公开(公告)号：US20150107273A1

公开(公告)日：2015-04-23

申请号：US14059851

申请日：2013-10-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Surendra Babu Anantharaman ,  Wen-Cheng Yang ,  Chung-En Kao ,  Victor Y. Lu ,  Wei Chin

IPC: F04B37/08

CPC classification number: F04B37/08 ,  F04B37/085

Abstract: Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.

Abstract translation: 低温泵装置包括达到超高真空度的纳米结构材料。 纳米结构材料可以与用于固定吸附剂材料的吸附材料或固定胶层混合。 纳米结构材料的良好导热性和吸附性能有助于降低工作温度并延长低温泵的再生循环。