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公开(公告)号：US08359919B2
公开(公告)日：2013-01-29
申请号：US12855347
申请日：2010-08-12
CPC分类号： G01N27/18
摘要： Provided is a high-precision, mechanically robust thermal humidity sensor. A detecting element 1 of the thermal humidity sensor of the present invention has a diaphragm (a bridge structure) 2 formed on a planar substrate which is formed from a material with high thermal conductivity such as silicon or ceramic. Formed on the diaphragm 2 are temperature detecting resistors 4, 5, 6, and 7 and a heating resistor 3 arranged in a manner surrounding the temperature detecting resistors. Humidity is detected based on the outputs of the temperature detecting resistors 4, 5, 6, and 7. Accordingly, humidity measurement errors that can possibly occur due to the leakage of heat through the diaphragm 2 to the planar substrate can be reduced.
摘要翻译： 提供了一种高精度，机械坚固的热湿度传感器。 本发明的热湿度传感器的检测元件1具有形成在由诸如硅或陶瓷等导热性高的材料形成的平面基板上的隔膜（桥结构）2。 形成在隔膜2上的是温度检测电阻4,5,6和7以及围绕温度检测电阻器布置的加热电阻3。 基于温度检测电阻4,5,6和7的输出检测湿度。因此，可以减少由于通过隔膜2的热量泄漏到平面基板而可能发生的湿度测量误差。
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22.发明授权Disconnection detection circuit for bridge circuit and system including disconnection detecting means 有权用于桥接电路的断路检测电路和包括断线检测装置的系统公开(公告)号：US09229040B2
公开(公告)日：2016-01-05
申请号：US13806827
申请日：2011-06-21
CPC分类号： G01R31/02 , G01D3/08 , G01R31/026 , G01R31/2829
摘要： In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means.
摘要翻译： 在现有的桥接电路断路检测电路中，不考虑电桥输出的失调电压或温度特性劣化的事实。 提供一种用于桥接电路的断开检测电路，其能够最小程度地抑制传感器的特性变化。 根据本发明的用于桥接电路的断开检测电路8a包括导通装置9和10，每个导通装置9和10各自使电流从桥接电路的输出端流动到预定电位，电位差检测装置12和13各自 其检测桥电路的输出端的电位与预定电位之间的电位差;以及断开检测装置14，其基于电位差检测装置的输出来检测断开。
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公开(公告)号：US08689608B2
公开(公告)日：2014-04-08
申请号：US12973376
申请日：2010-12-20
IPC分类号： G01N25/18
CPC分类号： G01N25/18
摘要： The present invention provides a high-responsiveness and high-accuracy thermal gas sensor configured to enable gas to be analyzed based on a variation in heat conductivity. The thermal gas sensor includes a substrate 2 with a cavity portion 5, a thin-film support 6 stacked in the cavity portion and comprising a plurality of insulating layers 8a and 8b, and a first heating member 3 and a second heating member 4 both sandwiched between the insulating layers in the thin-film support. The second heating member is located around a periphery of the first heating member. The first heating member is controlled to a temperature higher than a temperature to which the second heating member is controlled. The concentration of ambient gas is measured based on power applied to the first heating member.
摘要翻译： 本发明提供了一种高响应性和高精度的热气传感器，其被配置为使得能够基于导热性的变化来分析气体。 热气体传感器包括：具有空腔部分5的基板2，层叠在空腔部分中的薄膜支撑体6，其包括多个绝缘层8a和8b;以及第二加热构件3和第二加热构件4， 在薄膜载体中的绝缘层之间。 第二加热构件位于第一加热构件的周边周围。 第一加热构件被控制到比第二加热构件被控制的温度高的温度。 环境气体的浓度基于施加到第一加热构件的功率被测量。
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24.发明申请Disconnection Detection Circuit for Bridge Circuit and System Including Disconnection Detecting Means 有权用于桥接电路和包括断路检测装置的系统的断路检测电路公开(公告)号：US20130093432A1
公开(公告)日：2013-04-18
申请号：US13806827
申请日：2011-06-21
IPC分类号： G01R31/02
CPC分类号： G01R31/02 , G01D3/08 , G01R31/026 , G01R31/2829
摘要： In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means.
摘要翻译： 在现有的桥接电路断路检测电路中，不考虑电桥输出的失调电压或温度特性劣化的事实。 提供一种用于桥接电路的断开检测电路，其能够最小程度地抑制传感器的特性变化。 根据本发明的用于桥接电路的断开检测电路8a包括导通装置9和10，每个导通装置9和10各自使电流从桥接电路的输出端流动到预定电位，电位差检测装置12和13各自 其检测桥电路的输出端的电位与预定电位之间的电位差;以及断开检测装置14，其基于电位差检测装置的输出来检测断开。
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公开(公告)号：US08203102B2
公开(公告)日：2012-06-19
申请号：US12724399
申请日：2010-03-15
IPC分类号： H05B1/01
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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公开(公告)号：US20060037390A1
公开(公告)日：2006-02-23
申请号：US11202017
申请日：2005-08-12
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F25/0007
摘要： A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1 of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.
摘要翻译： 提供一种热式空气流量计，其能够精确且容易地确定传感器元件是否为缺陷或通过筛选的缺陷。 在半导体衬底中形成由电绝缘膜构成的第一和第二隔膜部分。 在其上设置加热电阻器和进气温度传感器用电阻器，以获得用于热式空气流量计的传感器元件。 矩形第一隔膜部分的短边W 1的长度也与第二隔膜部分的短边长度基本相等。 因此，施加到每个隔膜部分的压力在筛选期间的加压中基本相同。
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公开(公告)号：US20080016959A1
公开(公告)日：2008-01-24
申请号：US11779128
申请日：2007-07-17
CPC分类号： G01F1/6842 , G01F1/6845
摘要： A thermal type flow sensor includes a base portion provided along the direction of a fluid flowing through a main passage, and a sensor element mounted on the base portion and having an exothermic resistor formed on a substrate for detecting the fluid flow rate. The base portion has a rectangular recessed portion in which the sensor element fixed so that the surface of the detecting portion of the sensor element is positioned lower than an upper edge of the recessed portion. A wall portion of the measuring passage facing the sensor element is constricted. The exothermic resistor is disposed along the fluid passage and spaced away from the upstream side upper edge of the recessed portion and cannot be substantially affected by a fluid flow disturbance due to a step portion formed between the upper edge of the recessed portion and the detecting portion surface.
摘要翻译： 热式流量传感器包括沿着流过主通道的流体的方向设置的基部，以及安装在基部上的传感器元件，并且具有形成在基板上的用于检测流体流速的放热电阻。 基部具有矩形凹部，传感器元件被固定成使得传感器元件的检测部分的表面位于比凹部的上边缘低的位置。 面向传感器元件的测量通道的壁部分被收缩。 放热电阻器沿着流体通道设置并且与凹部的上游侧上边缘隔开间隔开，并且不能由于在凹部的上边缘和检测部分之间形成的台阶部分而受到流体流动干扰的显着影响 表面。
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28.发明授权公开(公告)号：US08779337B2
公开(公告)日：2014-07-15
申请号：US13542426
申请日：2012-07-05
IPC分类号： B23K10/00
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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公开(公告)号：US08217320B2
公开(公告)日：2012-07-10
申请号：US11627111
申请日：2007-01-25
IPC分类号： H05B1/02
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
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公开(公告)号：US20100170335A1
公开(公告)日：2010-07-08
申请号：US12724399
申请日：2010-03-15
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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