公开(公告)号：US20090032799A1

公开(公告)日：2009-02-05

申请号：US12177114

申请日：2008-07-21

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: H01L33/00

CPC classification number: H01L33/24 ,  H01L33/10 ,  H01L33/20 ,  H01L33/32

Abstract: A light emitting device includes a substrate having a first surface and a second surface not parallel to the first surface, and a light emission layer disposed over the second surface to emit light. The light emission layer has a light emission surface which is not parallel to the first surface.

Abstract translation: 发光器件包括具有第一表面和不平行于第一表面的第二表面的衬底，以及设置在第二表面上以发光的发光层。 发光层具有不与第一面平行的发光面。

公开(公告)号：US07416908B2

公开(公告)日：2008-08-26

申请号：US11382630

申请日：2006-05-10

Applicant: Chii Guang Lee ,  Shaoher X. Pan ,  Hung Kwei Hu

Inventor： Chii Guang Lee ,  Shaoher X. Pan ,  Hung Kwei Hu

IPC: H01L21/00

CPC classification number: B81C1/00182 ,  B81B2201/042

Abstract: A method for fabricating a micro structure includes depositing a first layer of a first material over a substrate; patterning a first hard mask over the first layer; depositing a second layer of a second material over the first layer and the first hard mask; patterning a second hard mask over the second layer; and selectively removing the first material and the second material not covered by any of the first mask and the second mask to produce over the substrate the micro structure having a first structure portion having a first height and a second structure portion having a second height.

Abstract translation: 一种用于制造微结构的方法包括在衬底上沉积第一材料的第一层; 在第一层上构图第一硬掩模; 在所述第一层和所述第一硬掩模上沉积第二材料的第二层; 在第二层上图案化第二硬掩模; 以及选择性地去除所述第一掩模和所述第二掩模中未被所述第一掩模和所述第二掩模未覆盖的所述第一材料和所述第二材料，以在所述基板上产生具有第一高度的第一结构部分和具有第二高度的第二结构部分的所述微结构。

公开(公告)号：US07394586B2

公开(公告)日：2008-07-01

申请号：US11609861

申请日：2006-12-12

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G02B26/0833

Abstract: A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.

公开(公告)号：US20080144155A1

公开(公告)日：2008-06-19

申请号：US11610464

申请日：2006-12-13

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/058

Abstract: A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge includes a length longer than 1 micron, a thickness less than 500 nanometers, and a width less than 1000 nanometers. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position.

Abstract translation: 微镜装置包括由基板支撑的铰链和可围绕铰链倾斜的镜板。 铰链包括长度大于1微米，厚度小于500纳米，宽度小于1000纳米的长度。 当镜板倾斜离开倾斜位置时，铰链可以在镜板上产生弹性恢复力。

公开(公告)号：US07388707B2

公开(公告)日：2008-06-17

申请号：US11346803

申请日：2006-02-03

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror that includes a hinge member having a first end and a second end. The first end and second end is secured to the top surface of the first support post and the second support post, respectively. The hinge member and the support posts are completely hidden underneath the micro mirror.

Abstract translation: 用于提供高分辨率空间光调制器的方法和装置。 空间光调制器包括：单元，其包括：基板部分; 第一支撑柱和第二支撑柱，每个具有顶面; 以及包括具有第一端和第二端的铰链构件的微反射镜。 第一端部和第二端分别固定到第一支撑柱和第二支撑柱的顶表面。 铰链构件和支撑柱完全隐藏在微镜下面。

公开(公告)号：US20080122822A1

公开(公告)日：2008-05-29

申请号：US11557769

申请日：2006-11-08

Applicant: Shaoher X. Pan ,  Tore Nauta

Inventor： Shaoher X. Pan ,  Tore Nauta

IPC: G09G5/00

CPC classification number: G09G3/346 ,  G02B26/0841

Abstract: Methods for driving a plurality of MEMS devices in an apparatus are described. A voltage pulse is applied to an electrode or a structure portion of a MEMS device. The electrode is on the substrate underneath the structure portion. At least two MEMS devices of the plurality of MEMS devices have different threshold voltages, and the threshold voltage is the minimum voltage required to move the structure portion. A bias voltage is applied to whichever of the electrode or the structure portion of the MEMS device does not have the voltage pulse applied thereto. The bias voltage and the voltage pulse are capable of moving the structure portion of the MEMS device that has the higher threshold voltage of the different threshold voltages.

Abstract translation: 描述了在装置中驱动多个MEMS器件的方法。 电压脉冲施加到MEMS器件的电极或结构部分。 电极位于结构部分下方的基板上。 多个MEMS器件中的至少两个MEMS器件具有不同的阈值电压，阈值电压是移动结构部分所需的最小电压。 偏置电压施加到MEMS器件的电极或结构部分中的哪一个不具有施加到其上的电压脉冲。 偏置电压和电压脉冲能够移动具有不同阈值电压的较高阈值电压的MEMS器件的结构部分。

公开(公告)号：US20080116554A1

公开(公告)日：2008-05-22

申请号：US11562403

申请日：2006-11-21

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: H01L23/02 ,  H01L21/02

CPC classification number: B81B3/0005 ,  B81C1/00992 ,  B81C2201/0181 ,  B81C2201/112

Abstract: A method for applying anti-stiction material to a micro device includes encapsulating a micro device in a chamber, vaporizing anti-stiction material in a container to form vaporized anti-stiction material, transferring the vaporized anti-stiction material from the container to the chamber, and depositing the vaporized anti-stiction material on a surface of the micro device.

Abstract translation: 将抗静电材料施加到微型装置的方法包括将微型装置封装在室中，将容器内的抗静电材料蒸发以形成蒸发的抗静电材料，将蒸发的抗静电材料从容器转移到室 ，并将蒸发的抗静电材料沉积在微型装置的表面上。

公开(公告)号：US20070242344A1

公开(公告)日：2007-10-18

申请号：US11468225

申请日：2006-08-29

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00 ,  G09G3/00

CPC classification number: G02B26/0833 ,  G02B26/125

Abstract: A display system includes one or more rows of tiltable micro mirrors, each of which is configured to be selectively tilted to an “on” position to reflect incident light in an “on” direction and to be selectively tilted to an “off” position to reflect incident light in an “off” direction; an optical projection system configured to project light reflected by the micro mirrors in the “on” direction to produce one or more first lines of image pixels along a first direction in a display image and to change the direction of the light reflected by the micro mirrors in the “on” direction to produce one or more second lines of image pixels in the display image and a light source to produce the incident light. The one or more second lines of image pixels are substantially parallel to the one or more first lines of image pixels.

Abstract translation: 显示系统包括一排或多排可倾斜的微型反射镜，每一列可被配置为选择性地倾斜到“开”位置，以将入射光反射在“开”方向上并且被选择性地倾斜到“关”位置 将入射光反射到“偏离”方向; 光学投影系统，被配置为将由微反射镜反射的光以“在”方向投射以在显示图像中沿着第一方向产生一个或多个第一行图像像素，并且改变由微反射镜反射的光的方向 在“开”方向上，以在显示图像中产生一个或多个第二行图像像素，以及产生入射光的光源。 一个或多个第二行图像像素基本上平行于图像像素的一个或多个第一行。

公开(公告)号：US07167298B2

公开(公告)日：2007-01-23

申请号：US10974468

申请日：2004-10-26

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G02B26/0833

Abstract: A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.

Abstract translation: 通过将高有效反射区域填充率和非衍射微镜阵列与高静电效率和低表面粘附控制基板耦合来制造用于显示和印刷的高对比度空间光调制器。

公开(公告)号：US5775808A

公开(公告)日：1998-07-07

申请号：US703500

申请日：1996-08-27

Applicant: Shaoher X. Pan

Inventor： Shaoher X. Pan

IPC: G01K11/32 ,  G01K11/20

CPC classification number: G01K11/3213

Abstract: Apparatus having a plurality of temperature sensors (probes) positioned at a number of locations upon a platform such as a placebo or dummy wafer and a method of fabricating and using the apparatus. The temperature sensors are photoemissive temperature sensors. To fabricate each of the photoemissive sensors, a thermally conductive epoxy is placed in a mound at each sensor location upon the platform. Upon one side of this mound, a coating of phosphorous material is applied. One end of a fiber optic cable abuts the phosphor material, and a an encapsulation layer such as a polyimide tape is positioned atop the conductive epoxy and the fiber optic cable such that the fiber optic cable is maintained in a stationary position relative to the phosphor material to obtain a local temperature of the wafer surface.

Abstract translation: 具有位于诸如安慰剂或虚拟晶片的平台上的多个位置处的多个温度传感器（探针）的装置以及制造和使用该装置的方法。 温度传感器是光电温度传感器。 为了制造每个光发射传感器，导热环氧树脂被放置在平台上的每个传感器位置的墩中。 在该土堆的一侧，施加磷材料的涂层。 光纤电缆的一端与磷光体材料邻接，并​​且诸如聚酰亚胺带的封装层位于导电环氧树脂和光缆之上，使得光纤电缆相对于磷光体材料保持在静止位置 以获得晶片表面的局部温度。