公开(公告)号：US06388454B1

公开(公告)日：2002-05-14

申请号：US09452297

申请日：1999-11-30

申请人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Fumio Akikuni ,  Katsushi Ohta ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01K31305

CPC分类号： G01R13/347

摘要： An electro-optic sampling prober is used to measure a waveform of a measured signal applied to wiring of an IC wafer. Herein, a laser radiates laser beams, which are supplied to an optical module containing an optical isolator and photodiodes by way of an optical fiber. Then, the laser beams pass through an optical wavelength filter to propagate through a prober unit. The laser beams are incident on an electro-optical element, which is changed in polarization state in response to an electric field being caused by the measured signal. The laser beams are reflected by a surface mirror of the electro-optical element, so that reflected beams propagate back through the prober unit and are returned to the optical module by way of the optical wavelength filter. During the measurement, a human operator watches an image of a selected portion of the IC wafer presently placed beneath the prober unit to adjust a positional relationship between the prober unit and IC wafer. The image is produced by an infrared camera equipped with a halogen lamp and a monitor. Incidentally, the optical wavelength filter has an optical characteristic such that a center wavelength in transmission of light coincides with a wavelength of the laser beams whose intensities are maximal, so it is possible to prevent components of light, which are not required for measurement, from being unnecessarily returned to the optical module, and it is possible to improve a S/N ratio in measurement.

摘要翻译： 电光采样探测器用于测量施加到IC晶片布线的测量信号的波形。 这里，激光照射通过光纤提供给包含光隔离器和光电二极管的光学模块的激光束。 然后，激光束通过光学波长滤光器，通过探测器单元传播。 激光束入射在电光元件上，该电光元件响应于由测量信号引起的电场而在偏振状态下改变。 激光束被电光元件的表面反射镜反射，使得反射光束通过探测器单元传播回来，并通过光学波长滤光器返回到光学模块。 在测量期间，人类操作者观察当前放置在探测器单元下方的IC晶片的选定部分的图像，以调整探针单元和IC晶片之间的位置关系。 该图像由配有卤素灯和监视器的红外摄像机产生。 顺便提及，光波长滤光器具有使光的透射中的中心波长与其强度最大的激光的波长一致的光学特性，因此可以防止测量不需要的光的分量 不必要地返回到光学模块，并且可以提高测量中的S / N比。

公开(公告)号：US06369562B2

公开(公告)日：2002-04-09

申请号：US09448525

申请日：1999-11-23

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： G01R13/347

摘要： An electro-optical probe used for an oscilloscope (e.g., electro-optic sampling oscilloscope) is mainly constructed by a probe head and a probe unit. The probe head contains a metal pin and an electro-optical element having a reflector at its terminal surface. The probe unit contains a reduced number of optical parts, which are arranged such that an optical axis of incoming beams of the electro-optical element differs from a optical axis of outgoing beams of the electro-optical element. That is, laser beams output form a laser diode are subjected to convergence by a converging lens to produce converged beams, which are incident on the electro-optical element as its incoming beams. The incoming beams are subjected to reflection by the reflector to produce reflected beams, which are output from the electro-optical element as its outgoing beams. Then, the reflected beams are converted to parallel beams by a collimator lens, or they are converged by a converging lens. A polarization detector performs separation on input beams from the lens to produce separated components of beams, optical axes of which differ from each other. Those components of beams are respectively supplied to photodiodes, wherein they are converted to electric signals. Thus, it is possible to measure a waveform of a measured signal based on differences between the electric signals, which reflect changes of polarization states of the beams in the electro-optical element.

摘要翻译： 用于示波器（例如电光采样示波器）的电光探头主要由探头和探头单元构成。 探头包含金属销和在其端子表面具有反射器的电光元件。 探针单元包含减少数量的光学部件，其被布置为使得电光元件的入射光束的光轴与电光元件的输出光束的光轴不同。 也就是说，由激光二极管输出的激光束通过会聚透镜进行会聚，以产生入射到作为入射光束的电光元件上的会聚光束。 入射光束被反射器反射以产生从电光元件作为其输出光束输出的反射光束。 然后，反射光束通过准直透镜转换为平行光束，或者它们被会聚透镜会聚。 偏振检测器执行从透镜的输入光束上的分离，以产生分离的光束分量，光轴彼此不同。 光束的这些分量分别提供给光电二极管，其中它们被转换成电信号。 因此，可以基于反映电光元件中的光束的偏振态的变化的电信号之间的差异来测量测量信号的波形。

公开(公告)号：US06337565B1

公开(公告)日：2002-01-08

申请号：US09520854

申请日：2000-03-07

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： H05K3/1216 ,  G01R1/071

摘要： An electro-optic probe having a laser diode for generating a laser beam based on a control signal from an oscilloscope body; a collimator lens for making the laser beam into a parallel beam; an electro-optic element having on an end face thereof a reflective coating, with optical characteristics which are changed by propagating an electrical field via a metal pin provided at the end face on the reflective coating side; an isolator provided between the collimator lens and the electro-optic element, which passes a laser beam generated by the laser diode and isolates a reflected beam which is reflected by the reflective coating; and photodiodes which convert the reflected beam isolated by the isolator into electrical signals. The electro-optic element is integrally affixed to a probe head which is rotatable with respect to a probe body on which the probe head is mounted.

摘要翻译： 一种具有激光二极管的电光探针，用于基于来自示波器主体的控制信号产生激光束; 用于使激光束成平行光束的准直透镜; 电光元件在其端面上具有反射涂层，光学特性通过经由设置在反射涂层侧的端面处的金属销传播电场而改变; 设置在准直透镜和电光元件之间的隔离器，其通过由激光二极管产生的激光束并隔离由反射涂层反射的反射光束; 以及将由隔离器隔离的反射光束转换成电信号的光电二极管。 电光元件整体固定在探针头上，该探针头可相对于其上安装有探头的探针主体旋转。

公开(公告)号：US06232765B1

公开(公告)日：2001-05-15

申请号：US09268136

申请日：1999-03-12

申请人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjo ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjo ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R1900

CPC分类号： G01R13/347

摘要： An electro-optic sampling oscilloscope (or EOS oscilloscope) is designed to perform measurement such that an electro-optic sampling probe (i.e., EOS probe) is brought into contact with a measured circuit. Optical pulses are input to the EOS probe, wherein they are varied in polarization states in response to the measured circuit. Then, an electric signal output from the EOS probe is amplified to produce a receiving light signal. The receiving light signal is subjected to sampling operations using a first pulse signal to produce detection data, while it is also subjected to sampling operations using a second pulse signal to produce noise data. Herein, the first pulse signal consists of pulses which emerge in synchronization with the optical pulses respectively, while the second pulse signal delays from the first pulse signal by a prescribed delay time. Then, measurement data are produced by subtracting the noise data from the detection data. The measurement data are processed so that a measured waveform representing a measurement result is displayed on a screen of the EOS oscilloscope. Thus, it is possible to obtain the measured waveform with high precision and a good S/N ratio by eliminating low-frequency noise components from the measurement results.

摘要翻译： 电光采样示波器（或EOS示波器）被设计为执行测量，使得电光采样探针（即EOS探针）与被测电路接触。 光脉冲输入到EOS探头，响应于测量的电路，它们在极化状态下变化。 然后，从EOS探头输出的电信号被放大以产生接收光信号。 使用第一脉冲信号对接收光信号进行采样操作，以产生检测数据，同时还使用第二脉冲信号进行采样操作以产生噪声数据。 这里，第一脉冲信号由分别与光脉冲同步出现的脉冲组成，而第二脉冲信号从第一脉冲信号延迟规定的延迟时间。 然后，通过从检测数据中减去噪声数据来产生测量数据。 处理测量数据，使得表示测量结果的测量波形显示在EOS示波器的屏幕​​上。 因此，通过从测量结果中消除低频噪声分量，可以获得高精度和良好S / N比的测量波形。

公开(公告)号：US4456980A

公开(公告)日：1984-06-26

申请号：US357840

申请日：1982-03-15

申请人： Junzo Yamada ,  Tsuneo Mano ,  Junichi Inoue

发明人： Junzo Yamada ,  Tsuneo Mano ,  Junichi Inoue

IPC分类号： G11C29/00 ,  G06F11/10 ,  G11C29/42

CPC分类号： G06F11/1008 ,  G06F11/1076

摘要： A semiconductor memory device comprises at least one word line, a plurality of bit lines extending across the word line, a data memory cell unit including a plurality of data memory cells connected between the word line and the bit lines for storing information, a plurality of first extra bit lines corresponding to first groups of the bit lines, each of which has k bit lines (k is an integer), and extending across the word line, a plurality of first extra memory cells connected between the word line and the first extra bit lines for storing first checking information with respect to the first groups of the bit lines, a plurality of second extra bit lines corresponding to second groups of the bit lines, each of which group has m bit lines (m is an integer), and extending across the word line, a plurality of second extra memory cells connected between the word line and the second extra bit lines for storing second checking information with respect to the second groups of the bit lines, an error detection circuit for comparing the information fed from the data memory cells with the contents of the first and second extra memory cells to detect errors, and a circuit responsive to an output from the error detection circuit for correcting the information fed from the data memory cells, the first extra bit lines being grouped correspondingly to the first groups of the bit lines, the second extra bit lines being grouped correspondingly to the second groups of the bit lines, each of the second groups of the second extra bit lines being composed of the first extra bit lines in each first group thereof.

摘要翻译： 半导体存储器件包括至少一个字线，跨越字线延伸的多个位线，数据存储单元单元，包括连接在字线和位线之间的用于存储信息的多个数据存储单元，多个 对应于第一组位线的第一额外位线，每个位线具有k个位线（k是整数）并且跨越该字线延伸，多个第一额外存储器单元连接在字线和第一额外 用于存储关于位线的第一组的第一检查信息的位线，对应于位线的第二组的多个第二额外位线，每个位组具有m个位线（m是整数），以及 连接在字线之间的多个第二额外存储器单元，连接在字线和第二额外位线之间，用于存储关于位线的第二组的第二检查信息， n个误差检测电路，用于将从数据存储器单元馈送的信息与第一和第二额外存储器单元的内容进行比较以检测错误;以及电路，其响应于来自误差检测电路的输出，用于校正从数据存储器馈送的信息 所述第一额外位线对应于所述第一组位线被分组，所述第二额外位线对应于所述第二组位线被分组，所述第二额外位线的第二组中的每一个由 其第一组中的第一额外位线。

公开(公告)号：US06342783B1

公开(公告)日：2002-01-29

申请号：US09416504

申请日：1999-10-08

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R3100

CPC分类号： G01R1/071

摘要： An electrooptic probe which can facilitate replacement of a metallic pin. A probe head constituting a tip end portion of a probe body including a head body for retaining an electrooptic element and a tip member detachably provided on the head body for retaining the metallic pin.

摘要翻译： 电光探头，可以方便更换金属销。 构成探头主体的前端部的探头，其包括用于保持电光元件的头本体和可拆卸地设置在头本体上用于保持金属销的尖端构件。

公开(公告)号：US06288529B1

公开(公告)日：2001-09-11

申请号：US09323942

申请日：1999-06-02

申请人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjou ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Jun Kikuchi ,  Nobukazu Banjou ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R2316

CPC分类号： G01R13/347 ,  G01R13/32

摘要： The present invention relates to an electro-optic sampling oscilloscope. This electro-optic sampling oscilloscope carries out measurement of measured signal by using an optical pulse generated based on a timing signal generated from a timing generation circuit synchronous with a trigger signal, providing: a timing generation circuit comprising a fast ramp circuit that outputs a ramp waveform using said trigger signal as a trigger, a slow ramp circuit that increases stepwise and sequentially the output value according to said timing signal; a comparator circuit that compares the output of said fast ramp circuit and the output of said slow ramp circuit and outputs the results of this comparison; and a gate circuit that limits the output of said comparator circuit by closing a gate only when the output of said comparator circuit is unstable based on the input trigger signal and timing signal.

摘要翻译： 本发明涉及一种电光采样示波器。该电光采样示波器通过使用基于由与触发信号同步的定时产生电路产生的定时信号产生的光脉冲来执行测量信号的测量，提供： 定时生成电路，包括使用所述触发信号作为触发输出斜坡波形的快速斜坡电路，根据所述定时信号逐步依次增加输出值的慢斜坡电路; 比较电路，比较所述快速斜坡电路的输出和所述慢斜波电路的输出，并输出该比较的结果; 以及门电路，其仅在所述比较器电路的输出基于输入触发信号和定时信号不稳定时闭合栅极来限制所述比较器电路的输出。

公开(公告)号：US4747080A

公开(公告)日：1988-05-24

申请号：US926699

申请日：1986-11-03

申请人： Junzo Yamada

发明人： Junzo Yamada

IPC分类号： G06F11/10 ,  G06F11/20 ,  G11C13/00 ,  G11C11/40

CPC分类号： G06F11/1008 ,  G06F11/1076

摘要： A semiconductor memory having a self correction function, includes: a plurality of memory cells which are divided into a plurality of area groups, store data, and are arranged in a matrix; a plurality of parity cells, associated with the area groups of the memory cells, for forming horizontal and vertical parity codes together with the data in the memory cells of the respective area groups; word lines for simultaneously selecting the plurality of memory cells and the parity cells; bit lines for exchanging data with the memory cells; parity bit lines for exchanging parity bit data with the parity cells; selectors for selecting data of the memory cells and data of the parity cell in the area group to which a memory cell to be checked belongs; means for performing parity check of a plurality of data from the selectors; and means for automatically correcting a bit error using the output from the parity check means. The memory cells divided into the area groups and the parity cells combined therewith are arranged so as not to belong to the same horizontal and vertical arrays of the matrix.

摘要翻译： 具有自校正功能的半导体存储器包括：多个存储单元，被分成多个区域组，存储数据，并以矩阵形式排列; 与存储器单元的区域组相关联的多个奇偶校验单元，用于在相应区域组的存储器单元中与数据一起形成水平和垂直奇偶校验码; 用于同时选择多个存储单元和奇偶校验单元的字线; 用于与存储器单元交换数据的位线; 用于与奇偶校验单元交换奇偶校验位数据的奇偶校验位线; 用于选择存储器单元的数据的选择器和要检查的存储器单元所属的区域组中的奇偶校验单元的数据; 用于对来自选择器的多个数据进行奇偶校验的装置; 以及用于使用奇偶校验装置的输出自动校正位错误的装置。 划分为区域组的存储器单元和与其组合的奇偶校验单元被布置为不属于矩阵的相同的水平和垂直阵列。

公开(公告)号：US06567760B1

公开(公告)日：2003-05-20

申请号：US09300288

申请日：1999-04-27

申请人： Jun Kikuchi ,  Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Nobukazu Banjo ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Jun Kikuchi ,  Nobuaki Takeuchi ,  Yoshiki Yanagisawa ,  Nobukazu Banjo ,  Yoshio Endou ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G06F1700

CPC分类号： G01R13/347

摘要： An electro-optic sampling oscilloscope (or EOS oscilloscope) uses an electro-optic probe containing an electro-optic crystal, which is placed under effect of an electric field caused by a measured signal. Laser pulses are supplied to the electro-optic crystal wherein they are subjected to polarization. Then, measurement data representative of a waveform of the measured signal are produced in response to polarization states of the laser pulses and are stored in a measurement data storage. A user can select specific measurement data by using a list of files of multiple measurement data which is displayed on a screen. Then, the EOS oscilloscope displays an outline waveform which is created based on a reduced number of sample points extracted from the selected measurement data. Comments and/or measurement conditions can be stored in the measurement data storage in relation to the measurement data, so that they are adequately displayed on the screen.

摘要翻译： 电光采样示波器（或EOS示波器）使用包含电光晶体的电光探头，电光晶体由测量信号引起的电场的影响。 将激光脉冲提供给电光晶体，其中它们经受极化。 然后，响应于激光脉冲的偏振状态产生表示测量信号的波形的测量数据，并存储在测量数据存储器中。 用户可以通过使用显示在屏幕上的多个测量数据的文件列表来选择特定的测量数据。 然后，EOS示波器显示基于从所选择的测量数据中提取的减少数量的采样点创建的轮廓波形。 注释和/或测量条件可以相对于测量数据存储在测量数据存储器中，使得它们被充分地显示在屏幕上。

公开(公告)号：US06407561B1

公开(公告)日：2002-06-18

申请号：US09578963

申请日：2000-05-25

申请人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

发明人： Akishige Ito ,  Katsushi Ohta ,  Toshiyuki Yagi ,  Mitsuru Shinagawa ,  Tadao Nagatsuma ,  Junzo Yamada

IPC分类号： G01R31308

CPC分类号： G01R1/071

摘要： A probe for an electro-optic sampling oscilloscope is provided, capable of obtaining an improved accuracy in measurement of the test measuring signals by controlling a temperature of an electro-optic element so as to be maintained at a constant such that the refractive index of the electro-optic element does not change due to the temperature change. The probe for the electro-optic sampling oscilloscope comprises a reflecting film at one end and a metal pin provided on the surface of the reflecting film such that the optical property of the electro-optic film changes according to an electric field applied through the metal pin. The probe further comprises a temperature detecting portion, disposed so as to contact with the electro-optic element, for detecting and outputting the temperature of the electro-optic element, a temperature adjusting portion, disposed so as to contact with the electro-optic element facing the temperature detecting portion about the electro-optic element, and a temperature controlling portion for controlling the temperature adjusting portion based on the result of the temperature detection.

摘要翻译： 提供了一种用于电光采样示波器的探针，其能够通过控制电光元件的温度来获得测试测量信号的测量精度，从而保持恒定，使得 电光元件不会因温度变化而变化。 用于电光取样示波器的探针包括一端的反射膜和设置在反射膜的表面上的金属针，使得电光膜的光学特性根据通过金属引脚施加的电场而改变 。 探头还包括设置成与电光元件接触的温度检测部分，用于检测和输出电光元件的温度，温度调节部分，设置成与电光元件接触 面对围绕电光元件的温度检测部分，以及温度控制部分，用于基于温度检测的结果来控制温度调节部分。