公开(公告)号：US20170297910A1

公开(公告)日：2017-10-19

申请号：US15639203

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alfio RUSSO ,  Massimo Cataldo MAZZILLO ,  Ferenc NAGY

IPC: B81C1/00 ,  G01H3/06 ,  G01H9/00

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

公开(公告)号：US20160260861A1

公开(公告)日：2016-09-08

申请号：US14640663

申请日：2015-03-06

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo MAZZILLO ,  Antonella SCIUTO ,  Dario SUTERA

IPC: H01L31/101 ,  H01L31/108

CPC classification number: H01L31/1013 ,  H01L31/022416 ,  H01L31/028 ,  H01L31/035272 ,  H01L31/108 ,  H01L31/11 ,  H01L31/1812

Abstract: A photodiode structure is based on the use of a double junction sensitive to different wavelength bands based on a magnitude of a reverse bias applied to the photodiode. The monolithic integration of a sensor with double functionality in a single chip allows realization of a low cost ultra-compact sensing element in a single packaging useful in many applications which require simultaneous or spatially synchronized detection of optical photons in different spectral regions.

Abstract translation: 光电二极管结构基于对施加到光电二极管的反向偏压的幅度的不同波长带敏感的双结的使用。 在单个芯片中具有双重功能的传感器的单片集成允许在需要在不同光谱区域中同时或空间同步检测光子的许多应用中的单个封装中实现低成本超小型感测元件。