Abstract:
A semiconductor photonic device contains a substrate: a ZnO buffer layer; and a compound semiconductor layer represented by InxGayAlzN (where x+y+z=1, 0≦x≦1, 0≦y≦1, and 0≦z≦1), wherein the ZnO buffer has a thickness of about 3,500 Å or more and is aligned in a c-axis direction.
Abstract translation:半导体光子器件包含衬底:ZnO缓冲层; 和由InxGayAlzN(其中x + y + z = 1,0 <= x <= 1,0 <= y <= 1和0 <= z <= 1)表示的化合物半导体层,其中ZnO缓冲液具有 约3,500或更大的厚度并且在c轴方向上对准。
Abstract:
An acousto-optic deflector which has a thin film waveguide layer on a buffer layer formed on a substrate and an IDT and light incidence/emergence means on the thin film waveguide layer. As the thin film waveguide layer, a piezoelectric material such as a ZnO film is used. As the substrate, a material with a resistivity of not more than 20 &OHgr;cm is used. Sezawa waves are excited on the thin film waveguide layer by the IDT, and a laser beam traveling in the thin film waveguide layer is deflected by the Sezawa waves. If the ZnO thin film waveguide layer has a thickness of h and if the excited Sezawa waves have a wavelength of &lgr;, 0.2
Abstract:
A surface acoustic wave device includes a piezoelectric substrate made of a Langasite single crystal and at least one interdigital transducer including a pair of comb-shaped electrodes which are interdigitated with each other and are in contact with the piezoelectric substrate. The piezoelectric substrate has a Euler angle of approximately (0.degree., 130.degree. to 170.degree., 23.degree. to 30.degree.), whereby the surface acoustic wave device has an excellent TCD and also has a large K.sup.2 value.
Abstract:
A surface acoustic wave device includes a quartz substrate and generates surface acoustic waves having a high sonic speed. A surface acoustic wave device includes a surface wave substrate comprising a quartz substrate on which an ZnO thin film functioning as a piezoelectric thin film is disposed. IDTs comprising respective pairs of comb electrodes are disposed in contact with the ZnO thin film. A thickness and arrangement of the piezoelectric thin film relative to the quartz substrate and comb electrodes is such that a novel higher order mode of leakage elastic surface acoustic waves are generated and effectively used enable operation at higher sonic velocity and higher frequency.
Abstract:
A piezoelectric transformer includes a piezoelectric plate in which a pair of cuts are formed in the piezoelectric plate at a position corresponding to a nodal point of the piezoelectric plate. The pair of cuts form a cut-out projection. Connection electrodes electrically connected to input electrodes are respectively formed on input-side cut-out projections. In this piezoelectric transformer, the desired support and electrical connection are made through the cut-out projections.
Abstract:
A double-mode SAW filter of a longitudinally coupling type utilizing an SH-type surface wave, which is structured with first and second IDTs formed on said piezoelectric substrate to cause reflection of an SH-type surface wave between opposite two end faces, thereby creating a standing wave.
Abstract:
An end face reflection type surface wave resonator utilizing SH type surface waves capable of providing a plurality of resonance characteristics is formed as a single element. In the surface wave resonator, surface waves are reflected between two opposite end faces of a piezoelectric substrate. The surface wave resonator has IDTs that form first and second resonant units. The distance L between the two end faces is selected to be within a range expressed by (.lambda..sub.1 /2).times.N.sub.1 .+-.(.lambda..sub.1 /20) (N.sub.1 is an integral number) where .lambda.1 represents the wavelength of a surface wave excited by the first resonant unit. The distance L is chosen to be out of a range expressed by (.lambda..sub.2 /2).times.N.sub.2 .+-.(.lambda..sub.1 /20) (N.sub.2 is an integral number) where .lambda..sub.2 represents the wavelength of a surface wave excited by the second resonant unit.
Abstract:
A surface acoustic wave device using a quartz substrate has a larger electromechanical coupling coefficient than conventional devices. The SAW device is constructed by forming a thin ZnO film on a quartz substrate and disposing comb-like electrodes on the ZnO film.
Abstract:
A surface acoustic wave filter comprises an interdigital transducer structured to excite individually a symmetrical component and an asymmetrical component for the purpose of achieving an asymmetrical frequency characteristic. The interdiginal transducer is divided into a plurality of portion electrodes in the propagating direction of the surface acoustic wave and the divided portion electrodes are electrically connected in series. Accordingly, the electrode fingers adjacent to each other at the dividing region have different potentials. One of the electrode fingers adjacent to each other at the dividing region is configured to be bent or widened toward the other electrode finger, while the other electrode finger is configured to be bent on widened toward the one electrode finger at the extended portion thereof.
Abstract:
An in-liquid-substance detection sensor that achieves size reduction and detection accuracy improvement includes a piezoelectric substrate, at least two SAW devices provided on one major surface of the piezoelectric substrate and each having at least one IDT electrode defining a sensing portion, outer electrodes provided on the other major surface of the piezoelectric substrate and electrically connected to the SAW devices through vias extending through the piezoelectric substrate, a channel-defining member provided on the one major surface of the piezoelectric substrate so as to surround the SAW devices and a region connecting the SAW devices to each other, thereby defining sidewalls of a channel, and a protective member bonded to the one major surface of the piezoelectric substrate with the channel-defining member interposed therebetween, thereby sealing the channel, the protective member having at least two through holes communicating with the channel.