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公开(公告)号：US20220180500A1
公开(公告)日：2022-06-09
申请号：US17601900
申请日：2019-04-17
Applicant: Shimadzu Corporation
Inventor： Koki YOSHIDA , Takahide HATAHORI , Kenji TAKUBO
Abstract: This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (3), an imaging unit (35), and a control unit (4) for generating a moving image (61) related to the propagation of an elastic wave of an inspection target (7). The control unit is configured to perform control to display an identified measurement inappropriate region (81) in such a manner as to be distinguishable from a measurement appropriate region (82) in which the vibration state has been correctly acquired in the moving image (61).
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公开(公告)号：US20220179196A1
公开(公告)日：2022-06-09
申请号：US17604246
申请日：2020-01-17
Applicant: Shimadzu Corporation
Inventor： Takahide HATAHORI , Kenji TAKUBO , Koki YOSHIDA
Abstract: This interference image imaging apparatus includes a first optical member (21) and a second optical member (22), and has a first portion (8) for transmitting a first bundle of rays (7) to change a direction of outgoing light with respect to incident light, and a second portion (10) for changing a phase of second bundle of rays (9) with respect to the first bundle of rays (7).
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公开(公告)号：US20180356205A1
公开(公告)日：2018-12-13
申请号：US16004966
申请日：2018-06-11
Applicant: SHIMADZU CORPORATION
Inventor： Takahide HATAHORI , Yuya NAGATA , Kenji TAKUBO
CPC classification number: G01B9/02095 , G01B9/02098 , G01N21/45 , G01N2021/458
Abstract: A defect detection method includes the following processes: a) stroboscopically illuminating the entire surface of an object within an examination area of the object while inducing a first elastic wave across the examination area on the object, and controlling the phase of the elastic wave and the timing of the stroboscopic illumination to collectively measure a back-and-forth displacement of each point within the examination area in at least three phases of the elastic wave; b) identifying a surface location which is the location of a defect on the examination area, based on the back-and-forth displacement of each point within the examination area in the at least three different phases; and c) injecting a second elastic wave into a region inside the surface location from a limited area including the surface location, and determining the location and/or size in the depth direction of the defect, based on a response wave.
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公开(公告)号：US20180283847A1
公开(公告)日：2018-10-04
申请号：US15938591
申请日：2018-03-28
Applicant: SHIMADZU CORPORATION
Inventor： Takahide HATAHORI , Yuya NAGATA , Kenji TAKUBO
CPC classification number: G01B9/02096 , G01B9/02098 , G01B11/2441 , G01M7/025 , G01N21/1717 , G01N21/45 , G01N21/8806 , G01N29/00 , G01N2021/1706 , G01N2021/8809 , G01N2201/0697
Abstract: A vibration measurement device includes: a vibration-inducing section; a laser source; a scanning section for illuminating a partial area of a measurement area on an object with laser light and moving the illumination area; an illumination control section for sequentially illuminating each point within the measurement area with an illuminating duration equal to or shorter than one third of the vibration period; a displacement measurement section for measuring, for each point within the measurement area, an interfering light obtained by splitting an object light from the object into two bundles of light to measure a relative displacement in a back-and-forth direction between two closely-located points within the measurement area; and a vibration state determination section for determining the state of vibration of the entire measurement area, based on the relative displacement in the back-and-forth direction between two closely-located points at each point within the measurement area.
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