is 30-200) can be produced by reaction of a fluorine-containing dicarboxylic acid fluoride compound having the following general formula: (where l and m each are independently an integer of 10 or more, and l+m is 30-200) with an aromatic amine compound having the following general formula: [where R1 is a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or a phenyl group, R2 is a hydrogen atom or a group represented by the general formula —SiR3R4R5 (where R3, R4 and R5 each are independently an alkyl group having 1 to 10 carbon atoms or a phenyl group); and X is a bromine atom or an iodine atom] preferably in the presence of pyridine or a tertiary amine compound such as triethylamine, etc.
摘要:
A method by which generation of leak current can be suppressed and also a fine element can be formed by performing element isolation at a temperature at which a glass substrate can be used is provided. The method includes a first step of forming a base film over a glass substrate; a second step of forming a semiconductor film over the base film; a third step of forming, over the semiconductor film, a film preventing oxidation or nitridation of the semiconductor film into a predetermined pattern; and a fourth step of performing element isolation by radical oxidation or radical nitridation of a region of the semiconductor film, which is not covered with the predetermined pattern, at a temperature of the glass substrate lower than a strain point thereof by 100° C. or more, where radical oxidation or radical nitridation is performed over a semiconductor film placed apart from a plasma generation region, in a plasma treatment chamber with an electron temperature within the range of 0.5 to 1.5 eV, preferably less than or equal to 1.0 eV, and an electron density within the range of 1×1011cm−3 to 1×1013cm−3.
摘要翻译:提供了可以抑制漏电流的产生的方法,并且通过在可以使用玻璃基板的温度下进行元件隔离来形成微细元素。 该方法包括在玻璃基板上形成基膜的第一步骤; 在基膜上形成半导体膜的第二步骤; 在半导体膜上形成防止半导体膜氧化或氮化成预定图案的膜的第三步骤; 以及第四步骤,在比其应变点低100℃的玻璃基板的温度下,通过自由基氧化或自由基氮化未被该预定图案覆盖的半导体膜的区域进行元件隔离,或 在电离温度为0.5〜1.5eV,优选为1.0eV以下的等离子体处理室中,对离开等离子体产生区域的半导体膜进行自由基氧化或自由基氮化处理,以及 电子密度在1×10 11 cm -3至1×10 13 cm -3的范围内。
摘要:
A method by which generation of leak current can be suppressed and also a fine element can be formed by performing element isolation at a temperature at which a glass substrate can be used is provided. The method includes a first step of forming a base film over a glass substrate; a second step of forming a semiconductor film over the base film; a third step of forming, over the semiconductor film, a film preventing oxidation or nitridation of the semiconductor film into a predetermined pattern; and a fourth step of performing element isolation by radical oxidation or radical nitridation of a region of the semiconductor film, which is not covered with the predetermined pattern, at a temperature of the glass substrate lower than a strain point thereof by 100° C. or more, where radical oxidation or radical nitridation is performed over a semiconductor film placed apart from a plasma generation region, in a plasma treatment chamber with an electron temperature within the range of 0.5 to 1.5 eV, preferably less than or equal to 1.0 eV, and an electron density within the range of 1×1011cm−3 to 1×1013cm−3.
摘要:
A salicide process is conducted to a thin film integrated circuit without worrying about damages to a glass substrate, and thus, high-speed operation of a circuit can be achieved. A base metal film, an oxide and a base insulating film are formed over a glass substrate. A TFT having a sidewall is formed over the base insulating film, and a metal film is formed to cover the TFT. Annealing is conducted by RTA or the like at such a temperature that does not cause shrinkage of the substrate, and a high-resistant metal silicide layer is formed in source and drain regions. After removing an unreacted metal film, laser irradiation is conducted for the second annealing; therefore a silicide reaction proceeds and the high-resistant metal silicide layer becomes a low-resistant metal silicide layer. In the second annealing, a base metal film absorbs and accumulates heat of the laser irradiation, and a semiconductor layer is supplied with heat of the base metal film in addition to heat of the laser irradiation, thereby enhancing efficiency of the silicide reaction in the source and drain regions.
摘要:
A motor-driven compressor is formed integrally with a compressor device for compressing refrigerant and a motor for driving the compressor device. The motor-driven compressor includes a drive circuit and a plurality of cooling fins. The drive circuit controls the operation of the motor. The drive circuit is provided on an outer surface of a wall of a refrigerant suction route. The plurality of cooling fins are formed on an inner surface of the wall of the refrigerant suction route. In such motor-driven compressors, the drive circuit may be sufficiently cooled without using cooling devices. As a result, providing cooling devices with the drive circuit in motor-driven compressors is no longer necessary.
摘要:
Monoester monoacid fluoride of dicarboxylic acid is produced by allowing dicaroxylic acid fluoride represented by the following general formula: FOCCF(CF3)OCF2(A)p(CF2)qCOF where A is a bifunctional perfluorinated group having 1 to 10 carbon atoms; p is 0 or 1; and q is 0 or an integer of 1-10, to react with an alcohol having at least 3 carbon atoms, thereby esterifying the terminal CF2COF group. Such selective monoesterification reaction is effective for separation and purification of a dicarboxylic acid difluoride isomer mixture comprising symmetrical dicarboxylic acid difluoride and asymmetrical dicarboxylic acid difluoride.
摘要:
A scroll-type compressor includes a fixed scroll and an orbiting scroll each having an end plate and a spiral element. Each of the spiral elements interfits and form at least one pair of sealed-off fluid pockets. The fixed scroll is connected to a front housing. A driving mechanism includes a drive shaft rotatably supported by the front housing. A first and a second pin hole for aligning of the fixed scroll and the orbiting scroll are formed in an end surface of the spiral element of the fixed scroll and in an end surface of the front housing, respectively, and the first pin hole formed in the fixed scroll and the second pin hole formed in the front housing have different diameters. The configuration of the scroll-type fluid compressor according to this invention may be finely adjusted to align the fixed scroll and the orbiting scroll.
摘要:
A novel bisaminothiophenol compound represented by the following general formula: ##STR1## where Rf is a perfluoroalkylidene group having 1 to 10 carbon atoms, is used as a cross-linking agent for fluorine-containing elastomers having CN groups as cross-linkable groups.
摘要:
A fluorine-containing elastomer composition comprising a fluorine-containing elastomer having a cyano group as a cross-linkable group and a bisamidrazone compound represented by the following general formula as a vulcanizing agent: ##STR1## wherein Rf is one of the following groups:(CF.sub.2).sub.n, CFX(OCF.sub.2 CFX).sub.m O(CF.sub.2).sub.nandCFX(OCF.sub.2 CFX).sub.p O(CF.sub.2).sub.n O(CFXCF.sub.2 O).sub.q CFXhas considerably improved roll kneadability and processability during the vulcanization-molding, and gives vulcanization products having good heat resistance and solvent resistance.