摘要:
A method for manufacturing a substrate for a liquid discharge head having a silicon substrate provided with a supply port of a liquid comprises steps of preparing a substrate which is provided with a passive film on one side face thereof, has a first recess and a second recess provided therein so as to penetrate from the one side face into the inner part through the passive film, wherein the recesses satisfy a relation of a ×tan 54.7 degrees≦d, where a is defined as a distance between the first recess and the second recess, and d is defined as a depth of the second recess, and forming the supply port by anisotropically etching the crystal from the one side face.
摘要:
An ink jet printing head substrate has a high adhesion between an electrode layer and a nozzle formation member and the corrosion or electrolysis, for example, of an electrode due to the contact between the electrode and ink can be reduced. The ink jet printing head includes an electrode layer for supplying power to a heat-generating portion that is provided on a substrate and that generates thermal energy for ejecting ink; and a resin layer provided on the electrode layer via a nickel-containing layer. The electrode layer includes precious metal as a main component. The nickel-containing layer consists of a gold-nickel alloy containing nickel.
摘要:
A liquid ejection head includes a substrate including, at a surface thereof, an ejection energy generating means for generating ejection energy for ejecting liquid, a flow path forming member provided with an ejection outlet, the substrate further including a liquid supply opening, penetrating therethrough, for supplying the liquid to be ejected by the ejection energy to a flow path of the flow path forming member; a reinforcing member connected to a back side of the substrate; a first penetrating electrode, penetrating the substrate from a front side to the back side thereof, for supplying electric power to the ejection energy generating means; and a second penetrating electrode penetrating the reinforcing member from a front side to a back side thereof, the second penetrating electrode being electrically connected to the first penetrating electrode.
摘要:
A substrate for an ink jet head is provided with a plurality of energy generating members generating energy used for discharging an ink, an electrode pad which is arranged near a side of the substrate, and is for electrically connecting to an outside of the substrate, a plurality of electrode wirings for electrically connecting the plurality of energy generating members and the electrode pad, and a plurality of resistance elements which are respectively provided at the plurality of electrode wirings. Resistance values of the plurality of resistance elements differ from one another according to resistance values of the electrode wirings provided with the respective resistance elements.
摘要:
A method of manufacturing a liquid ejection head and a liquid ejection head capable of preventing corrosion of electrodes are provided. The method of manufacturing a liquid ejection head includes: a step of forming porous silicon areas in portions of a silicon substrate where the liquid paths are to be formed; a step of forming in layers in the porous silicon areas a protective layer, a heating resistor layer, an electrode layer and a heat accumulation layer; a step of forming ink ejection openings in the silicon substrate; and a step of removing the porous silicon areas.
摘要:
A base for a liquid discharge head includes a heat element which forms an exothermic portion 108, an electrode wire 105 that is electrically connected with the heat element, an insulative protective layer 106 provided above the heat generating resistive element and the electrode wire and an upper protective layer 107 provided on the protective layer. The upper protective layer is made from a TaSi alloy containing 22 at. % or more Si.
摘要:
A method for forming an element substrate which includes a substrate, an ink supply port penetrating substrate and energy supplying means for supplying ejection energy to ink introduced through ink supply port, the method includes a step of forming the energy supplying means on the substrate, then; a step of thinning the substrate, and then; an ink supply port forming step of forming the ink supply port in the substrate.
摘要:
A liquid discharge head includes a substrate having a discharge port, a plurality of energy generating elements disposed on a first surface of the substrate for generating energy to discharge liquid from the discharge port, a liquid supply port, and a member provided on the first surface and forming a wall of a liquid chamber and a wall of a liquid path from the liquid supply port through the liquid chamber to the discharge port. A plurality of first penetrating electrodes penetrate the substrate from the first surface to the second surface, wherein one of the first penetrating electrodes electrically connects one of the energy generating elements, and a plurality of second penetrating electrodes penetrate the substrate from the first surface to the second surface, wherein one of the second penetrating electrodes electrically connects to the same energy generating element connected to the first penetrating electrode. Also, first and second power wirings are provided, and a plurality of driving elements are electrically connected between the first penetrating electrode and the first power wiring, correspondingly to each of the energy generating elements, to drive and control the energy generating elements.
摘要:
A manufacturing method for manufacturing a liquid ejection element including a liquid flow path which is open at an ejection outlet for ejecting liquid, and an energy generating member for generating energy usable for ejecting the liquid from liquid flow path through the ejection outlet, the manufacturing method, includes a step of forming the energy generating member on a front side of a substrate; a step of forming a top plate member on the side having the energy generating member formed by the energy generating member forming step, wherein the top plate member is a member in which the liquid flow path and the ejection outlet are formed; and a step of thinning the substrate, having the top plate member formed thereon by the top plate member forming step, from a back side thereof.
摘要:
Provided is a method of manufacturing a substrate for a liquid discharge head, the substrate including a silicon substrate with a liquid supply opening formed therein, the method including: forming one processed portion by laser processing on the substrate from one surface of the substrate; expanding the one processed portion to form a recess portion by performing laser processing at a position which overlaps a part of the one processed portion and does not overlap another part of the one processed portion; and etching from the one surface the substrate with the recess portion formed therein to form the liquid supply opening.