公开(公告)号：US6166845A

公开(公告)日：2000-12-26

申请号：US317917

申请日：1999-05-25

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R13/34 ,  G01R1/07 ,  G01R13/40 ,  G02F1/03

CPC分类号： G01R1/071 ,  G01R13/347

摘要： The present invention relates to a probe for an electro-optic sampling oscillator.The probe for an electro-optic sampling oscillator provides a laser diode that generates a laser beam based on the control signal of the electro-optical sampling oscilloscope; a collimator lens that makes the laser beam into a parallel beam; an electro-optic element that has a reflecting film at the end; an isolator provided between the collimator lens and the electro-optic element that passes the laser beam that is generated by the laser diode and separates the reflected beam of the laser beam that was reflected by the reflecting film; photodiodes that convert the reflected beam separated by the isolator into an electrical signal; and a condenser lens provided between the isolator and the electro-optic element that condenses the parallel beam to one point on the reflecting film, makes the reflected beam reflected by the reflecting film into a parallel beam again, and makes the optical axes of the light incident on the reflecting film and the light reflected by the reflecting film coincide.

摘要翻译： 本发明涉及一种用于电光采样振荡器的探针。 用于电光采样振荡器的探针提供基于电光采样示波器的控制信号产生激光束的激光二极管; 使激光束成平行光束的准直透镜; 电光元件，其末端具有反射膜; 设置在准直透镜和电光元件之间的隔离器，其通过由激光二极管产生的激光束并分离由反射膜反射的激光束的反射光束; 将由隔离器分离的反射光束转换为电信号的光电二极管; 并且设置在隔离器和电光元件之间的聚光透镜，其将平行光束会聚到反射膜上的一个点，使得由反射膜反射的反射光束再次成为平行光束，并使光的光轴 入射到反射膜上并且由反射膜反射的光重合。

公开(公告)号：US20060263093A1

公开(公告)日：2006-11-23

申请号：US11496356

申请日：2006-07-31

申请人： Mitsuru Shinagawa ,  Haruka Kyuragi

发明人： Mitsuru Shinagawa ,  Haruka Kyuragi

IPC分类号： H04B10/00

CPC分类号： G01D21/00 ,  G06F1/163 ,  H04B13/005 ,  Y02D70/20

摘要： In a transceiver for inducing electric fields based on data to be transmitted in an electric field propagating medium and carrying out transmission and reception of data by using induced electric fields, having a transmission electrode and a transmission circuit, a transmission side switch is provided to disconnect the transmission circuit from the transmission electrode, when the transceiver is not in a transmission state in which the transmission circuit is supplying the transmission data to the transmission electrode.

公开(公告)号：US06388454B1

公开(公告)日：2002-05-14

申请号：US09452297

申请日：1999-11-30

申请人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01K31305

CPC分类号： G01R13/347

摘要： An electro-optic sampling prober is used to measure a waveform of a measured signal applied to wiring of an IC wafer. Herein, a laser radiates laser beams, which are supplied to an optical module containing an optical isolator and photodiodes by way of an optical fiber. Then, the laser beams pass through an optical wavelength filter to propagate through a prober unit. The laser beams are incident on an electro-optical element, which is changed in polarization state in response to an electric field being caused by the measured signal. The laser beams are reflected by a surface mirror of the electro-optical element, so that reflected beams propagate back through the prober unit and are returned to the optical module by way of the optical wavelength filter. During the measurement, a human operator watches an image of a selected portion of the IC wafer presently placed beneath the prober unit to adjust a positional relationship between the prober unit and IC wafer. The image is produced by an infrared camera equipped with a halogen lamp and a monitor. Incidentally, the optical wavelength filter has an optical characteristic such that a center wavelength in transmission of light coincides with a wavelength of the laser beams whose intensities are maximal, so it is possible to prevent components of light, which are not required for measurement, from being unnecessarily returned to the optical module, and it is possible to improve a S/N ratio in measurement.

摘要翻译： 电光采样探测器用于测量施加到IC晶片布线的测量信号的波形。 这里，激光照射通过光纤提供给包含光隔离器和光电二极管的光学模块的激光束。 然后，激光束通过光学波长滤光器，通过探测器单元传播。 激光束入射在电光元件上，该电光元件响应于由测量信号引起的电场而在偏振状态下改变。 激光束被电光元件的表面反射镜反射，使得反射光束通过探测器单元传播回来，并通过光学波长滤光器返回到光学模块。 在测量期间，人类操作者观察当前放置在探测器单元下方的IC晶片的选定部分的图像，以调整探针单元和IC晶片之间的位置关系。 该图像由配有卤素灯和监视器的红外摄像机产生。 顺便提及，光波长滤光器具有使光的透射中的中心波长与其强度最大的激光的波长一致的光学特性，因此可以防止测量不需要的光的分量 不必要地返回到光学模块，并且可以提高测量中的S / N比。

公开(公告)号：US06369562B2

公开(公告)日：2002-04-09

申请号：US09448525

申请日：1999-11-23

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： G01R13/347

摘要： An electro-optical probe used for an oscilloscope (e.g., electro-optic sampling oscilloscope) is mainly constructed by a probe head and a probe unit. The probe head contains a metal pin and an electro-optical element having a reflector at its terminal surface. The probe unit contains a reduced number of optical parts, which are arranged such that an optical axis of incoming beams of the electro-optical element differs from a optical axis of outgoing beams of the electro-optical element. That is, laser beams output form a laser diode are subjected to convergence by a converging lens to produce converged beams, which are incident on the electro-optical element as its incoming beams. The incoming beams are subjected to reflection by the reflector to produce reflected beams, which are output from the electro-optical element as its outgoing beams. Then, the reflected beams are converted to parallel beams by a collimator lens, or they are converged by a converging lens. A polarization detector performs separation on input beams from the lens to produce separated components of beams, optical axes of which differ from each other. Those components of beams are respectively supplied to photodiodes, wherein they are converted to electric signals. Thus, it is possible to measure a waveform of a measured signal based on differences between the electric signals, which reflect changes of polarization states of the beams in the electro-optical element.

摘要翻译： 用于示波器（例如电光采样示波器）的电光探头主要由探头和探头单元构成。 探头包含金属销和在其端子表面具有反射器的电光元件。 探针单元包含减少数量的光学部件，其被布置为使得电光元件的入射光束的光轴与电光元件的输出光束的光轴不同。 也就是说，由激光二极管输出的激光束通过会聚透镜进行会聚，以产生入射到作为入射光束的电光元件上的会聚光束。 入射光束被反射器反射以产生从电光元件作为其输出光束输出的反射光束。 然后，反射光束通过准直透镜转换为平行光束，或者它们被会聚透镜会聚。 偏振检测器执行从透镜的输入光束上的分离，以产生分离的光束分量，光轴彼此不同。 光束的这些分量分别提供给光电二极管，其中它们被转换成电信号。 因此，可以基于反映电光元件中的光束的偏振态的变化的电信号之间的差异来测量测量信号的波形。

公开(公告)号：US06337565B1

公开(公告)日：2002-01-08

申请号：US09520854

申请日：2000-03-07

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： H05K3/1216 ,  G01R1/071

摘要： An electro-optic probe having a laser diode for generating a laser beam based on a control signal from an oscilloscope body; a collimator lens for making the laser beam into a parallel beam; an electro-optic element having on an end face thereof a reflective coating, with optical characteristics which are changed by propagating an electrical field via a metal pin provided at the end face on the reflective coating side; an isolator provided between the collimator lens and the electro-optic element, which passes a laser beam generated by the laser diode and isolates a reflected beam which is reflected by the reflective coating; and photodiodes which convert the reflected beam isolated by the isolator into electrical signals. The electro-optic element is integrally affixed to a probe head which is rotatable with respect to a probe body on which the probe head is mounted.

摘要翻译： 一种具有激光二极管的电光探针，用于基于来自示波器主体的控制信号产生激光束; 用于使激光束成平行光束的准直透镜; 电光元件在其端面上具有反射涂层，光学特性通过经由设置在反射涂层侧的端面处的金属销传播电场而改变; 设置在准直透镜和电光元件之间的隔离器，其通过由激光二极管产生的激光束并隔离由反射涂层反射的反射光束; 以及将由隔离器隔离的反射光束转换成电信号的光电二极管。 电光元件整体固定在探针头上，该探针头可相对于其上安装有探头的探针主体旋转。

公开(公告)号：US06232765B1

公开(公告)日：2001-05-15

申请号：US09268136

申请日：1999-03-12

申请人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjo ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjo ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R1900

CPC分类号： G01R13/347

摘要： An electro-optic sampling oscilloscope (or EOS oscilloscope) is designed to perform measurement such that an electro-optic sampling probe (i.e., EOS probe) is brought into contact with a measured circuit. Optical pulses are input to the EOS probe, wherein they are varied in polarization states in response to the measured circuit. Then, an electric signal output from the EOS probe is amplified to produce a receiving light signal. The receiving light signal is subjected to sampling operations using a first pulse signal to produce detection data, while it is also subjected to sampling operations using a second pulse signal to produce noise data. Herein, the first pulse signal consists of pulses which emerge in synchronization with the optical pulses respectively, while the second pulse signal delays from the first pulse signal by a prescribed delay time. Then, measurement data are produced by subtracting the noise data from the detection data. The measurement data are processed so that a measured waveform representing a measurement result is displayed on a screen of the EOS oscilloscope. Thus, it is possible to obtain the measured waveform with high precision and a good S/N ratio by eliminating low-frequency noise components from the measurement results.

摘要翻译： 电光采样示波器（或EOS示波器）被设计为执行测量，使得电光采样探针（即EOS探针）与被测电路接触。 光脉冲输入到EOS探头，响应于测量的电路，它们在极化状态下变化。 然后，从EOS探头输出的电信号被放大以产生接收光信号。 使用第一脉冲信号对接收光信号进行采样操作，以产生检测数据，同时还使用第二脉冲信号进行采样操作以产生噪声数据。 这里，第一脉冲信号由分别与光脉冲同步出现的脉冲组成，而第二脉冲信号从第一脉冲信号延迟规定的延迟时间。 然后，通过从检测数据中减去噪声数据来产生测量数据。 处理测量数据，使得表示测量结果的测量波形显示在EOS示波器的屏幕​​上。 因此，通过从测量结果中消除低频噪声分量，可以获得高精度和良好S / N比的测量波形。

公开(公告)号：US06683447B1

公开(公告)日：2004-01-27

申请号：US09167302

申请日：1998-10-06

申请人： Yoshiki Yanagisawa ,  Nobuaki Takeuchi ,  Jun Kikuchi ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Kazuyoshi Matsuhiro

发明人： Yoshiki Yanagisawa ,  Nobuaki Takeuchi ,  Jun Kikuchi ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Kazuyoshi Matsuhiro

IPC分类号： G01R1900

CPC分类号： G01R13/34

摘要： An electro-optic sampling apparatus is provided to enable measurement on potentials of signals on the conductor of coaxial cable with high precision and with ease. Herein, an electric input connector inputs a measured electric signal, which is introduced to a conductive path such as a microstrip line. An electro-optic material (e.g., Bi12SiO20) that provides electro-optic effect such as Pockel's effect is fixed to a bare portion of the conductive path and is varied in birefringence ratio in response to strength of electric field caused by the conductive path through which the measured electric signal transmits. The conductive path is then terminated by a terminal device. Now, a laser beam is radiated toward the electro-optic material, wherein it is varied in polarization in response to variations of the birefringence ratio. Then, the laser beam is reflected by a dielectric mirror and is separated into two beams by a polarization beam splitter. Photodiodes are provided to convert the two beams to electric signals representing potentials. Thus, the apparatus measures voltage of the measured electric signal based on the electric signals.

摘要翻译： 提供了一种电光采样装置，可以高精度和容易地测量同轴电缆导体上的信号电位。 这里，电输入连接器输入被测量的电信号，其被引入诸如微带线的导电路径。 提供诸如Pockel效应之类的电光效应的电光材料（例如，Bi12SiO20）被固定在导电路径的裸露部分，并且响应于由导电路径引起的电场强度而在双折射率方面发生变化 测得的电信号传输。 导电路径然后由终端设备终止。 现在，激光束朝向电光材料辐射，其中响应于双折射率的变化，它在极化方面变化。 然后，激光束被介电镜反射，并通过偏振分束器分离成两束光束。 提供光电二极管以将两个光束转换为表示电位的电信号。 因此，该装置基于电信号测量测量的电信号的电压。

公开(公告)号：US06342783B1

公开(公告)日：2002-01-29

申请号：US09416504

申请日：1999-10-08

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： G01R1/071

摘要： An electrooptic probe which can facilitate replacement of a metallic pin. A probe head constituting a tip end portion of a probe body including a head body for retaining an electrooptic element and a tip member detachably provided on the head body for retaining the metallic pin.

摘要翻译： 电光探头，可以方便更换金属销。 构成探头主体的前端部的探头，其包括用于保持电光元件的头本体和可拆卸地设置在头本体上用于保持金属销的尖端构件。

公开(公告)号：US06288529B1

公开(公告)日：2001-09-11

申请号：US09323942

申请日：1999-06-02

申请人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjou ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjou ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R2316

CPC分类号： G01R13/347 ,  G01R13/32

摘要： The present invention relates to an electro-optic sampling oscilloscope. This electro-optic sampling oscilloscope carries out measurement of measured signal by using an optical pulse generated based on a timing signal generated from a timing generation circuit synchronous with a trigger signal, providing: a timing generation circuit comprising a fast ramp circuit that outputs a ramp waveform using said trigger signal as a trigger, a slow ramp circuit that increases stepwise and sequentially the output value according to said timing signal; a comparator circuit that compares the output of said fast ramp circuit and the output of said slow ramp circuit and outputs the results of this comparison; and a gate circuit that limits the output of said comparator circuit by closing a gate only when the output of said comparator circuit is unstable based on the input trigger signal and timing signal.

摘要翻译： 本发明涉及一种电光采样示波器。该电光采样示波器通过使用基于由与触发信号同步的定时产生电路产生的定时信号产生的光脉冲来执行测量信号的测量，提供： 定时生成电路，包括使用所述触发信号作为触发输出斜坡波形的快速斜坡电路，根据所述定时信号逐步依次增加输出值的慢斜坡电路; 比较电路，比较所述快速斜坡电路的输出和所述慢斜波电路的输出，并输出该比较的结果; 以及门电路，其仅在所述比较器电路的输出基于输入触发信号和定时信号不稳定时闭合栅极来限制所述比较器电路的输出。

公开(公告)号：US5543723A

公开(公告)日：1996-08-06

申请号：US103198

申请日：1993-09-24

申请人： Mitsuru Shinagawa ,  Tadao Nagatsuma

发明人： Mitsuru Shinagawa ,  Tadao Nagatsuma

IPC分类号： G01R31/311 ,  G01R29/12

CPC分类号： G01R31/311

摘要： A method and an apparatus for electro-optic sampling measurement of electrical signals in integrated circuits, capable of improving the reproducibility of the measurements and calibrating the voltage accurately. The changes of beam intensity of a laser beam reflected from an electro-optic probe is measured by using a low frequency signal of a known voltage level to determine a relationship between the changes of beam intensity and gaps between the electro-optic probe and the integrated circuit, then a proportionality of the change of beam intensity and an absolute voltage level for a desired gap is determined according to the determined relationship. Then, the change of beam of intensity at a desired measurement position with a desired gap is measured by using a high frequency signal and the absolute voltage level of the high frequency signal is determined according to the measured change of beam intensity and the determined proportionality. The electro-optic probe is positioned by first bringing the electro-optic probe into a contact with the integrated circuit to detect a contact position, and then moving the electro-optic probe away from the integrated circuit to provide a desired gap with respect to the detected contact position regarded as a reference point.

摘要翻译： 一种用于集成电路中电信号电光采样测量的方法和装置，其能够提高测量的再现性并准确地校准电压。 通过使用已知电压电平的低频信号来测量从电光探头反射的激光束的光束强度的变化，以确定光束强度的变化与电光探头与集成的电光探针之间的间隙之间的关系 然后根据确定的关系确定波束强度变化和所需间隙的绝对电压电平的比例。 然后，通过使用高频信号测量具有期望间隙的期望测量位置处的强度光束的变化，并且根据测量的光束强度的变化和所确定的比例来确定高频信号的绝对电压电平。 通过首先将电光探头与集成电路接触以检测接触位置，然后将电光探头移离集成电路，以提供相对于该电光探针的期望间隙，来定位电光探头 检测到的接触位置被认为是参考点。