公开(公告)号：US20160153764A1

公开(公告)日：2016-06-02

申请号：US14900111

申请日：2014-06-05

申请人： TSINGHUA UNIVERSITY

发明人： Yu ZHU ,  Leijie WANG ,  Ming ZHANG ,  Zhao LIU ,  Rong CHENG ,  Kaiming YANG ,  Dengfeng XU ,  Weinan YE ,  Li ZHANG ,  Yanpo ZHAO ,  Huichao QIN ,  Li TIAN ,  Jin ZHANG ,  Wensheng YIN ,  Haihua MU ,  Jinchun HU

IPC分类号： G01B9/02 ,  G01B11/14

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02021 ,  G01B9/02022 ,  G01B9/02027 ,  G01B11/14 ,  G01B2290/70

摘要： A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing spectroscope, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and even higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, etc., and is capable of improving the overall performances of an ultra-precision stage of a lithography machine as a position measurement system for this stage.

摘要翻译： 三自由度（自由度）外差光栅干涉仪位移测量系统包括双频激光器，光栅干涉仪，测量光栅，接收器和电子信号处理部件; 光栅干涉仪包括偏振光谱仪，参考光栅和折射元件; 测量系统基于光栅衍射，光学多普勒效应和光拍频率原理实现位移测量。 当光栅干涉仪和测量光栅执行三自由度线性相对运动时，系统可以输出三个线性位移。 测量系统可以达到亚纳米，甚至更高的分辨率和精度，并可同时测量三个线性位移。 该测量系统具有环境不敏感，测量精度高，体积小，重量轻等优点，能够提高作为位置测量系统的光刻机的超精密级的整体性能 在这个阶段