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    Bi-directional, single material thermal actuator
    21.
    发明授权
    Bi-directional, single material thermal actuator 有权
    双向单材料热传动器

    公开(公告)号：US06608714B2

    公开(公告)日：2003-08-19

    申请号：US09892616

    申请日：2001-06-28

    Applicant: Heather Shannon Hanson ,  Joseph Nathan Mitchell

    Inventor： Heather Shannon Hanson ,  Joseph Nathan Mitchell

    IPC: G02B2600

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2201/11 ,  B81B2203/055 ,  H01H2061/008

    Abstract: A thermal actuator includes a first arm having a proximal end and a distal end, a second arm, parallel to the first arm, having a proximal end and a distal end, and a third arm arranged between and parallel to the first and second arms, the third arm having a proximal end and a distal end. The third arm has at least one portion at the distal end of the third arm having a width that is substantially larger than a width of the first arm and a width of the second arm. The distal ends of the first, second and third arms are coupled together to form a distal end of the thermal actuator, and the first, second and third arms preferably are made of a single material. A number of thermal actuators can be arranged in an array. The thermal actuator or array of thermal actuators can be coupled to an applicator.

    Abstract translation: 热致动器包括具有近端和远端的第一臂，平行于第一臂的第二臂，具有近端和远端，以及布置在第一臂和第二臂之间并平行于第一臂的第三臂， 第三臂具有近端和远端。 第三臂具有在第三臂的远端处的至少一个部分，其宽度基本上大于第一臂的宽度和第二臂的宽度。 第一，第二和第三臂的远端联接在一起以形成热致动器的远端，并且第一，第二和第三臂优选地由单一材料制成。 许多热致动器可以排列成阵列。 热致动器或热致动器阵列可以耦合到施加器。

    Method of forming compound stage MEM actuator suspended for multidimensional motion
    23.
    发明授权
    Method of forming compound stage MEM actuator suspended for multidimensional motion 失效
    形成用于多维运动的复合级MEM致动器的形成方法

    公开(公告)号：US5506175A

    公开(公告)日：1996-04-09

    申请号：US443331

    申请日：1995-05-17

    Applicant: Z. Lisa Zhang ,  Noel C. MacDonald

    Inventor： Z. Lisa Zhang ,  Noel C. MacDonald

    IPC: B81B1/00 ,  B81B3/00 ,  H02N1/00 ,  H01L21/465

    CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0062 ,  B81C1/0019 ,  B82Y15/00 ,  B81B2201/11 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2207/07

    Abstract: A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.

    Abstract translation: 由亚微米悬浮单晶硅光束制造能够沿x，y和z轴运动的微机电复合级微致动器组件，用于定位和扫描集成的机电传感器和致动器。 该微型致动器包括用于机械地支撑中央级并用于提供与微型致动器的部件的电连接以及由此承载的装置的互连系统。 使用改进的单晶反应蚀刻和金属化工艺制造微致动器，其包括利用设备的选定区域的热氧化的隔离工艺，以提供绝缘段，其限定从外部电路到致动器部件的导电路径以及限定门控的微电子器件 由致动器承载的场致发射体。

    Micro actuator
    24.
    发明授权
    Micro actuator 失效
    微型执行器

    公开(公告)号：US5489812A

    公开(公告)日：1996-02-06

    申请号：US233486

    申请日：1994-04-26

    Applicant: Tomotake Furuhata ,  Toshiki Hirano

    Inventor： Tomotake Furuhata ,  Toshiki Hirano

    IPC: B23Q1/34 ,  B81B3/00 ,  B81C1/00 ,  H01L41/09 ,  H02N2/00 ,  B23Q16/00

    CPC classification number: B81B3/0054 ,  B23Q1/34 ,  B81C1/0019 ,  B81C1/00198 ,  H02N1/002 ,  H02N2/0025 ,  H02N2/026 ,  B81B2201/032 ,  B81B2201/11 ,  B81B2203/0315 ,  B81B2207/053 ,  B81C2203/032 ,  Y10T29/42

    Abstract: A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by a device which includes a driving section bonded to a silicon wafer for applying a driving force to excite vertical motion, and a mechanism for converting this vertical motion into rotational motion. Three types of micro actuators are described herein: one, that uses vibration as its driving force; a second, that uses Coulomb's force; and a third, that utilizes fluid pressure, such as air.

    Abstract translation: 一种用于提供微定位的装置，其分别在X和Y方向上具有亚微米级的工作范围。 定位是通过一种装置实现的，该装置包括结合到硅晶片的驱动部分，用于施加驱动力以激发垂直运动，以及用于将该垂直运动转换成旋转运动的机构。 这里描述了三种微型致动器：一种是使用振动作为其驱动力; 一秒钟，使用库仑的力量; 第三个，利用流体压力，如空气。

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