公开(公告)号：US10601201B1

公开(公告)日：2020-03-24

申请号：US16288847

申请日：2019-02-28

Applicant: Mellanox Technologies, Ltd.

Inventor： Alexei Sirbu ,  Vladimir Iakovlev ,  Yuri Berk ,  Sylvie Rockman ,  Elad Mentovich

IPC: H01S5/42 ,  H01S5/183 ,  H01S5/00 ,  H01S5/02 ,  H01S5/022

Abstract: A vertical cavity surface emitting laser (VCSEL) array is provided. Each tunable VCSEL includes an output coupling mirror; a high reflectivity mirror; an active cavity material structure disposed between the output coupling mirror and the high reflectivity mirror; and a spacer layer disposed between the output coupling mirror and the active cavity material. A tuning cavity is defined within the spacer layer. Each VCSEL further includes a first contact pad and a second contact pad designed to receive a driving voltage; a tuning electrode on a first surface of the output coupling mirror for tuning the emission wavelength to a distinct wavelength.

公开(公告)号：US20190312413A1

公开(公告)日：2019-10-10

申请号：US15944955

申请日：2018-04-04

Applicant: Mellanox Technologies, Ltd.

Inventor： Alexei Sirbu ,  Vladimir Iakovlev ,  Yuri Berk ,  Elad Mentovich

IPC: H01S5/42 ,  H01S5/022 ,  H01S5/183 ,  H01S5/187 ,  H01S5/042 ,  H01S5/028 ,  H01S5/40 ,  H01S5/343

Abstract: A vertical-cavity surface-emitting laser (VCSEL), substrate emitting VCSEL, and multi-beam emitting device and corresponding manufacturing processes are provided. An example VCSEL comprises a substrate having a first surface and a second surface; an output coupling mirror disposed on the second surface of the substrate; a high reflectivity mirror; and an active cavity material structure disposed between the output coupling mirror and the high reflectivity mirror. The active cavity material structure comprises a first current-spreading layer, a second current-spreading layer, an active region disposed between the first current-spreading layer and the second current-spreading layer, and a tunnel junction overgrown by the second current spreading layer, wherein the tunnel junction is disposed adjacent the active region. The VCSEL is configured to emit radiation outward through the first surface of the substrate.