公开(公告)号：US20200212881A1

公开(公告)日：2020-07-02

申请号：US16235382

申请日：2018-12-28

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Bichoy BAHR ,  Ting-Ta YEN

IPC: H03H9/24 ,  H03B5/30 ,  H03H9/02 ,  H03H9/10 ,  H01L23/00

Abstract: An apparatus includes a microelectromechanical system (MEMS) die having a first surface and an opposing second surface. The MEMS die includes a surface-mounted resonator on the first surface and includes a first inductor. The apparatus also includes first and second dies. The first die has a third surface and an opposing fourth surface. The first die is coupled to the MEMS die such that the third surface of the first die faces the first surface of the MEMS die. The first and second surfaces are spaced apart. The first die includes an oscillator circuit and a second inductor. The oscillator circuit is coupled to the second inductor. The second inductor is inductively coupled to the first inductor. The second die is electrically coupled to the first die.

公开(公告)号：US20200076366A1

公开(公告)日：2020-03-05

申请号：US16114708

申请日：2018-08-28

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Bichoy BAHR ,  Baher HAROUN ,  Ting-Ta YEN ,  Ali KIAEI

IPC: H03B5/32 ,  H03H9/17 ,  H01L41/047 ,  H01L41/08

Abstract: A system includes a tunable bulk acoustic wave (BAW) resonator device and a direct-current (DC) tuning controller coupled to the tunable BAW resonator device. The system also includes an oscillator circuit coupled to the tunable BAW resonator device. The DC tuning controller selectively adjusts a DC tuning signal applied to the tunable BAW resonator device to adjust a signal frequency generated by the oscillator circuit.