公开(公告)号：US08256275B2

公开(公告)日：2012-09-04

申请号：US12555894

申请日：2009-09-09

申请人： Hajime Yamada ,  Naoko Aizawa ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Toru Yabe ,  Michio Kadota

发明人： Hajime Yamada ,  Naoko Aizawa ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Toru Yabe ,  Michio Kadota

IPC分类号： G01N29/00

CPC分类号： G01N29/022 ,  G01N29/222 ,  G01N2291/022 ,  G01N2291/0423

摘要： An in-liquid-substance detection sensor that achieves size reduction and detection accuracy improvement includes a piezoelectric substrate, at least two SAW devices provided on one major surface of the piezoelectric substrate and each having at least one IDT electrode defining a sensing portion, outer electrodes provided on the other major surface of the piezoelectric substrate and electrically connected to the SAW devices through vias extending through the piezoelectric substrate, a channel-defining member provided on the one major surface of the piezoelectric substrate so as to surround the SAW devices and a region connecting the SAW devices to each other, thereby defining sidewalls of a channel, and a protective member bonded to the one major surface of the piezoelectric substrate with the channel-defining member interposed therebetween, thereby sealing the channel, the protective member having at least two through holes communicating with the channel.

摘要翻译： 实现尺寸减小和检测精度提高的液体内物质检测传感器包括压电基板，设置在压电基板的一个主表面上的至少两个SAW器件，每个具有限定感测部分的至少一个IDT电极，外部电极 设置在压电基板的另一个主表面上，并且通过延伸穿过压电基板的通孔电连接到SAW器件，设置在压电基板的一个主表面上以便包围SAW器件的通道限定元件和区域 将所述SAW器件彼此连接，由此限定通道的侧壁，以及保护构件，其与所述压电基板的所述一个主表面接合，并且所述通道限定构件插入其间，从而密封所述通道，所述保护构件具有至少两个 通道与通道相通。

公开(公告)号：US08780533B2

公开(公告)日：2014-07-15

申请号：US13296381

申请日：2011-11-15

申请人： Hitoshi Kuromi ,  Taro Ueno ,  Koji Fujimoto ,  Emi Matsushita ,  Yoshihiro Koshido

发明人： Hitoshi Kuromi ,  Taro Ueno ,  Koji Fujimoto ,  Emi Matsushita ,  Yoshihiro Koshido

IPC分类号： H01G9/00 ,  H01G9/04 ,  H01G9/145 ,  H01G5/38

CPC分类号： H01G9/04 ,  H01G9/028 ,  H01G9/15 ,  H01G11/56 ,  Y02E60/13 ,  Y10T156/10

摘要： A solid electrolytic capacitor that includes a laminated body, a solid electrolyte layer, and conductive bases. The laminated body is obtained by laminating a plurality of dielectric-coated valve action metal sheets, each of which includes a valve action metal base and a dielectric coating, and joining together the adjacent valve action metal bases. The valve action metal base has a cathode layer part, and the dielectric coating covers the surface of the valve action metal base at least the cathode layer part. The valve action metal base of at least one of the dielectric-coated valve action metal sheets further has an anode lead part. The solid electrolyte layer is a continuous layer that fills gaps between the dielectric-coated valve action metal sheets and covers the outer surface of the laminated body at the cathode layer parts, and conductive bases are provided in the solid electrolyte layer.

摘要翻译： 一种固体电解电容器，其包括层叠体，固体电解质层和导电性基材。 层叠体通过层叠多个电介质涂覆的阀作用金属片而得到，每个金属片包括阀作用金属基底和电介质涂层，并将相邻的阀作用金属基底接合在一起。 阀动作金属基底具有阴极层部分，并且电介质涂层至少覆盖阴极层部分的阀作用金属基体的表面。 电介质涂覆的阀作用金属片中的至少一个的阀作用金属基底还具有阳极引线部。 固体电解质层是填充介电涂层的阀作用金属片之间的间隙并在阴极层部分覆盖层叠体的外表面的连续层，并且在固体电解质层中设置导电性基材。

公开(公告)号：US06725513B2

公开(公告)日：2004-04-27

申请号：US09875216

申请日：2001-06-06

申请人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Takeshi Nakao

发明人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Koji Fujimoto ,  Takeshi Nakao

IPC分类号： H04R1700

CPC分类号： H03H3/08 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method for manufacturing a surface acoustic wave apparatus decreases a specific resistance of an electrode film by removing hydrogen occluded in the electrode film that is primarily composed of tantalum, so that the device properties are stabilized. An electrode film primarily composed of tantalum is formed on a piezoelectric substrate. Subsequently, this electrode film is heat-treated in a vacuum at a temperature of about 200° C. to about 700° C. for several hours. Thereafter, the electrode film is patterned so as to produce an interdigital electrode transducer.

摘要翻译： 制造声表面波装置的方法通过去除主要由钽构成的电极膜中吸收的氢而使电极膜的比电阻降低，使得器件特性稳定。 在压电基板上形成主要由钽构成的电极膜。 随后，将该电极膜在约200℃至约700℃的温度下在真空中热处理数小时。 此后，对电极膜进行图案化以产生叉指式电极换能器。

公开(公告)号：US20120194968A1

公开(公告)日：2012-08-02

申请号：US13296381

申请日：2011-11-15

申请人： Hitoshi Kuromi ,  Taro Ueno ,  Koji Fujimoto ,  Emi Matsushita ,  Yoshihiro Koshido

发明人： Hitoshi Kuromi ,  Taro Ueno ,  Koji Fujimoto ,  Emi Matsushita ,  Yoshihiro Koshido

IPC分类号： H01G9/04 ,  B32B37/14 ,  B32B38/08 ,  B32B37/00

CPC分类号： H01G9/04 ,  H01G9/028 ,  H01G9/15 ,  H01G11/56 ,  Y02E60/13 ,  Y10T156/10

摘要： A solid electrolytic capacitor that includes a laminated body, a solid electrolyte layer, and conductive bases. The laminated body is obtained by laminating a plurality of dielectric-coated valve action metal sheets, each of which includes a valve action metal base and a dielectric coating, and joining together the adjacent valve action metal bases. The valve action metal base has a cathode layer part, and the dielectric coating covers the surface of the valve action metal base at least the cathode layer part. The valve action metal base of at least one of the dielectric-coated valve action metal sheets further has an anode lead part. The solid electrolyte layer is a continuous layer that fills gaps between the dielectric-coated valve action metal sheets and covers the outer surface of the laminated body at the cathode layer parts, and conductive bases are provided in the solid electrolyte layer.

摘要翻译： 一种固体电解电容器，其包括层叠体，固体电解质层和导电性基材。 层叠体通过层叠多个电介质涂覆的阀作用金属片而得到，每个金属片包括阀作用金属基底和电介质涂层，并将相邻的阀作用金属基底接合在一起。 阀动作金属基底具有阴极层部分，并且电介质涂层至少覆盖阴极层部分的阀作用金属基体的表面。 电介质涂覆的阀作用金属片中的至少一个的阀作用金属基底还具有阳极引线部。 固体电解质层是填充介电涂层的阀作用金属片之间的间隙并在阴极层部分覆盖层叠体的外表面的连续层，并且在固体电解质层中设置导电性基材。

公开(公告)号：US08156814B2

公开(公告)日：2012-04-17

申请号：US12505571

申请日：2009-07-20

申请人： Kenjiro Okaguchi ,  Michio Kadota ,  Koji Fujimoto

发明人： Kenjiro Okaguchi ,  Michio Kadota ,  Koji Fujimoto

IPC分类号： G01N29/036 ,  H01L41/04

CPC分类号： G01N29/022 ,  G01N5/02 ,  G01N29/036 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A surface acoustic wave sensor detects a mass load on a resonator-type surface acoustic wave filter on the basis of a change in frequency and includes an IDT electrode arranged on a piezoelectric substrate to excite surface waves, an insulating film arranged so as to cover the IDT electrode, and a reaction film which is disposed on the insulating film and which reacts with a target substance to be detected or a binding substance that binds to a target substance to be detected. The reaction film is composed of a metal or a metal oxide.

摘要翻译： 表面声波传感器基于频率变化来检测谐振器型表面声波滤波器的质量负载，并且包括布置在压电基板上以激发表面波的IDT电极，布置成覆盖 IDT电极和设置在绝缘膜上并与待检测的目标物质或与要检测的目标物质结合的结合物质的反应膜。 反应膜由金属或金属氧化物构成。

公开(公告)号：US06865786B2

公开(公告)日：2005-03-15

申请号：US10614412

申请日：2003-07-07

申请人： Takeshi Nakao ,  Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

发明人： Takeshi Nakao ,  Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda

IPC分类号： H03H9/145 ,  H02N2/00 ,  H03H3/08 ,  H03H9/00 ,  H03H9/25 ,  H03H9/64 ,  H04R17/00

CPC分类号： H03H9/6483 ,  H03H3/08 ,  H03H9/25 ,  H03H9/6436 ,  H03H9/6459 ,  Y10T29/42 ,  Y10T29/49121 ,  Y10T29/49126 ,  Y10T29/49128

摘要： In a method of manufacturing a surface acoustic wave device using a Shear Horizontal type surface acoustic wave, at least one interdigital transducer (IDT) is made of a material having a larger mass-load effect than that of aluminum. The metallization ratio of the IDT and the normalization film thickness h/λ of the IDT are controlled such that ripple caused by a transversal mode wave is about 1.5 dB or less, where “h” indicates the film thickness of the electrodes and “h” indicates the wavelength of a surface acoustic wave.

摘要翻译： 在使用剪切水平型声表面波的制造表面声波装置的方法中，至少一个叉指式换能器（IDT）由具有比铝高的质量负荷效应的材料制成。 控制IDT的金属化率和IDT的归一化膜厚度h /λ，使得由横向模式波引起的纹波为约1.5dB或更小，其中“h”表示电极的膜厚度，而“h” 表示声表面波的波长。

公开(公告)号：US06437668B1

公开(公告)日：2002-08-20

申请号：US09557805

申请日：2000-04-25

申请人： Takeshi Nakao ,  Toshimaro Yoneda ,  Koji Fujimoto ,  Michio Kadota

发明人： Takeshi Nakao ,  Toshimaro Yoneda ,  Koji Fujimoto ,  Michio Kadota

IPC分类号： H03H925

CPC分类号： H03H9/25

摘要： A surface acoustic wave resonator includes a piezoelectric substrate and an interdigital transducer disposed on the piezoelectric substrate and made of a metal or an alloy having a higher specific weight than that of the piezoelectric material of the piezoelectric substrate so as to generate shear horizontal waves. The interdigital transducer includes a plurality of electrode fingers. A ratio of the electrode finger width relative to the electrode finger width plus the space between adjacent electrode fingers is about 0.55 to about 0.85.

摘要翻译： 弹性表面波谐振器包括压电基片和配置在压电基片上并由与压电基片的压电材料相比具有更高比重的金属或合金制成的叉指换能器，以产生剪切水平波。 叉指换能器包括多个电极指。 电极指宽度相对于电极指宽度加上相邻电极指之间的空间的比率为约0.55至约0.85。

公开(公告)号：US6154105A

公开(公告)日：2000-11-28

申请号：US249036

申请日：1999-02-12

申请人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda ,  Takeshi Nakao

发明人： Koji Fujimoto ,  Michio Kadota ,  Toshimaro Yoneda ,  Takeshi Nakao

IPC分类号： H03H9/145 ,  H03H9/02 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/6436 ,  H03H9/02551 ,  H03H9/25 ,  H03H9/6459

摘要： A surface acoustic wave device includes a quartz substrate having an angle .theta. of Euler angles (0, .theta., 90.degree.) that satisfies 122.degree..ltoreq..theta..ltoreq.131.degree.. An interdigital transducer made of an electrode material including at least one of Ta and W is disposed on the quartz substrate.

摘要翻译： 表面声波装置包括具有满足122°θ131°的欧拉角（0°，θ，90°）的角度θ的石英基板。 由包括Ta和W中的至少一个的电极材料制成的叉指式换能器设置在石英基板上。

公开(公告)号：US07656070B2

公开(公告)日：2010-02-02

申请号：US11843527

申请日：2007-08-22

申请人： Michio Kadota ,  Koji Fujimoto

发明人： Michio Kadota ,  Koji Fujimoto

IPC分类号： H03H9/145

CPC分类号： G01N29/022 ,  G01N29/2462 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A surface wave sensor apparatus has a structure such that, on a first principal surface of a base substrate having first through-hole conductors, surface acoustic wave devices are bonded via thermo-compression anisotropic conductive sheets, on first principal surfaces of piezoelectric substrates of the surface acoustic wave devices, electrodes, such as IDTs, are provided, respectively. These electrodes extend toward second principal surfaces via second through-hole conductors and are provided in the piezoelectric substrates. The first through-hole conductors overlap with the second through-hole conductors with the thermo-compression anisotropic conductive sheets being disposed therebetween, respectively.

摘要翻译： 表面波传感器装置具有如下结构：在具有第一通孔导体的基底基板的第一主表面上，通过热压缩各向异性导电片将表面声波装置接合在第一通孔导体的压电基板的第一主表面上 分别提供表面声波装置，诸如IDT的电极。 这些电极经由第二通孔导体朝向第二主表面延伸，并设置在压电基板中。 第一通孔导体与第二通孔导体重叠，热压各向异性导电片分别设置在它们之间。

公开(公告)号：US07394180B2

公开(公告)日：2008-07-01

申请号：US10595317

申请日：2004-09-08

申请人： Kenjiro Okaguchi ,  Koji Fujimoto ,  Michio Kadota

发明人： Kenjiro Okaguchi ,  Koji Fujimoto ,  Michio Kadota

IPC分类号： H01L41/09

CPC分类号： G01N29/36 ,  G01N29/022 ,  G01N29/2462 ,  G01N2291/014 ,  G01N2291/0256 ,  G01N2291/0423 ,  H03B5/326 ,  H03B5/362

摘要： A surface-acoustic-wave-sensor-included oscillator circuit does not cause separation of an electrode film due to application of a bias voltage and can reliably accurate operate even if liquid is adhered thereto. The surface-acoustic-wave-sensor-included oscillator circuit includes interdigital electrode disposed on a piezoelectric substrate and a reaction film that is arranged so as to cover the interdigital electrodes and bound to a target substance or a binding material to be bound to the target substance. A surface acoustic wave sensor that is capable of detecting a bit of mass loading on the basis of a variation in frequency is connected as a resonator in the surface-acoustic-wave-sensor-included oscillator circuit. Direct-current cutting capacitors are connected in series to the surface acoustic wave sensor, and the direct-current cutting capacitors respectively define impedance matching circuits in the surface-acoustic-wave-sensor-included oscillator circuit.

摘要翻译： 包含表面声波传感器的振荡电路不会由于施加偏压而引起电极膜的分离，即使液体粘附在其上也能够可靠地进行精确的动作。 包含表面声波传感器的振荡电路包括布置在压电基片上的叉指式电极和反射膜，该反射膜布置成覆盖指状电极并结合到靶物质或结合材料上以与目标物结合 物质。 能够在基于频率变化的基础上检测质量负载量的表面声波传感器作为共振器连接在包含表面声波传感器的振荡电路中。 直流切割电容器与表面声波传感器串联连接，直流切断电容器分别在包含表面声波传感器的振荡电路中形成阻抗匹配电路。