公开(公告)号：US11092872B1

公开(公告)日：2021-08-17

申请号：US16819971

申请日：2020-03-16

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02F1/29 ,  G02B6/12 ,  G02B6/122

Abstract: Structures including an optical phased array and methods of fabricating such structures. A first optical phased array includes a first plurality of antennas. A plurality of phase shifters are respectively coupled to the first plurality of antennas. A second optical phased array includes a second plurality of antennas, and a third optical phased array includes a third plurality of antennas. The second optical phased array is located in a first direction relative to the first optical phased array. The third optical phased array is located in a second direction relative to the first optical phased array. The second direction is different from the first direction.

公开(公告)号：US11092740B1

公开(公告)日：2021-08-17

申请号：US16850350

申请日：2020-04-16

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Bo Peng

IPC: G02B6/10 ,  G02B5/30

Abstract: Structures for a polarizer and methods of forming a structure for a polarizer. A first slotted waveguide component is positioned over a first waveguide core, and a second slotted waveguide component positioned over the first slotted waveguide component. The first slotted waveguide component includes a second waveguide core and a third waveguide core separated by a first slot, and the second slotted waveguide component includes a fourth waveguide core and a fifth waveguide core separated by a second slot. The first waveguide core is laterally aligned with the first slot and the second slot.

公开(公告)号：US20210217916A1

公开(公告)日：2021-07-15

申请号：US16740664

申请日：2020-01-13

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Ajey Poovannummoottil Jacob ,  Yusheng Bian ,  Steven Shank

IPC: H01L31/103 ,  G02B6/13 ,  G02B6/12 ,  H01L31/0392

Abstract: One illustrative photodetector disclosed herein includes an N-doped waveguide structure defined in a semiconductor material, the N-doped waveguide structure comprising a plurality of first fins, and a detector structure positioned on the N-doped waveguide structure, wherein a portion of the detector structure is positioned laterally between the plurality of first fins. In this example, the photodetector also includes at least one N-doped contact region positioned in the semiconductor material and a P-doped contact region positioned in the detector structure.

公开(公告)号：US20210217912A1

公开(公告)日：2021-07-15

申请号：US16740719

申请日：2020-01-13

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Ajey Poovannummoottil Jacob ,  Yusheng Bian ,  Steven Shank

IPC: H01L31/0352 ,  H01L31/0232 ,  H01L31/103 ,  H01L31/028 ,  H01L31/18

Abstract: A photodetector disclosed herein includes an N-doped waveguide structure defined in a semiconductor material, wherein the N-doped waveguide structure comprises a plurality of first fins. Each adjacent pair of the plurality of first fins is separated by a trench formed in the semiconductor material. The photodetector also includes a detector structure positioned on the N-doped waveguide structure, wherein a portion of the detector structure is positioned laterally between the plurality of first fins. The detector structure comprises a single crystal semiconductor material. The photodetector also includes a first diffusion region that extends from the bottom surface of the trench into the semiconductor material, wherein the first diffusion region comprises atoms of the single crystal semiconductor material of the detector structure.

公开(公告)号：US20210191162A1

公开(公告)日：2021-06-24

申请号：US16718561

申请日：2019-12-18

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02F1/01

Abstract: One optical antenna coupler includes a base body having a first waveguide and a second waveguide and a plurality of antenna coupler elements positioned above an upper surface of the base body that are adapted to be irradiated by an incident light. The plurality of antenna coupler elements includes at least one variable optical characteristics (VOC) antenna coupler element that comprises a VOC material, wherein the at least one VOC antenna coupler element is operatively coupled to a first energy source. The VOC antenna coupler element is adapted to be transitioned from a metallic state to an insulator state and vice versa. In the metallic state, substantially all of the incident light is directed out of the optical antenna coupler via the first waveguide and, in the insulator state, substantially all of the incident light is directed out of the optical antenna coupler via the second waveguide.

公开(公告)号：US20210191042A1

公开(公告)日：2021-06-24

申请号：US17170959

申请日：2021-02-09

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Bo Peng ,  Ajey Poovannummoottil Jacob ,  Yusheng Bian

IPC: G02B6/26

Abstract: Optical coupler structures include a waveguide having waveguide metamaterial segments aligned along a first line. A second insulator is on the first insulator and the waveguide metamaterial segments. A coupler structure is in the second insulator and has coupler metamaterial segments aligned along a second line. The first line and the second line are parallel and within a plane. A portion of the waveguide overlaps a portion of the coupler structure. The waveguide metamaterial segments intersect the plane and have first widths perpendicular to the plane, and the first widths have a first taper along the first line. The coupler metamaterial segments intersect the plane and have second widths in the direction perpendicular to the plane. The second widths have a second taper along the second line that is different from the first taper of the first widths where the waveguide overlaps the coupler structure.

公开(公告)号：US20210141156A1

公开(公告)日：2021-05-13

申请号：US16682502

申请日：2019-11-13

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob ,  Michal Rakowski ,  Bo Peng

IPC: G02B6/34

Abstract: Structures including a grating coupler and methods of fabricating such structures. The structure includes a waveguide core, a bend, and a grating coupler coupled to the waveguide core by the bend. The grating coupler includes grating structures that are positioned with a spaced relationship in a layer stack above the bend.

公开(公告)号：US10989872B1

公开(公告)日：2021-04-27

申请号：US16657291

申请日：2019-10-18

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Ajey Poovannummoottil Jacob

IPC: G02B6/125 ,  G02B6/12 ,  G02B6/13

Abstract: Structures for a waveguide bend and methods of fabricating a structure for a waveguide bend. A waveguide bend is connected to a waveguide core. A slab layer, which is thinner than the waveguide bend, is coupled to the waveguide core and the waveguide bend. The slab layer includes a first curved opening and a second curved opening that is positioned between the first curved opening and a side surface of the waveguide bend. A section of the slab layer is positioned between the first and second curved openings. The first curved opening has a first radius, and the second curved opening has a second radius that is greater than or less than the first radius of the first curved opening.