公开(公告)号：US09234740B1

公开(公告)日：2016-01-12

申请号：US13593008

申请日：2012-08-23

Applicant: Morteza Safai ,  Kimberly D. Meredith

Inventor： Morteza Safai ,  Kimberly D. Meredith

IPC: G01B9/02

CPC classification number: G01B9/02098 ,  G01B9/02096

Abstract: A method and apparatus for inspection of an object. The apparatus comprises an array of light sources and a support structure. The array of light sources is configured to generate beams of coherent light with a substantially uniform distribution of the beams of coherent light in an area on a surface of an object in the area that results in a number of speckle patterns in light reflected from the surface of the object in the area in response to the beams of coherent light in the area. The support structure is associated with the array of light sources.

Abstract translation: 一种用于检查物体的方法和装置。 该装置包括光源阵列和支撑结构。 光源阵列被配置为产生相干光束，其中相干光束的大致均匀分布在区域中的物体表面上的区域中，导致从表面反射的光中的多个斑纹图案 响应于该区域中的相干光束而在该区域中的物体。 支撑结构与光源阵列有关。

公开(公告)号：US20140321734A1

公开(公告)日：2014-10-30

申请号：US14281255

申请日：2014-05-19

Applicant: Lyle G. Shirley

Inventor： Lyle G. Shirley

IPC: G01B11/25 ,  G06T7/00

CPC classification number: G01B9/02094 ,  A61B5/0077 ,  A61B5/117 ,  A61B2576/00 ,  G01B9/02004 ,  G01B9/02005 ,  G01B9/02069 ,  G01B9/02083 ,  G01B9/02096 ,  G01B11/14 ,  G01B11/2441 ,  G06F21/32 ,  G06K9/2018 ,  G06K9/629 ,  G06T7/521 ,  G06T7/55 ,  G06T2207/10152

Abstract: Disclosed are systems and methods to extract information about the size and shape of an object by observing variations of the radiation pattern caused by illuminating the object with coherent radiation sources and changing the wavelengths of the source. Sensing and image-reconstruction systems and methods are described for recovering the image of an object utilizing projected and transparent reference points and radiation sources such as tunable lasers. Sensing and image-reconstruction systems and methods are also described for rapid sensing of such radiation patterns. A computational system and method is also described for sensing and reconstructing the image from its autocorrelation. This computational approach uses the fact that the autocorrelation is the weighted sum of shifted copies of an image, where the shifts are obtained by sequentially placing each individual scattering cell of the object at the origin of the autocorrelation space.

Abstract translation: 公开了通过观察通过用相干辐射源照射物体并改变源的波长而引起的辐射图案的变化来提取关于物体的尺寸和形状的信息的系统和方法。 描述了感测和图像重建系统和方法，用于利用投影和透明的参考点和诸如可调谐激光器的辐射源来恢复对象的图像。 还描述了用于快速感测这种辐射图案的感测和图像重构系统和方法。 还描述了用于从其自相关感测和重建图像的计算系统和方法。 该计算方法使用自相关是图像的偏移副本的加权和的事实，其中通过将对象的每个单独散射单元顺序地放置在自相关空间的原点处来获得位移。

公开(公告)号：US08797515B2

公开(公告)日：2014-08-05

申请号：US13114238

申请日：2011-05-24

Applicant: Takashi Sugimoto

Inventor： Takashi Sugimoto

IPC: G01L1/24 ,  G01B11/24 ,  G01B11/30 ,  G01B11/02 ,  G01B9/02 ,  G01B11/16

CPC classification number: G01B9/02095 ,  G01B9/02032 ,  G01B9/02084 ,  G01B9/02096 ,  G01B11/162 ,  G01B2290/35 ,  G01N21/45 ,  G01N21/4788 ,  G01N2021/479

Abstract: An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.

Abstract translation: 能够以高精度和动态地使用斑点干涉来测量大变形的装置和方法利用光路，其中两个激光束中的一个激光束成为非准直光和平面平行的透明板，并且可以形成载体 边缘。 更具体地，透明板被布置在光路上，其中形成非准直光，或者从光路中去除，或者折射率，或布置在光路上的透明板的厚度，或倾斜 相对于光轴的角度发生变化。 相位分析可以从对应于变形的条纹图像中进行，通过重复执行上述的斑点干涉图案的处理和获取。

公开(公告)号：US06525824B1

公开(公告)日：2003-02-25

申请号：US09607548

申请日：2000-06-29

Applicant: Roman C. Gutierrez

Inventor： Roman C. Gutierrez

IPC: G01B902

CPC classification number: G01B9/0209 ,  G01B9/02019 ,  G01B9/02096 ,  G01B2290/70

Abstract: A dual beam interferometer device is disclosed that enables moving an optics module in a direction, which changes the path lengths of two beams of light. The two beams reflect off a surface of an object and generate different speckle patterns detected by an element, such as a camera. The camera detects a characteristic of the surface.

Abstract translation: 公开了一种双光束干涉仪装置，其能够沿改变两束光束的路径长度的方向移动光学模块。 两个光束从物体的表面反射并产生由元件（例如相机）检测到的不同散斑图案。 相机检测到表面的特性。

公开(公告)号：US4913547A

公开(公告)日：1990-04-03

申请号：US150380

申请日：1988-01-29

Applicant: Steven E. Moran

Inventor： Steven E. Moran

IPC: G01B9/02

CPC classification number: G01B9/02067 ,  G01B9/02096

Abstract: An optically phase-locked electronic speckle pattern interferometer mixes a local oscillator beam with a beam reflected from a target surface to create a speckle pattern at each of two separate image planes. The speckle pattern includes speckles whose intensities vary as a result of time-varying Doppler shifting of the reflected beam by movement or deformation of the target surface. The local oscillator beam is phase-locked to the Doppler signature of a lock-point speckle on one image plane. The phase-locking of the local oscillator beam to Doppler information of interest enables the interferometer to coherently detect speckle in the image plane sharing frequency, amplitude, and phase characteristics with the lock-point speckle, which supports the efficient processing of images obtained from the other image plane. The processing produces a contoured image of the target surface, with demarcation between coherently and non-coherently detected speckle.

Abstract translation: 光学锁相电子散斑图案干涉仪将本地振荡器光束与从目标表面反射的光束混合，以在两个分离的图像平面中的每一个处产生斑纹图案。 斑点图案包括由于目标表面的移动或变形引起的反射光束的时变多普勒偏移的结果，其强度变化的斑点。 本地振荡器波束在一个图像平面上被锁定到锁定斑点的多普勒特征。 将本地振荡器相位锁定到感兴趣的多普勒信息使得干涉仪可以在锁定点散斑共享频率，幅度和相位特性的图像平面中相干检测斑点，这支持了从 其他图像平面。 该处理产生目标表面的轮廓图像，在相干和非相干检测到的斑点之间具有划分。

公开(公告)号：US09372068B2

公开(公告)日：2016-06-21

申请号：US13711289

申请日：2012-12-11

Applicant: CANON KABUSHIKI KAISHA

Inventor： Akihiro Hatada ,  Yoshiyuki Kuramoto

IPC: G01B9/02 ,  G01B11/24

CPC classification number: G01B9/02096 ,  G01B9/02002 ,  G01B9/02007 ,  G01B9/02027 ,  G01B9/02061 ,  G01B9/02067 ,  G01B9/02068 ,  G01B9/02082 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/50 ,  G01B2290/70

Abstract: A measuring apparatus for measuring a position or a shape of a surface to be inspected includes a multi-wavelength interferometer and a control unit. The multi-wavelength interferometer includes an optical system that causes light to be inspected, which enters the surface to be inspected and is reflected by the surface to be inspected, and reference light to interfere with each other, a spectroscopic unit that divides interference light between the light to be inspected and the reference light into each wavelength, and a detector that detects the interference light and is provided for each divided interference light and an optical member that can adjust a position of a light guide portion that guides light from the spectroscopic unit to the detector. The control unit controls the optical member by using information related to inclination of the surface to be inspected to adjust the position of the light guide portion.

Abstract translation: 用于测量要检查的表面的位置或形状的测量装置包括多波长干涉仪和控制单元。 多波长干涉仪包括使得检查光的光学系统，其进入待检查的表面并被待检查的表面反射，并且参考光彼此干涉;分光单元，其将干涉光 要检查的光和参考光到每个波长，以及检测器，其检测干涉光并为每个分开的干涉光提供;以及光学部件，其可以调节导光部分的位置，导光部分引导来自分光单元的光 到检测器。 控制单元通过使用与要检查的表面的倾斜相关的信息来控制光学构件，以调整导光部的位置。

公开(公告)号：US08780182B2

公开(公告)日：2014-07-15

申请号：US12751298

申请日：2010-03-31

Applicant: Robert W. Byren

Inventor： Robert W. Byren

IPC: H04N13/02 ,  G06K9/00

CPC classification number: G01B11/24 ,  G01B9/02009 ,  G01B9/02096 ,  G06K9/00228 ,  G06K9/20

Abstract: A system for generating an image of contoured surface includes a light source that is configured to project an electromagnetic radiation beam onto the contoured surface, wherein the projected beam generates first radiation reflected from a first portion of the contoured surface to form a speckle pattern, and second radiation reflected from a second portion of the contoured surface which is substantially uniform in intensity. The reflected first and second reflected radiation is received by an optical detector, and may be processed. The processing is configured to (1) generate a plurality of images from the first and second reflected radiation, with each image being generated using different coherence length electromagnetic radiation from the light source, and (2) generate a 3-D image of the contoured surface from the plurality of images. Methods for generating a 3-D image of a contoured surface are also disclosed.

Abstract translation: 用于产生轮廓表面的图像的系统包括被配置为将电磁辐射束投影到轮廓表面上的光源，其中投影光束产生从轮廓表面的第一部分反射的第一辐射以形成散斑图案，以及 第二辐射从成形表面的第二部分反射，强度基本均匀。 反射的第一和第二反射辐射由光学检测器接收，并且可以被处理。 处理被配置为（1）从第一和第二反射辐射生成多个图像，其中使用来自光源的不同相干长度的电磁辐射来生成每个图像，以及（2）生成轮廓线的三维图像 表面。 还公开了用于生成轮廓表面的3D图像的方法。

公开(公告)号：US08265375B2

公开(公告)日：2012-09-11

申请号：US11764196

申请日：2007-06-16

Applicant: Lyle G. Shirley

Inventor： Lyle G. Shirley

IPC: G06K9/00 ,  G03B17/00 ,  G01B11/00 ,  G01B5/02

CPC classification number: G06T7/0057 ,  G01B9/02004 ,  G01B9/02069 ,  G01B9/02083 ,  G01B9/02096 ,  G06T7/521

Abstract: Disclosed are systems and methods to extract information about the size and shape of an object by observing variations of the radiation pattern caused by illuminating the object with coherent radiation sources and changing the wavelengths of the source. Sensing and image-reconstruction systems and methods are described for recovering the image of an object utilizing projected and transparent reference points and radiation sources such as tunable lasers. Sensing and image-reconstruction systems and methods are also described for rapid sensing of such radiation patterns. A computational system and method is also described for sensing and reconstructing the image from its autocorrelation. This computational approach uses the fact that the autocorrelation is the weighted sum of shifted copies of an image, where the shifts are obtained by sequentially placing each individual scattering cell of the object at the origin of the autocorrelation space. This computational approach reconstructs the image by eliminating all but one of these copies.

Abstract translation: 公开了通过观察通过用相干辐射源照射物体并改变源的波长而引起的辐射图案的变化来提取关于物体的尺寸和形状的信息的系统和方法。 描述了感测和图像重建系统和方法，用于利用投影和透明的参考点和诸如可调谐激光器的辐射源来恢复对象的图像。 还描述了用于快速感测这种辐射图案的感测和图像重构系统和方法。 还描述了用于从其自相关感测和重建图像的计算系统和方法。 该计算方法使用自相关是图像的偏移副本的加权和的事实，其中通过将对象的每个单独散射单元顺序地放置在自相关空间的原点处来获得偏移。 这种计算方法通过消除这些副本中的所有副本来重建图像。

公开(公告)号：US20110299064A1

公开(公告)日：2011-12-08

申请号：US13114238

申请日：2011-05-24

Applicant: Takashi Sugimoto

Inventor： Takashi Sugimoto

IPC: G01L1/24

CPC classification number: G01B9/02095 ,  G01B9/02032 ,  G01B9/02084 ,  G01B9/02096 ,  G01B11/162 ,  G01B2290/35 ,  G01N21/45 ,  G01N21/4788 ,  G01N2021/479

Abstract: An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.

Abstract translation: 能够以高精度和动态地使用斑点干涉来测量大变形的装置和方法利用光路，其中两个激光束中的一个激光束成为非准直光和平面平行的透明板，并且可以形成载体 边缘。 更具体地，透明板被布置在光路上，其中形成非准直光，或者从光路中去除，或者折射率，或布置在光路上的透明板的厚度，或倾斜 相对于光轴的角度发生变化。 相位分析可以从对应于变形的条纹图像中进行，通过重复执行上述的斑点干涉图案的处理和获取。

公开(公告)号：US06188482B1

公开(公告)日：2001-02-13

申请号：US09363494

申请日：1999-07-29

Applicant: Gary L. Cloud

Inventor： Gary L. Cloud

IPC: G01B902

CPC classification number: G01B9/0201 ,  G01B9/02007 ,  G01B9/02017 ,  G01B9/02095 ,  G01B9/02096 ,  G01B2290/70

Abstract: Presented is a speckle interferometer for measuring displacement of an optically irregular surface of a specimen having, a laser for producing a beam of coherent radiation, an adjustable polarizing beam splitter for dividing the radiation into a first portion of the radiation and into a second portion of the radiation. The reflected radiation is then passed through a pair of collimating lenses onto the optically rough surface of the specimen. The reflection off of the specimen is captured by an imaging system that processes the reflection to measure strains on the surface.

Abstract translation: 提出了一种用于测量具有用于产生相干辐射束的激光的样本的光学不规则表面的位移的散斑干涉仪，用于将辐射分成辐射的第一部分的可调节偏振分束器并且进入第二部分 辐射。 然后将反射的辐射通过一对准直透镜到样品的光学粗糙表面上。 通过成像系统捕获样品的反射，该成像系统处理反射以测量表面上的应变。