MEASUREMENT OPTICAL SYSTEM FOR METROLOGY INSPECTION AND METHOD OF MEASURING OVERLAY USING THE SAME

    公开(公告)号:US20250085642A1

    公开(公告)日:2025-03-13

    申请号:US18882312

    申请日:2024-09-11

    Abstract: A measurement optical system and an overlay measurement method using the same are provided. The measurement optical system includes: a light source configured to emit infrared light; a light splitter configured to reflect, from the light source and to a subject, a first portion of the infrared light incident to the light splitter; a photodetector on a same optical axis as the light splitter and configured to receive a second portion of the infrared light reflected from the subject; a first lens optical system between the light splitter and the photodetector; and a second lens optical system between the first lens optical system and the photodetector, wherein the subject may include an alignment key on which a meta key is provided.

    LiDAR DEVICE AND LiDAR SYSTEM INCLUDING THE SAME

    公开(公告)号:US20210181342A1

    公开(公告)日:2021-06-17

    申请号:US17039190

    申请日:2020-09-30

    Inventor: Changgyun SHIN

    Abstract: Provided is a light detection and ranging (LiDAR) device including a light emitter configured to emit light, a first light detector, and a second light detector, wherein the first light detector includes a first optical antenna element having a first directivity with respect to a first direction, and a first light detection element configured to detect first reflected light received by the first optical antenna element, wherein the second light detector includes a second optical antenna element having a second directivity with respect to a second direction different from the first direction, and a second light detection element configured to detect second reflected light received by the second optical antenna element.

    LiDAR APPARATUS USING INTERRUPTED CONTINUOUS WAVE LIGHT

    公开(公告)号:US20210173083A1

    公开(公告)日:2021-06-10

    申请号:US16886180

    申请日:2020-05-28

    Abstract: A light detection and ranging (LiDAR) apparatus capable of extracting speed information and distance information of objects in front thereof is provided. The LiDAR apparatus includes: a continuous wave light source configured to generate continuous wave light; a beam steering device configured to emit the continuous wave light to an object for a first time and stop emitting the continuous wave light to the object for a second time; a receiver configured to receive the continuous wave light that is reflected from the object to form a reception signal; and a signal processor configured to obtain distance information and speed information about the object based on the reception signal.

    IMAGE SENSOR INCLUDING NANOSTRUCTURE COLOR FILTER

    公开(公告)号:US20210028235A1

    公开(公告)日:2021-01-28

    申请号:US17071364

    申请日:2020-10-15

    Abstract: An image sensor includes a first light sensor layer including light sensing cells configured to sense first light of an incident light and generate electrical signals based on the sensed first light, and a color filter array layer disposed on the first light sensor layer, and including color filters respectively facing the light sensing cells. The image sensor further includes a second light sensor layer disposed on the color filter array layer, and configured to sense second light of the incident light and generate an electrical signal based on the sensed second light. Each of the color filters includes a nanostructure including a first material having a first refractive index, and a second material having a second refractive index greater than the first refractive index, the first material and the second material being alternately disposed with a period.

    BEAM SCANNING APPARATUS AND OPTICAL APPARATUS INCLUDING THE SAME

    公开(公告)号:US20190079367A1

    公开(公告)日:2019-03-14

    申请号:US16023641

    申请日:2018-06-29

    Abstract: A beam scanning apparatus and an optical apparatus including the same are provided. The beam scanning apparatus includes a first antenna group including a plurality of first nano antennas disposed apart from each other, a first driving voltage line and a second driving voltage line connected to a first nano antenna and a second nano antenna, respectively, among the plurality of first nano antennas, the first nano antenna and the second nano antenna being respectively disposed at first ends within the first antenna group, and a first voltage divider configured to distribute a plurality of first voltages to one or more first middle nano antennas disposed between the first nano antenna and the second nano antenna, among the plurality of first nano antennas, at regular voltage intervals.

    IMAGE SENSOR HAVING IMPROVED LIGHT UTILIZATION EFFICIENCY
    29.
    发明申请
    IMAGE SENSOR HAVING IMPROVED LIGHT UTILIZATION EFFICIENCY 有权
    具有改进的光利用效率的图像传感器

    公开(公告)号:US20150286059A1

    公开(公告)日:2015-10-08

    申请号:US14596585

    申请日:2015-01-14

    CPC classification number: G02B27/1013 G02B3/0006 G02B5/201 G02B5/26

    Abstract: At least one example embodiment discloses an image sensor with an improved light utilization efficiency based on reflective color filters. Since the image sensors may use most of an incident light for forming an image by using reflective color filters, light loss due to light absorption may be reduced. Therefore, light utilization efficiency of the image sensors may be improved while embodying color purity.

    Abstract translation: 至少一个示例性实施例公开了一种基于反射滤色器具有改进的光利用效率的图像传感器。 由于图像传感器可以使用大部分入射光来通过使用反射滤色器形成图像,所以可以减少由于光吸收引起的光损失。 因此,可以提高图像传感器的光利用效率,同时体现色纯度。

    OPTICAL DEVICE AND LIDAR DEVICE INCLUDING THE SAME

    公开(公告)号:US20250067852A1

    公开(公告)日:2025-02-27

    申请号:US18432391

    申请日:2024-02-05

    Abstract: An optical device according to various example embodiments includes a first waveguide including a first core, a second waveguide including a second core spaced apart from the first waveguide and having a refractive index less than that of the first core, and a third waveguide disposed between the first waveguide and the second waveguide and including a third core having a refractive index less than the refractive index of the first core and greater than the refractive index of the second core.

Patent Agency Ranking