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公开(公告)号:US20150152553A1
公开(公告)日:2015-06-04
申请号:US14410028
申请日:2013-05-31
Applicant: OSRAM OLED GMBH
Inventor: Michael Popp , Marc Philippens
IPC: C23C16/455 , H01L21/02 , C23C16/52
CPC classification number: C23C16/45544 , C23C16/4485 , C23C16/45525 , C23C16/45561 , C23C16/45589 , C23C16/52 , H01L21/0262
Abstract: An atomic layer deposition (ALD) coating system and a method for depositing an ALD layer in the system are disclosed. In an embodiment an ALD coating system includes a storage container for an organometallic starting material and a device having a control valve, a pressure gage, a pressure diaphragm and a first multiway valve, wherein the device is arranged downstream of the storage container, and wherein the first multiway valve is switchable between a process chamber and a collecting chamber.
Abstract translation: 公开了一种原子层沉积(ALD)涂覆系统和用于在系统中沉积ALD层的方法。 在一个实施方案中,ALD涂覆系统包括用于有机金属原料的储存容器和具有控制阀,压力表,压力隔膜和第一多通阀的装置,其中该装置设置在储存容器的下游,并且其中 第一多通阀可在处理室和收集室之间切换。
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公开(公告)号:US20150144901A1
公开(公告)日:2015-05-28
申请号:US14409054
申请日:2013-06-17
Applicant: OSRAM OLED GmbH
Inventor: Daniel Steffen Setz , Erwin Lang , Marc Philippens
IPC: H01L51/52
CPC classification number: H01L51/5268 , H01L51/5203 , H01L51/5215 , H01L51/5265
Abstract: An organic light-emitting diode includes a carrier substrate, a scattering layer, a first electrode, an organic layer sequence with at least one active layer, and a second electrode wherein all the components are arranged in the stated sequence, the scattering layer has a higher average refractive index than the organic layer sequence, the first electrode has at least n or at least n+1 non-metal layers and n metal layers, n is a natural number greater than or equal to 1 or greater than or equal to 2, and the non-metal layers and the metal layers succeed one another alternately.
Abstract translation: 有机发光二极管包括载体衬底,散射层,第一电极,具有至少一个有源层的有机层序列和其中所有组分按所述顺序排列的第二电极,散射层具有 比有机层序列高的平均折射率,第一电极具有至少n个或至少n + 1个非金属层和n个金属层,n是大于或等于1或大于或等于2的自然数 并且非金属层和金属层交替地相继成功。
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