公开(公告)号：US06820632B2

公开(公告)日：2004-11-23

申请号：US10162552

申请日：2002-06-06

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

摘要翻译： 一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。 每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点处达到特定延迟时间At的设定流量Qs。 本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

公开(公告)号：US06422264B1

公开(公告)日：2002-07-23

申请号：US09734640

申请日：2000-12-13

申请人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

发明人： Tadahiro Ohmi ,  Satoshi Kagatsume ,  Kazuhiko Sugiyama ,  Yukio Minami ,  Kouji Nishino ,  Ryousuke Dohi ,  Katsunori Yonehana ,  Nobukazu Ikeda ,  Michio Yamaji ,  Jun Hirose ,  Kazuo Fukazawa ,  Hiroshi Koizumi ,  Hideki Nagaoka ,  Akihiro Morimoto ,  Tomio Uno ,  Eiji Ideta ,  Atsushi Matsumoto ,  Toyomi Uenoyama ,  Takashi Hirose

IPC分类号： G05D706

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

公开(公告)号：US06919056B2

公开(公告)日：2005-07-19

申请号：US09905209

申请日：2001-07-12

申请人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

发明人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Kenji Tubota ,  Teruo Honiden ,  Touru Hirai ,  Katunori Komehana ,  Keiji Hirao

IPC分类号： B01J8/02 ,  B01J10/00 ,  B01J12/00 ,  C01B5/00

CPC分类号： B01J12/007 ,  B01J2219/00058 ,  B01J2219/00087 ,  B01J2219/00096 ,  C01B5/00

摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, and the peeling off of the platinum coat catalyst layer inside are all prevented more completely to further increase the safety of the reactor for generating moisture, and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor has a reactor shell A with an interior space; a reflector on an inlet side facing a gas feed port in the interior space of the reactor; a reflector on an outlet side facing a moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on an inside wall of a reactor structural component on the outlet side. Hydrogen and oxygen fed into the interior space of the reactor react without combustion.

摘要翻译： 用于产生水分的反应器，其中充分点燃氢气，对气体供应源侧的回火以及铂涂层催化剂层内部的剥离都被更完全地防止，从而进一步提高了产生水分的反应器的安全性，并且其中 减少内部空间中的死空间以进一步减小反应器壳体的尺寸。 反应器具有内部空间的反应器壳体A; 在反应器的内部空间中的面向气体供给口的入口侧上的反射器; 出口侧的反射器，其面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8。 进入反应器内部空间的氢气和氧气反应而不燃烧。

公开(公告)号：US06622543B1

公开(公告)日：2003-09-23

申请号：US09979039

申请日：2001-11-15

申请人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Katunori Komehana ,  Teruo Honiden

发明人： Tadahiro Ohmi ,  Kouji Kawada ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Katunori Komehana ,  Teruo Honiden

IPC分类号： G01N2532

CPC分类号： G01N33/0013 ,  G01N25/32

摘要： A gas detection sensor permits precise measurement of the concentration of flammable gas in a detection or subject gas and the concentration of oxygen in a detection gas containing flammable gases. In the sensor, the heating of the sensor by contact catalytic reaction of flammable gas gives off a detection signal of the flammable gas. The gas detection sensor has a first detection sensor including a diaphragm having a platinum coat on a side which the flowing detection gas comes in contact with, and a thermocouple having respective ends of two different metals placed close to each other and fixed on the side of the diaphragm not coming in contact with the flowing detection gas and which is heated by the contact catalytic reaction of flammable gas. A second detection sensor similar to the first detection sensor detects the temperature of the flowing detection gas.

摘要翻译： 气体检测传感器允许精确测量检测或目标气体中的可燃气体的浓度以及含有易燃气体的检测气体中的氧浓度。 在传感器中，通过可燃气体的接触催化反应对传感器的加热产生可燃气体的检测信号。 气体检测传感器具有第一检测传感器，该第一检测传感器包括在流动检测气体接触的一侧上具有铂涂层的膜片，以及将彼此靠近并固定在两侧的两个不同金属的两端固定的热电偶 隔膜不会与流动的检测气体接触，并且被易燃气体的接触催化反应加热。 类似于第一检测传感器的第二检测传感器检测流动检测气体的温度。

公开(公告)号：US5791369A

公开(公告)日：1998-08-11

申请号：US812330

申请日：1997-03-05

申请人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

发明人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

IPC分类号： F16K17/22 ,  F16K31/02 ,  G05D7/06 ,  G05D16/20 ,  H01L21/3065 ,  E03B11/00

CPC分类号： G05D7/0635 ,  Y10T137/5109 ,  Y10T137/7737 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/777 ,  Y10T137/87917

摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.

摘要翻译： 用于控制流体流量的压力型流量控制装置（1）将孔口的上游侧压力P1保持在下游侧压力P2的大约两倍。 除了孔口形成构件（5）之外，装置还包括设置在孔口上游侧的控制阀（2），设置在控制阀和孔之间的压力检测器（3）和操作控制装置 6），用于从Qc = KP1（K为常数）的压力检测器的检测压力P1计算流量Qc，并将差作为流量指令信号Qs与计算出的流量Qc之间的控制信号Qy发出， 控制阀的驱动单元。 通过打开和关闭控制阀来调节孔口上游侧压力P1，从而控制孔口下游侧流速。

公开(公告)号：US5669408A

公开(公告)日：1997-09-23

申请号：US661181

申请日：1996-06-10

申请人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

发明人： Koji Nishino ,  Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Koji Kawada ,  Ryosuke Dohi ,  Hiroyuki Fukuda

IPC分类号： F16K17/22 ,  F16K31/02 ,  G05D7/06 ,  G05D16/20 ,  H01L21/3065 ,  F16K31/12

CPC分类号： G05D7/0635 ,  Y10T137/5109 ,  Y10T137/7737 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/777 ,  Y10T137/87917

摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.

摘要翻译： 用于控制流体流量的压力型流量控制装置（1）将孔口的上游侧压力P1保持在下游侧压力P2的大约两倍。 除了孔口形成构件（5）之外，装置还包括设置在孔口上游侧的控制阀（2），设置在控制阀和孔之间的压力检测器（3）和操作控制装置 6），用于从Qc = KP1（K为常数）的压力检测器的检测压力P1计算流量Qc，并将差作为流量指令信号Qs与计算出的流量Qc之间的控制信号Qy发出， 控制阀的驱动单元。 通过打开和关闭控制阀来调节孔口上游侧压力P1，从而控制孔口下游侧流速。

公开(公告)号：US08469046B2

公开(公告)日：2013-06-25

申请号：US12596395

申请日：2007-04-17

申请人： Yukio Minami ,  Keiji Hirao ,  Masaharu Taguchi ,  Toshiro Nariai ,  Koji Kawada ,  Akihiro Morimoto ,  Nobukazu Ikeda

发明人： Yukio Minami ,  Keiji Hirao ,  Masaharu Taguchi ,  Toshiro Nariai ,  Koji Kawada ,  Akihiro Morimoto ,  Nobukazu Ikeda

IPC分类号： F17D1/16

CPC分类号： C01B5/00 ,  Y10T137/0396

摘要： The method for parallel operation of moisture generating reactors according to the present invention operates so that an orifice, provided with an orifice hole having a predetermined opening diameter, is disposed on a mixed-gas inlet side of each of a plurality of moisture generating reactors connected in parallel with each other, and mixed gas G consisting of hydrogen and oxygen is supplied from a mixer to each of the moisture generating reactors through each orifice, and the flows of moisture generated by the moisture generating reactors are combined, and the resulting combined moisture is supplied to an apparatus that uses high-purity water. Thus, a need to increase the amount of high-purity water supply is met by allowing a plurality of moisture generating reactors to perform a parallel water generating operation by branching off a mixed gas consisting of H2 and O2 by using a simple orifice construction.

摘要翻译： 根据本发明的水分发生反应器的并联操作方法操作，使得设置有具有预定开口直径的孔眼的孔口设置在连接的多个水分发生反应器中的每一个的混合气体入口侧 并且由氢气和氧气组成的混合气体G通过每个孔口从混合器供给到每个水分发生反应器，并且由湿度发生反应器产生的水分流合并，并将所得的组合湿气 供应给使用高纯度水的设备。 因此，通过使用多个水分产生反应器通过使用简单的孔结构分支由H 2和O 2组成的混合气体来进行平行的水生成操作来满足增加高纯度供水量的需要。

公开(公告)号：US20100143239A1

公开(公告)日：2010-06-10

申请号：US12596395

申请日：2007-04-17

申请人： Yukio Minami ,  Keiji Hirao ,  Masaharu Taguchi ,  Toshiro Nariai ,  Koji Kawada ,  Akihiro Morimoto ,  Nobukazu Ikeda

发明人： Yukio Minami ,  Keiji Hirao ,  Masaharu Taguchi ,  Toshiro Nariai ,  Koji Kawada ,  Akihiro Morimoto ,  Nobukazu Ikeda

IPC分类号： C01B5/00

CPC分类号： C01B5/00 ,  Y10T137/0396

摘要： The method for parallel operation of moisture generating reactors according to the present invention operates so that an orifice, provided with an orifice hole having a predetermined opening diameter, is disposed on a mixed-gas inlet side of each of a plurality of moisture generating reactors connected in parallel with each other, and mixed gas G consisting of hydrogen and oxygen is supplied from a mixer to each of the moisture generating reactors through each orifice, and the flows of moisture generated by the moisture generating reactors are combined, and the resulting combined moisture is supplied to an apparatus that uses high-purity water. Thus, a need to increase the amount of high-purity water supply is met by allowing a plurality of moisture generating reactors to perform a parallel water generating operation by branching off a mixed gas consisting of H2 and O2 by using a simple orifice construction.

摘要翻译： 根据本发明的水分发生反应器的并联操作方法操作，使得设置有具有预定开口直径的孔眼的孔口设置在连接的多个水分发生反应器中的每一个的混合气体入口侧 并且由氢气和氧气组成的混合气体G通过每个孔口从混合器供给到每个水分发生反应器，并且由湿度发生反应器产生的水分流合并，并将所得的组合湿气 供应给使用高纯度水的设备。 因此，通过使用多个水分产生反应器通过使用简单的孔结构分支由H 2和O 2组成的混合气体来进行平行的水生成操作来满足增加高纯度供水量的需要。

公开(公告)号：US07935385B2

公开(公告)日：2011-05-03

申请号：US10646855

申请日：2003-08-21

申请人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

发明人： Tadahiro Ohmi ,  Yasuyuki Shirai ,  Nobukazu Ikeda ,  Eiji Ideta ,  Akihiro Morimoto ,  Tetsutaro Ogushi ,  Takehisa Konishi

IPC分类号： B05D3/02 ,  B05D3/04 ,  C25D5/50

CPC分类号： C23C8/02 ,  C23C26/00 ,  Y10T428/24322 ,  Y10T428/24355 ,  Y10T428/31678

摘要： The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.5 μm

摘要翻译： 本发明的目的是在不含任何金属材料的其它金属的氧化物膜的情况下，形成耐腐蚀性优异的氧化铬膜。 能够廉价且短时间地形成不含有其他金属的氧化物膜的耐腐蚀性优异的氧化铬钝化膜，能够提供安全的腐蚀性难以供给流体的流体供给系统。 本发明包括以下步骤：在涂覆表面的粗糙度（Ra）不大于1.5μm的金属材料上涂覆铬后，在氧化气氛中进行热处理，形成由氧化铬组成的钝化膜

公开(公告)号：US07472887B2

公开(公告)日：2009-01-06

申请号：US10545672

申请日：2004-02-09

申请人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Michio Yamaji ,  Masafumi Kitano ,  Akihiro Morimoto

发明人： Tadahiro Ohmi ,  Nobukazu Ikeda ,  Michio Yamaji ,  Masafumi Kitano ,  Akihiro Morimoto

IPC分类号： F16K7/17

CPC分类号： F16K7/14 ,  F16K27/003 ,  F16K51/02

摘要： The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent the corrosions, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of the gas.Specifically, the aluminum passivation is applied on the piping parts, i.e. the valve and others, used in the vacuum exhaustion system to inhibit the gas decomposition caused by the temperature rise at the time of the baking so that components for the reduction in the diameter size in the vacuum exhaustion system are provided. The corrosions, cloggings and seat leakages caused by the gas decomposition are prevented.

摘要翻译： 本发明提供一种阀，其能够减小用于真空排气系统的设备的真空排气管的直径，结果是降低成本，并且使真空耗尽时间短，并且还可以防止 由气体分解产生的物质的积聚引起的管道系统内的腐蚀，堵塞和密封泄漏。 具体地说，在真空耗尽系统中使用的管道部件即阀门等上施加铝钝化，以抑制由烘烤时的温度升高引起的气体分解，从而减小直径尺寸的部件 在真空耗尽系统中提供。 防止气体分解引起的腐蚀，堵塞和座椅泄漏。